• Journal of the Korean Ceramic Society
• /
• v.34 no.8
• /
• pp.825-833
• /
• 1997

Silicon carbide films were deposited by low pressure chemical vapor deposition(LPCVD) using MTS(CH3SICl3) in hydrogen atmosphere on (100) Si substrate. To prevent the unstable interface from being formed on the substrate, the experiments were performed through three deposition processes which were the deposition on 1) as received Si, 2) low temperature grown SiC, and 3) carbonized Si by C2H2. The microstructure of the interface between Si substrates and SiC films was observed by SEM and the adhesion between Si substrates and SiC films was measured through scratch test. The SiC films deposited on the low temperature grown SiC thin films, showed the stable interfacial structures. The interface of the SiC films deposited on carbonized Si, however, was more stable and showed better adhesion than the others. In the case of the low temperature growth process, the optimum condition was 120$0^{\circ}C$ on carbonized Si by 3% C2H2, at 105$0^{\circ}C$, 5 torr, 10 min, showed the most stable interface. As a result of XRD analysis, it was observed that the preferred orientation of (200) plane was increased with Si carbonization. On the basis of the experimental results, the models of defect formation in the process of each deposition were compared.

• Journal of the Korean Society for Heat Treatment
• /
• v.20 no.2
• /
• pp.78-83
• /
• 2007

CrN coatings were deposited by cathodic arc ion plating method on the SKD11 steel substrates. Atmosphere temperature of $350^{\circ}C$, arc current of 90 A, nitrogen partial pressure of 1.0-5.3 Pa, and negative bias voltage of 30-135 V were selected. The characteristics of microstructure were investigated with XRD. Hardness, adhesion and friction coefficient measured by microhardness tester, scratch tester, and ball on disk tribometer. Microstructures depended on nitrogen partial pressure and bias voltage. The preferred orientation of the films was changed from (200) to (111) with decreasing pressure and increasing bias voltage. Adhesion properties related with microstructure, but microstructure changes slightly influenced on hardness and friction properties. The critical load.($Lc_1$) and hardness of CrN films deposited at 5.3 Pa, -30 V condition were 55 N(HF1), $2157{\pm}47\;Hk_{0.025}$. The friction coefficient were about 0.5 under dry condition.

• Journal of the Korean institute of surface engineering
• /
• v.36 no.5
• /
• pp.357-363
• /
• 2003

The aim of this work is the synthesis of a-C:H films from methane gas using surface spark discharge at the atmospheric pressure. Properties of these films have been investigated as functions of energy W delivered per a methane molecule in the discharge. The method enables the coatings to be deposited with high growth rates (up to $100 \mu\textrm{m}$/hour) onto large-area substrates. It is shown that the films consist of spherical granules with diameter of 20∼50 nm formed in the spark channel and then deposited onto the substrate. The best film characteristics such as minimum hydrogen-to-carbon atoms ratio H/C=0.69, maximum hardness $H_{v}$ =3 ㎬, the most dense packing of the granules and highest scratch resistance has been obtained under the condition of highest energy W of 40 eV. The deposited a-C:H coatings were found to be more soft and hydrogenated compared to the diamond-like hydrogenated (a-C:H) films which obtained by traditional plasmaenhanced chemical vapor deposition methods at low pressure (＜10 Torr). Nevertheless, these coatings can be potentially used for scratch protection of soft plastic materials since they are of an order harder than plastics but still transparent (the absorption coefficient is about $10^4$∼$10^{5}$ $m^{-1}$ At the same time the proposed method for fast deposition of a-C:H films makes this process less expensive compared to the conventional techniques. This advantage can widen the application field of. these films substantially.y.

• Restorative Dentistry and Endodontics
• /
• v.16 no.1
• /
• pp.216-225
• /
• 1991

The purpose of this study was to evaluate the desensitizing effect of potassium oxalate(Group I), sodium fluoride (Group II), and control group (Group III). The 120 teeth of 26 patients who had been complained dentinal hypersensitivity were divided into three groups by applicating agent. The observation was done before and immediately after treatment. The data were statistically analyzed and the results were as followed. 1. Potassium oxalate showed the best desensitizing effect to the stimuli, followed by sodium fluoride, control group, and there was a significant difference (p<0.05) in desensitizing effect among the groups. 2. Potassium oxalate showed the best desensitizing effect to the stimuli, followed by sodium fluride, control group on both cervical abrasion and gingival recession, and there was a significant difference (p<0.05) in desensitizing effect among the groups on both cervical abrasion and gingival recession. 3. There was no significant difference (p<0.05) in effect of the desensitization between cervical abrasion and gingival recession. 4. The scratch and air blast I were more effective in desensitiziation than other stimuli with significant difference (p<0.05). In view of the results mentioned above, it can be conceived that potassium oxalate is more effective than sodium fluoride on the reduction of dentinal hypersensitivity.

