• 전자공학회논문지A
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• 제29A권2호
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• pp.68-76
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• 1992

Concurrent Junction process (simultaneous formation of a silicide and a junction on the implanted substrate) by Rapid Thermal Annealig has been investigated. Electrical and material properties of CoSi$_2$ films were analyzed with Alpha Step, 4-point probe, X-ray diffraction(XRD) and Scanning Electron Microscope(SEM). And CoSi$_2$ junctions were examined with Spreading Resistance probe in order to see the redistribution of electrically activated dopants and determined the junction depth. Two step annealing process, which was 80$0^{\circ}C$ for 30sec and 100$0^{\circ}C$ for 30sec in NS12T ambient was employed to form CoSi$_2$ and shallow junctions. Resistivity of CoSi$_2$ was turned out to be 11-15${\mu}$cm and shallow junctions less than 0.1$\mu$m were successfully formed by the process. It was found that the dopant concentration at CoSi$_2$/Si interface increased as decreasing the thickness of Co films in case of $p^{+}/n$ and $n^{+}/p$ junctions while the junction depth decreased as increasing CoSiS12T thickness in case of $p^{+}/n$ junction.

• 한국철도학회논문집
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• 제13권4호
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• pp.376-381
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• 2010

본 연구에서는 주요 간선 철도 노선의 고속화 시 열차풍 예측을 위하여 KTX 열차, 누리로 열차 및 TTX 열차를 대상으로 호남선과 경부선에서 Kiel-probe를 이용한 열차풍 측정 프루브 어레이와 다채널 압력측정 시스템을 이용하여 열차풍 현장 측정 시험을 수행하였다. 시험 결과, 열차가 통과하는 동안의 열차하부 평균유속을 열차의 속도로 나눈 값은 열차 속도에 무관하고 차량의 종류에만 관계하기 때문에, 주어진 열차의 종류와 열차 속도에 대하여 열차 하부의 유속을 예측할 수 있는 것으로 나타났다. 또한 열차 하부 형상과 하부 열차풍특성의 관계에 대해서도 논하였다.

• 한국정밀공학회지
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• 제28권3호
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• pp.323-329
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• 2011

Certified reference materials (CRMs) have been used to calibrate surface profilers for reliable measurements. In this paper, we present a newly designed step height CRM which has a step height pattern with two different widths and various special patterns for checking radial magnification, distortion of optical viewing systems, etc. Especially, it could be useful for multi-probe inspection instruments in the manufacturing lines. The fabrication was done by conventional optical lithography and dry etching process with optimized conditions. To verify the step height values, a white-light scanning interferometer was used with objective lenses having magnification of $10{\times}$ and $100{\times}$. CRMs with nominal step heights of $0.5\;{\mu}m$, $1\;{\mu}m$, $3\;{\mu}m$, $5\;{\mu}m$, $7\;{\mu}m$, and $10\;{\mu}m$ were fabricated and the uniformity of these CRMs was evaluated to be less than 3 nm ($1{\sigma}$).

• 한국콘텐츠학회논문지
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• 제6권2호
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• pp.51-58
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• 2006

안테나 복사 특성을 효과적으로 측정하는 방법 중 하나인 안테나 근역장 측정 알고리즘의 개선을 논한다. 로렌츠 상호작용 원리와 상호작용 표기법을 이용하여 근역장-원역장 변환공식의 핵심인 프로브 교정 알고리즘을 간략히 유도한다. 제안된 일반적인 프로브 교정 방정식과 제작된 시스템을 사각 혼안테나에 대한 평면주사법에 적용하여 근역장 복사 패턴을 얻고 이를 원역장 복사 패턴과 비교하여 복사 특성이 유사한 것을 보인다. 이를 통해 본 논문의 접근법이 매우 간단하면서도 대부분의 안테나 측정에 유용하게 쓰일 수 있는 것을 보인다.

• 한국초전도ㆍ저온공학회논문지
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• 제17권1호
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• pp.17-20
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• 2015

Coated conductor is an important candidate for power cable applications due to its high current density. Even for DC power cable transmission, we must study the transport properties of HTS tapes after slow and fast discharge. In order to evaluate relation of the magnetic field with applied current we developed a scanning magnetic field measurements system by employing a Hall probe. This work presents the measurements of the magnetic fields above a coated conductor by varying applied current pattern. In the work, a transport current of 100 A, less than the critical current, is applied to YBCO coated conductor. We measured the residual magnetic field distributions after cut off the transport current with slow and fast operations. The results show differences of the magnetic field profiles and the corresponding current profiles by an inverse solution from the magnetic field measurement between these two operations because of the hysteresis of coated conductor excited by the transport current.

