• 제목/요약/키워드: Semiconductor materials

검색결과 2,103건 처리시간 0.047초

이중 에피층을 가지는 SOI RESURF LIGBT 소자의 에피층 두께비에 따른 항복전압 특성분석 (Breeakdown Voltage Characteristics of the SOI RESURF LIGBT with Dual-epi Layer as a function of Epi-layer Thickness)

  • 김형우;김상철;서길수;방욱;김남균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.110-111
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    • 2006

  • 이중 에피층을 가지는 SOI (Silicon-On-Insulator) RESURF(REduced SURface Field) LIGBT(Lateral Insulated Gate Bipolar Transistor) 소자의 에피층 두께에 따른 항복전압 특성을 분석하였다. 이중 에 피층 구조를 가지는 SOI RESURF LIGBT 소자는 전하보상효과를 얻기 위해 기존 LIGBT 소자의 n 에피로 된 영역을 n/p 에피층의 이중 구조로 변경한 소자로 n/p 에피층 영역내의 전하간 상호작용에 의해 에피 영역 전체가 공핍됨으로써 높은 에피 영역농도에서도 높은 항복전압을 얻을 수 있는 소자이다. 본 논문에서는 LIGBT 에피층의 전체 두께와 농도를 고정한 상태에서 n/p 에피층의 두께가 변하는 경우에 항복전압 특성의 변화에 대해 simulation을 통해 분석하였다.

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Self-Aligned Contact(SAC) 형성 공정에서 플라즈마 기상화학 및 증착된 Polymer의 물리화학적특성과 식각 선택비와의 상관관계에 대한 연구 (A Study on the Correlation between Etching Selectivity and Characteristics of Deposited Polymers in Self-Aligned Contact(SAC) Etching Process)

  • S. S. Jeong;K. K. Chi;C. O. Jung;J. T. Moon;Lee, M. Y.
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 1997년도 한국재료학회 춘계학술발표회
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    • pp.27-27
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    • 1997

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Inorganic Materials and Process for Bioresorbable Electronics

  • Seo, Min-Ho;Jo, Seongbin;Koo, Jahyun
    • Journal of Semiconductor Engineering
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    • 제1권1호
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    • pp.46-56
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    • 2020

  • This article highlights new opportunities of inorganic semiconductor materials for bio-implantable electronics, as a subset of 'transient' technology defined by an ability to physically dissolve, chemically degrade, or disintegrate in a controlled manner. Concepts of foundational materials for this area of technology with historical background start with the dissolution chemistry and reaction kinetics associated with hydrolysis of nanoscale silicon surface as a function of temperature and pH level. The following section covers biocompatibility of silicon, including related other semiconductor materials. Recent transient demonstrations of components and device levels for bioresorbable implantation enable the future direction of the transient electronics, as temporary implanters and other medical devices that provide important diagnosis and precisely personalized therapies. A final section outlines recent bioresorbable applications for sensing various biophysical parameters, monitoring electrophysiological activities, and delivering therapeutic signals in a programmed manner.

  • https://doi.org/10.22895/jse.2020.0008 인용 PDF KSCI

이종 집적 유연 반도체 시스템 구현을 위한 무기물 박막소재의 전사 방법 (Transfer Methods of Inorganic Thin Film Materials for Heterogeneously- Integration Flexible Semiconductor System)

  • 주경현;김정현;박상윤;김강현;이한얼
    • 한국전기전자재료학회논문지
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    • 제37권3호
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    • pp.241-252
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    • 2024

  • With the recent development of emerging technologies, information acquisition and delivery between users has been actively conducted, and inorganic thin film transfer technology that effectively transfers various materials and devices is being studied to develop flexible electronic devices accordingly. This is aimed at innovative structural changes and functional improvement of electronic devices in the era of the Internet of Things (IoT). In particular, advanced technologies such as microLEDs are used to realize high-resolution flexible displays, and the possibility of heterogeneous integrated technologies can be presented by precisely transferring materials to substrates through various transfer process. This paper introduced physical, chemical, and self-assembly transfer methods based on inorganic thin film materials to implement heterogeneous integrated flexible semiconductor systems and introduces the results of application studies of semiconductor devices obtained through different transfer technologies. These studies are expected to bring about innovative changes in the field of smart devices, medical technology, and user interfaces in the future.

  • https://doi.org/10.4313/JKEM.2024.37.3.2 인용 PDF