• 제목/요약/키워드: Scattering process

검색결과 434건 처리시간 0.025초

20 nm급 T-형 게이트 제작을 위한 2단 전자 빔 노광 공정 (Two-step electron beam lithography to fabricate 20 nm T-gate)

  • 이강승;김영수;이경택;홍윤기;정윤하
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2006년도 하계종합학술대회
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    • pp.555-556
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    • 2006
  • In this paper, we have proposed a novel process using two-step electron beam lithography to fabricate 20 nm T-gates for high performance MODFETs. Two-step lithography reduces electron forward scattering by defining the foot on a thin (100 nm) bottom-layer of polymethyl methacrylate (PMMA) at the second step, the T-gate head having been developed at the first step. Adopting a low temperature development technique for the second step reduces the detrimental effect of head exposure on foot definition. We have shown that 20 nm T-gate can be patterned with this process.

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PELE의 경사진 충격에 따른 파괴 메커니즘에 대한 연구 (A Study of Failure Mechanism for Inclined Impact of PELE)

  • 조종현;이영신
    • 한국군사과학기술학회지
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    • 제15권5호
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    • pp.712-719
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    • 2012
  • Penetrator with enhanced lateral effect(PELE) is a newconcept projectile, without dynamite and fuze. It consists of high-density jacket, closed at its rear end and filled with a low-density filling material. To study the explosion characteristics of PELE, by AUTODYN-3D code, the calculation models of projectile body and bullet target are established and the process of penetrating aluminum-2024 alloy target of PELE is simulated, and the scattering characteristics after penetrating aluminum-2024 alloy target of PELE are studied by different initial velocity. The explicit finite element analysis of PELE fragmentation was implemented with stochastic failure criterion in AUTODYN-3D code. As expansion of filling, the fragments were obtained velocities and dispersed laterally and further more enhancing the damage area largely. The number and shape of the PELE fragments were different depend on impact velocity and incidence angle of filling which fragment generated during penetration and lateral dispersion process.

졸-겔법을 이용한 실리카 핵을 가지는 하이브리드 안료의 제조와 잉크젯 분산 잉크로서 응용 (Preparation of Silica Core-Hybrid Pigment via Sol-Gel Process and It's Application for Inkjet Dispersion Ink)

  • 전영민;김종규;공명선
    • 한국재료학회지
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    • 제16권10호
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    • pp.599-605
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    • 2006
  • N-(3-triethoxysilylpropyl)-1,4-diaminoanthrquinone-2,3-dicarboximide (TESP-DADI), an organic blue pigment, has been prepared and incorporated into silica solid matrix reacting triethyl orthosilicate (TEOS) via sol-gel method. Morphology and microstructure of resulting hybrid pigment were studied employing SEM and TEM. The micrographs and particle size distributions showed that uniform pigment can be obtained employing TEOS-based sol-gel method forming silica core. Particle size distribution of dispersed pigment in water was examined using the technique of dynamic light scattering. The ensuing pigment dispersion ink was subjected to various physicochemical evaluation such as viscosity, surface tension, inkjet stability, storage stability, and color change as inkjet ink using spectrophotometric, and microscopic techniques.

CIGS 태양전지의 윈도우 층에 적용 가능한 스퍼터링으로 증착한 AZO 박막의 공정압력의 영향에 따른 특성 연구 (A Study on the Effect of Process Pressure on AZO Thin Films Sputtered for the Windows Layers of CIGS Solar Cells)

  • 윤여탁;조의식;권상직
    • 반도체디스플레이기술학회지
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    • 제16권2호
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    • pp.89-93
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    • 2017
  • For various process pressures, aluminum doped zinc oxide(AZO) films were deposited by in-line pulsed-DC sputtering. The deposited AZO films were optically and electrically investigated and analyzed for the window layers of CIGS solar cell systems. As the pressure was increased from 9 mtorr to 15 mtorr, the thickness of AZO was decreased as a result of scattering and its sheet resistance was rapidly increased. The transmittance of AZO was slightly decreased as the pressure was increased and the calculation of figure of merit(F.O.M) was dependent on the sheet resistance. The structural characteristics of AZO thin films analyzed by X-ray diffraction(XRD) showed no significant dependency according to the pressure.