• 한국결정학회지
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• 제7권1호
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• pp.20-29
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• 1996

(Sr1-xCax)CuO2 단결정을 융제법으로 제조하고 단결정 X-선 회절법을 이용하여 그 결정구조를 밝혔다. 이 화합물의 결정축계는 사방정계(orthorhombic system)이며, 공간군은 Cmcm(63), 그리고 격자상수 a, b, c는 각각 3.4645Å, 16.1417Å, 3.8727Å이었다. (Sr1-xCax)CuO2 화합물에서 Sr대신 치환되는 Ca이온의 한계를 구조적인 관점에서 연구하였다. 이를 위해 X-선 회절(CAD4), energy dispersive X-ray fluorescence (EDAX) and electron probe micro-analysis (EPMA) 등을 사용하였다. Ca가 치환됨에 따른 Cu-O 결합길이의 변화로부터 Ca의 치환한계를 결정하였는데 그 한계치는 Xca≒0.73이었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.77-80
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• 2005

Local probe techniques such as scanning probe microscopy (SPM) or atomic force microscopy (AFM) extended our perception into ultra small world. Specially, the sense of touching was extended by AFM into the micro- and nanoworld and has provided complementary new insights of the microscopic world. In addition, touching objects is an essential step before trying to manipulate things. SPM as a touch sensor not only measure the mechanical properties but also detect different properties such as magnetic, electrical, ionic, thermal, chemical and biophysical properties in nanoscale and even less. Obtaining biophysical measurements, monitoring dynamics and processes together with high-resolution imaging of the biomolecules and cells with rather simpler sample preparation than any other techniques give great attractions to the scientists experimenting with biological samples. Among the many AFM capabilities we will specifically introduce the force plot which is used to measure tip-sample interactions and its application this time.

• 열처리공학회지
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• 제35권1호
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• pp.1-7
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• 2022

In this study, dissolution and melting phenomenon of the Al₂Cu was studied for the high-strength Al-Si-Cu aluminum alloy in automobile component. The Solution heat treatment was performed at 480℃ and 510℃ for 4hours. Microstructure analysis of the specimen was performed using the optical micrograph and scanning electron microscope for qualitative and quantitative analysis of various phases, the chemical composition of secondary phases was achieved by energy dispersive spectroscopy (EDS) and electron probe micro analysis (EPMA). As a result of the electron probe micro analysis, a plate like Al₂Cu phase was observed, and eutectic Si phase was observed of a coarsen plate shape. At a temperature of 510, necking phenomenon occurs in a specific part of plate like Al₂Cu, and it is segmented and dissolved in the Al matrix. When the temperature of the alloy exceeds the melting point of Al₂Cu, incipient melting occurs at the grain boundary of undissolved Cu particles

• 대한기계학회논문집B
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• 제38권12호
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• pp.957-962
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• 2014

본 연구에서는 나노스케일의 공간 해상도를 가지는 주사탐침열파현미경(scanning thermal wave microscopy, STWM)을 이용하여 1 차원 나노구조체의 열전도도를 정량적으로 계측하는 방법을 제시한다. 먼저, 1 차원 나노구조체의 열확산도를 계측하기 위한 STWM 의 원리를 설명한 후, 정량적인 열확산도 계측을 위한 이론적 해석 과정을 설명한다. STWM 을 이용한 본 계측기법은 열파가 이동한 거리에 따른 상대적인 위상지연만을 가지고 열확산도를 계측하여 열전도도를 구하기 때문에 탐침과 나노구조체 사이의 열접촉저항 및 나노구조체와 열원간의 열접촉저항의 영향을 받지 않으며, 나노구조체에 인가되는 정확한 열유속을 구할 필요가 없다. 따라서 기존의 측정 기법들에 비해 계측이 매우 단순하면서도 정량적인 계측이 가능하다.

• Current Optics and Photonics
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• 제5권3호
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• pp.229-237
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• 2021

The capabilities of the near-field scanning optical microscope (NSOM) for obtaining high resolution lateral topographical images as well as for mapping the spectroscopic and optical properties of a sample below the diffraction limit of light have made it an attractive research field for most researchers dealing with optical characteristics of materials in nano scales. The apertured NSOM technique involves confining light into an aperture of sub-wavelength size and using it to illuminate a sample maintained at a distance equal to a fraction of the sub-wavelength aperture (near-field region). In this article, we present a setup for developing NSOM using a cantilever with a sub-wavelength aperture at the tip. A single laser is used for both cantilever deflection measurement and near-field sample excitation. The laser beam is focused at the apex of the cantilever where a portion of the beam is reflected and the other portion goes through the aperture and causes local near-field optical excitation of the sample, which is then raster scanned in the near-field region. The reflected beam is used for an optical beam deflection technique that yields topographical images by controlling the probe-sample in nano-distance. The fluorescence emissions signal is detected in far-field by the help of a silicon avalanche photodiode. The images obtained using this method show a good correlation between the topographical image and the mapping of the fluorescence emissions.