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http://dx.doi.org/10.7236/JIIBC.2019.19.6.169

Design of 6 DOF Mechanism with Flexure Joints for telecommunication mirror and Experimental Stiffness Modeling  

Kang, Byoung Hun (Dept. of Mechanical Design Engineering, Korea Polytechnic University)
Publication Information
The Journal of the Institute of Internet, Broadcasting and Communication / v.19, no.6, 2019 , pp. 169-174 More about this Journal
Abstract
Flexure joints are recently used in the ultra-precision mechanism for a telecommunication mirror stage. Flexure joints have several advantages coming from their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. In our research, 6 dof(degree of freedom) mechanism is suggested for micrometer repeatability using a flexure mechanism. To design the 6-dof motion, the 2-dof planar mechanism are designed and assembled to make the 6-dof motion. To achieve a certain performance, it is necessary to define the performance of mechanism that quantifies the characteristics of flexure joints. This paper addresses the analysis and design of the 6-dof parallel manipulator with a flexure joint using a finite element analysis tool. To obtain experimental result, CCD laser displacement sensor is used for the total displacement and the stiffness for the 6-dof flexure mechanism.
Keywords
6 dof mechanism; flexure joint; precise stage;
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Times Cited By KSCI : 1  (Citation Analysis)
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