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MoO3 침출공정 폐액으로부터 동분말의 회수기술 (Recovery of Copper Powder from MoO3 Leaching Solution)

  • 홍현선;정항철;김건홍;공만식
    • 한국분말재료학회지
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    • 제16권5호
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    • pp.351-357
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    • 2009
  • A two-step recovery method was developed to produce copper powders from copper chloride waste solution as byproducts of MoO$_3$ leaching process. The first step consisted of replacing noble copper ions with external Fe$^{3+}$ ions which were formed by dissolving iron scraps in the copper chloride waste solution. The replaced copper ions were subsequently precipitated as copper powders. The second step was cementation of entire solution mixture to separate (pure) copper powders from aqueous solution of iron chloride. Cementation process variables of temperature, time, and added amount of iron scraps were optimized by using design of experiment method and individual effects on yield and efficiency of copper powder recovery were investigated. Copper powders thus obtained from cementation process were further characterized using various analytical tools such as XRD, SEM-EDS and laser diffraction and scattering methods.Cementation process necessitated further purification of recovered copper powders and centrifugal separation method was employed, which successfully yielded copper powders of more than 99% purity and average 1$\sim$2$\mu$m in size.

전자 포텐셜 변형과 포논 상호작용에 의한 준 이차원 Si 구조의 전도 현상 해석 (Quantum Transition Properties of Quasi-Two Dimensional Si System in Electron Deformation Potential Phonon Interacting)

  • 이수호;김영문;김해재;주석민
    • 전기학회논문지P
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    • 제66권3호
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    • pp.129-134
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    • 2017
  • We investigated theoretically the quantum optical transition properties of Si, in quasi 2-Dimensinal Landau splitting system, based on quantum transport theory. We apply the quantum transport theory (QTR) to the system in the confinement of electrons by square well confinement potential under linearly polarized oscillating field. We use the projected Liouville equation method with Equilibrium Average Projection Scheme (EAPS). In order to analyze the quantum transition, we compare the temperature and the magnetic field dependencies of the QTLW and the QTLS on four transition processes, namely, the intra-leval transition process, the inter-leval transition process, the phonon emission transition process and the phonon absorption transition process.

Effects of Residual PMMA on Graphene Field-Effect Transistor

  • Jung, J.H.;Kim, D.J.;Sohn, I.Y.;Lee, N.E.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.561-561
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    • 2012
  • Graphene, two dimensional single layer of carbon atoms, has tremendous attention due to its superior property such as fast electron mobility, high thermal conductivity and optical transparency, and also found many applications such as field-effect transistors (FET), energy storage and conversion, optoelectronic device, electromechanical resonators and chemical sensors. Several techniques have been developed to form the graphene. Especially chemical vapor deposition (CVD) is a promising process for the large area graphene. For the electrically isolated devices, the graphene should be transfer to insulated substrate from Cu or Ni. However, transferred graphene has serious drawback due to remaining polymeric residue during transfer process which induces the poor device characteristics by impurity scattering and it interrupts the surface functionalization for the sensor application. In this study, we demonstrate the characteristics of solution-gated FET depending on the removal of polymeric residues. The solution-gated FET is operated by the modulation of the channel conductance by applying a gate potential from a reference electrode via the electrolyte, and it can be used as a chemical sensor. The removal process was achieved by several solvents during the transfer of CVD graphene from a copper foil to a substrate and additional annealing process with H2/Ar environments was carried out. We compare the properties of graphene by Raman spectroscopy, atomic force microscopy(AFM), and X-ray Photoelectron Spectroscopy (XPS) measurements. Effects of residual polymeric materials on the device performance of graphene FET will be discussed in detail.

