Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1997.05a
- /
- Pages.27-27
- /
- 1997
A Study on the Correlation between Etching Selectivity and Characteristics of Deposited Polymers in Self-Aligned Contact(SAC) Etching Process
Self-Aligned Contact(SAC) 형성 공정에서 플라즈마 기상화학 및 증착된 Polymer의 물리화학적특성과 식각 선택비와의 상관관계에 대한 연구
- S. S. Jeong (Semiconductor R&D Samsung Electronics Co. Ltd.) ;
- K. K. Chi (Semiconductor R&D Samsung Electronics Co. Ltd.) ;
- C. O. Jung (Semiconductor R&D Samsung Electronics Co. Ltd.) ;
- J. T. Moon (Semiconductor R&D Samsung Electronics Co. Ltd.) ;
- Lee, M. Y. (Semiconductor R&D Samsung Electronics Co. Ltd.)
- Published : 1997.05.01
Abstract
Keywords