• Journal of the Korean institute of surface engineering
• /
• v.34 no.5
• /
• pp.435-444
• /
• 2001

WC-( $Ti_{1-x}$ A $l_{x}$) N coatings of constant changing Al concentration were deposited on S45C substrates by high-ionization sputtered PVD method. The Al concentration could be controlled by using evaporation source for Al and fixing the evaporation rate of the metals (i.e, WC- $Ti_{0.86}$A $l_{0.14}$N, WC- $Ti_{0.72}$A $l_{0.28}$N, and WC- $Ti_{0.58}$A $l_{0.42}$N). The corrosion behavior of WC-( $Ti_{1-x}$ A $l_{x}$)N coatings in a deaerated 3.5% NaCl solution was investigated by electrochemical corrosion tests and surface analyses. The measured galvanic corrosion currents between coating and substrate indicated that WC- $Ti_{0.72}$A $l_{0.28}$N coating showed the best resistance of the coating tested. The results of potentiodynamic polarization tests showed that the WC- $Ti_{0.72}$A $l_{0.28}$N coating deposited with 32W/c $m^2$ of Al target revealed higher corrosion resistance. This indicated that the WC- $Ti_{0.72}$A $l_{0.28}$N coating is effective in improving corrosion resistance. In EIS, the WC- $Ti_{0.72}$A $l_{0.28}$N coating showed one time constant loop and increased a polarization resistance of coating ( $R_{coat}$) relative to other samples. Compositional variations of WC-( $Ti_{1-x}$ A $l_{x}$)N coatings were analyzed by EDS and XRD analysis was performed to evaluate the crystal structure and compounds formation behavior. Surface morphologies of the films were observed using SEM and AFM. Scratch test was performed to measure film adhesion strength.strength. adhesion strength.strength.

• The Journal of Korean Physical Therapy
• /
• v.26 no.2
• /
• pp.48-55
• /
• 2014

Purpose: The purpose of this study was to examine correlations among UPDRS, respiratory function, and senior fitness and to investigate the effects of restrictive respiratory function on these factors in Parkinson's disease patients. Methods: Subjects (n=25, Hoehn & Yahr (H&Y) stage: 2-3, $69.3{\pm}5.9$ yrs) from D Hospital Parkinson's Disease Center at Busan metropolitan area in the Republic of Korea volunteered for this study. They performed the pulmonary function test, UPDRS, and the senior fitness test. SPSS 18.0 was used for analysis of data, and the collected data were analyzed using Pearson's correlation coefficient (n=25). In addition, Independent t-test was used for determination of differences between two groups (between the normal pulmonary function group (n=10) and the restrictive pulmonary function group (n=10)). Results: Forced vital capacity (FVC (L)) showed significant negative correlation (r=-0.44, p<0.05) with H&Y stage in Parkinson's disease patients, and chair stand showed significant negative correlations (r=0.41, 0.43, 0.42, p<0.05) with FVC (L), FVC (%), and FEV1 (L). FVC (%) showed significant positive correlations (r=0.44, r=0.44, p<0.05) with right and left back scratch. In addition, the restrictive respiratory function group showed significantly lower FVC (%) (p<0.01) and was significantly slower (p<0.05) in the 8-foot up-and-go test than the normal respiratory function group. Conclusion: In conclusion, these results suggest that restrictive respiratory function in PD was related to H&Y stage. In addition, agility of PD patients was lower in the restrictive respiratory function group than in the normal function group.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.132-132
• /
• 1999