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강소성 가공된 Ni-30Cr 합금의 결정립 미세화와 기계적 물성 향상 (Grain Refinement and Mechanical Properties Improvement in a Severely Plastic Deformed Ni-30Cr Alloy)

  • 송국현;김한솔;김원용
    • 대한금속재료학회지
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    • 제49권8호
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    • pp.649-656
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    • 2011
  • The present study evaluated the microstructures and mechanical properties of severely deformed Ni-30Cr alloys. Cross-roll rolling (CRR) process was introduced as a severe plastic deformation (SPD), and Ni-30Cr alloy sheets were cold rolled to 90% thickness reduction and subsequently annealed at $700^{\circ}C$ for 30 min to obtain the recrystallized microstructure. Electron back-scattering diffraction (EBSD) was introduced to analyze grain boundary character distributions (GBCDs). The application of CRR to the Ni-30Cr alloy was effective in enhancing the grain refinement through heat treatment; consequently, the average grain size was significantly refined from $33{\mu}m$ in the initial material to $0.6{\mu}m$. This grain refinement directly improved the mechanical properties, in which yield and tensile strengths significantly increased relative to those of the initial material. We systematically discuss the grain refinement and accompanying improvement of the mechanical properties, in terms of the effective strain imposed by CRR relative to conventional rolling (CR).

이종 알루미늄의 ARB공정에 의한 초미세립 복합알루미늄합금판재의 제조 및 평가 (Fabrication and Estimation of an Ultrafine Grained Complex Aluminum Alloy Sheet by the ARB Process Using Dissimilar Aluminum Alloys)

  • 이성희;강창석
    • 대한금속재료학회지
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    • 제49권11호
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    • pp.893-899
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    • 2011
  • Fabrication of a complex aluminum alloy by the ARB process using dissimilar aluminum alloys has been carried out. Two-layer stack ARB was performed for up to six cycles at ambient temperature without a lubricant according to the conventional procedure. Dissimilar aluminum sheets of AA1050 and AA5052 with thickness of 1 mm were degreased and wire-brushed for the ARB process. The sheets were then stacked together and rolled to 50% reduction such that the thickness became 1 mm again. The sheet was then cut into two pieces of identical length and the same procedure was repeated for up to six cycles. A sound complex aluminum alloy sheet was successfully fabricated by the ARB process. The tensile strength increased as the number of ARB cycles was increased, reaching 298 MPa after 5 cycles, which is about 2.2 times that of the initial material. The average grain size was $24{\mu}m$ after 1 cycle, and became $1.8{\mu}m$ after 6 cycles.

펄프섬유(纖維)의 제지특성(製紙特性)에 미치는 회수처리(回收處理)의 영향(影響) (Effect of Recycling on the Papermaking Properties of Wood Pulp Fibers)

  • 김형진;조병묵
    • Journal of the Korean Wood Science and Technology
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    • 제21권1호
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    • pp.21-38
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    • 1993
  • In order to investigate the influence of recycling, a laboratory method simulating the papermaking process was used for assessing the effects of recycling on fiber properties. Sw-BKP, Hw-BKP and BGP were disintegrated and beaten to about 42$^{\circ}$SR-44$^{\circ}$SR by a valley beater. After beating, these pulps were dewatered by centrifuge and dried at 90$^{\circ}C$ for 72hrs. This recycling process(sequence of wetting, defiberating, dewatering and drying) was repeated seven times. Physical, mechanical and optical properties of recycled pulps were evaluated by TAPPI Standards. Morphological changes occurred through recycling process was observed by SEM. Sheet density decreased with recycling. The largest drop in density occurred during the first recycling. The porosity values decreased with recycling. Mechanical properties such as tensile, burst strength and folding endurance, decreased with recycling. However tear strength of Sw-BKP and mixtured pulp increased at the first recycling. Optical properties such as brightness, opacity and light scattering coefficient, increased with recycling. However, brightness of mixtured pulp gradually decreased with recycling. Fibrillated outer layer of the fiber was gradually removed from the surface with recycling. As a result of recycling, crinkles on the fiber surface were found to be more folded.

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