카본 박막은 내마모성, 내산성, 윤활성 및 높은 경도를 가지고 있어, 경질 박막 및 기능성 박막으로 주목을 받고 있으며 그 응용 분야가 매우 크다. 본 연구는 전자빔(Electron Beam)을 카본 grain을 증발시킴과 동시에 아르곤 보조 이온빔을 조사시켜 이온에너지에 따른 박막의 물성변화를 관찰하였다. 특히 본 연구에서 이용한 이온빔 증착 장치의 장점은 이온 충돌 에너지의 조절이 가능하다는 것이다. 카본 박막의 제조는 이온빔이 증착된 고진공 증착 장치를 이용하였고 이원빔원으로는 Oxford Applied Research 사의 RF 방전형 이온빔을 이용하였다. 배기장치는 유회전펌프와 터보펌프를 사용하였다. 기판은 홀더에 장착하기 전에 전처리를 거친 후 용기 내에서 이온빔에 의해 2차 청정을 하였다. 빔전압이 500V, 빔 전류는 4mA/cm2 및 RF power를 400W로 하여 기판 청정을 거친 후 전자빔을 이용하여 흑연을 증발시켜 박막을 제조하였다. 이때 이온빔 전압을 100~500V, RF power를 400~550W 으로 조절하였다. 카본 grain을 Si 및 Slide Glass 기판위에 1$\AA$/sec의 증착율을 유지하면서 증착하였다. 카본 박막의 박막은 평균두께는 0.3~0.4$\mu\textrm{m}$이며 SEM을 이용하여 단면을 관찰하였다. 라만 분광분석을 통하여 비정질 카본 박막의 결합특성을 조사하였고 scratch tester를 이용하여 박막의 밀착력을 관찰하였다. 그리고 카본 박막의 전도도 특성을 알고자 비저항을 측정하였으며, 박막의 성분 분석을 위한 AES 분석을 하였다. 1)AES 결과:표면에서와 박막 내부에서는 불순물인 산소나 질소의 함량이 거의 존재하지 않음을 관찰하였다. 2)경도:1,000~1,400kg/mm2 3)라만 분광 분석:300V의 이온 에너지를 분기로 박막 구조의 변화에 의한 스팩트럼의 변화를 보였다. 4)비저항:10-2~10-1$\Omega$.cm

• Journal of the Korean institute of surface engineering
• /
• v.43 no.4
• /
• pp.180-186
• /
• 2010

$TiO_2$ nanotubes were formed on Ti by anodizing in 1 M $H_3PO_4$ + 0.3 M HF and 0.1 M $NH_4F$ + 2% $H_2O$ in ethylene glycol, and their surface and cross-sectional morphologies were observed using FE-SEM as a function of anodizing time and applied voltage. The cross-section of the $TiO_2$ nanotubes was readily observed from the small pieces of nanotubes remaining near the scratch lines after scratching of the anodized surface. $TiO_2$ nanotubes was observed to grow faster and thicker in non-aqueous solution than in aqueous solution. Diameter of $TiO_2$ nanotubes was proportional to the applied voltage, irrespective of the type of the electrolyte, and it is recommended to use non-aqueous solutions for the preparation of larger diameter of $TiO_2$ nanotubes.

• Journal of the Semiconductor & Display Technology
• /
• v.3 no.4
• /
• pp.45-49
• /
• 2004

We examined large particles and filter size effects of Central Chemical Supplying (CCS) system for STI-CMP on Light Point Defects (LPDs) after polishing. As manufacturing process recently gets thinner below 0.1 um line width, it is very important to keep down post-CMP micro-scratch and LPDs in case of STI-CMP. Therefore, we must control the size distribution of large particles in a slurry. With optimization of final filter size, CCS system is one of the solutions for this issue. The oxide and nitride CMP tests were accomplished using nano-ceria slurries made by ourselves. The number of large particles in a slurry and the number of LPDs on the wafer surface after CMP were reduced with decrease of the final filter size. Oxide removal rates slightly changed according to the final filter size, showing the good performance of self-made nano ceria slurries.

• Proceedings of the Korean Society of Computer Information Conference
• /
• 2020.07a
• /
• pp.243-244
• /
• 2020

본 논문에서는 기존 AI 기능을 탑재한 교육용 프로그래밍 언어 기반의 서비스들의 문제점을 개선할 수 있는 머신러닝 학습을 위한 교육용 프로그래밍 언어 기반 실습 플랫폼을 제안한다. 이번 연구에서는 기존 교육용 프로그래밍 언어 기반 서비스의 대표주자인 Scratch 3.0과 Tensorflow를 접목하여 AI에 대한 높은 이해도를 가질 수 있도록 하는 학습 방향을 제시하고 Gray-Box 형태의 학습 모델 서비스를 구현한다.