• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.163-163
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• 2008

반도체 소자가 고집적화 되고 고속화를 필요로 하게 됨에 따라, 기존에 사용되었던 알루미늄이나 텅스텐보다 낮은 전기저항, 높은 electro-migration resistance으로 미세한 금속배선 처리가 가능한 Cu가 주목받게 되었다. 하지만 과잉 디싱 현상과 에로젼을 유도하여 메탈라인 브리징과 단락을 초래할 있고 Cu의 단락인 islands를 남김으로서 표면 결함을 제거하는데 효과적이지 못다는 단점을 가지고 있었다. 특히 평탄화 공정시 높은 압력으로 인하여 Cu막의 하부인 ILD막의 다공성의 low-k 물질의 손상을 초래 할 수 있는 문제점을 해결하기 위하여 기존의 CMP에 전기화학을 결합시킴으로서 낮은 하력에서의 Cu 평탄화를 달성 할 수 있는 기존의 CMP 기술에 전기화학을 접목한 새로운 개념의 ECMP (electrochemical-mechanical polishing) 기술이 생겨나게 되었다. 따라서 본 논문에서는 최적화된 ECMP 공정을 위하여 I-V곡선과 CV법을 이용하여 active. passive. trans-passive 영역의 전기화학적 특징을 알아보았고. Cu막의 표면 형상을 알아보기 위해 Scanning Electron Microscopy (SEM) 측정과 Energy Dispersive Spectroscopy (EDS) 분석을 통해 금속 화학적 조성을 조사하였다.

• Bulletin of the Korean Chemical Society
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• v.30 no.8
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• pp.1733-1737
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• 2009

A new cathode material based on Li$Ni_{0.8}Co_{0.15}Al_{0.05}O_2$ (LNCA)/polyaniline (Pani) composite was prepared by in situ self-stabilized dispersion polymerization in the presence of LNCA. The materials were characterized by fourier transform infrared spectroscopy (FT-IR), ultraviolet-visible spectroscopy (UV-Vis), X-ray diffraction (XRD), and scanning electron microscopy (SEM). Electrochemical properties including galvanostatic charge-discharge ability, cyclic voltammetry (CV), capacity, cycling performance, and AC impedance were measured. The synthesized LNCA/Pani had a similar particle size to LNCA and exhibited good electrochemical properties at a high C rate. Pani (the emeraldine salt form) interacts with metal-oxide particles to generate good connectivity. This material shows good reversibility for Li insertion in discharge cycles when used as the electrode of lithium ion batteries. Therefore, the Pani coating is beneficial for stabilizing the structure and reducing the resistance of the LNCA. In particular, the LNCA/Pani material has advantageous electrochemical properties.

• Corrosion Science and Technology
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• v.6 no.1
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• pp.18-23
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• 2007

DLC coatings have been deposited onto substrate of STS 316L and Ti alloy using r.f. PACVD (plasma-assisted chemical vapor deposition) with a mixture of $C_{6}H_{6}$ and $SiH_{4}$ as the process gases. Corrosion performance of DLC coatings was investigated by electrochemical techniques (potentiodynamic polarization test and electrochemical impedance spectroscopy) and surface analysis (scanning electron microscopy). The electrolyte used in this test was a 0.89% NaCl solution of pH 7.4 at temperature $37^{\circ}C$. The porosity and protective efficiency of DLC coatings were obtained using potentiodynamic polarization test. Moreover, the delamination area and volume fraction of water uptake of DLC coatings as a function of immersion time were calculated using electrochemical impedance spectroscopy. This study provides the reliable and quantitative data for assessment of the effect of substrate on corrosion performance of Si-DLC coatings. The results showed that Si-DLC coating on Ti alloy could improve corrosion resistance more than that on STS 316L in the simulated body fluid environment. This could be attributed to the formation of a dense and low-porosity coating, which impedes the penetration of water and ions.

• Journal of Hydrogen and New Energy
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• v.30 no.5
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• pp.418-427
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• 2019

Activated carbon was synthesized from bamboo charcoal by KOH activation at various temperatures for electrochemical double layer capacitor applications. The micro-structural and surface properties of all the samples were characterized by X-ray diffraction, scanning electron microscopy and N2 adsorption/desorption isotherm method. The electrochemical properties of the activated bamboo charcoal were examined by cyclic voltammetry in the potential window of -1.0 to 0.2 V in 6 M KOH electrolyte at different scan rates. An electrode made from the sample activated with 7.5 M KOH and heat treated at $750^{\circ}C$ for 3 h gave a maximum capacitance of 553 F/g at 1 mV/s and 450 F/g at 10mV/s.

• Journal of Electrochemical Science and Technology
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• v.13 no.1
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• pp.90-99
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• 2022

Owing to the rising concern of global warming, lithium-ion batteries have gained immense attention over the past few years for the development of highly efficient electrochemical energy conversion and storage systems. In this study, alpha-phase VOPO₄·2H₂O with nanosheet morphology was prepared via a facile hydrothermal method for application in high-performance lithium-ion batteries. The X-ray diffraction and scanning electron microscopy (SEM) analyses indicated that the obtained sample had an alpha-2 (αII) phase, and the nanosheet morphology of the sample was confirmed using SEM. The lithium-ion battery with VOPO₄·2H₂O as the anode exhibited excellent long-term cycle life and a high capacity of 256.7 mAh g^-1 at room temperature. Prelithiation effectively improved the specific capacity of pristine VOPO₄·2H₂O. The underlying electrochemical mechanisms were investigated by carrying out AC impedance, rate capability, and other instrumental analyses.

• Journal of Electrochemical Science and Technology
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• v.14 no.4
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• pp.303-310
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• 2023

Microbial fuel cells (MFCs) are a bioelectrochemical system where electrochemically active bacteria convert organic waste into electricity. Poly(vinyl alcohol) (PVA) and chitosan (CS) are polymers that have been studied as potential alternative ion exchange membranes to Nafion for many electrochemical systems. This study examined the optimal mixing ratio of PVA and chitosan CS in a PVA:CS composite membrane for MFC applications. PVA:CS composite membranes with 1:1, 2:1, and 3:1 ratios were synthesized and tested. The water uptake and ion exchange capacity, Fourier transform infrared spectra, and scanning electron microscopy images were analyzed to determine the physicochemical properties of PVA:CS membranes. The prepared membranes were applied to the ion exchange membrane of the MFC system, and their effects on the electrochemical performance were evaluated. These results showed that the composite membrane with a 3:1 (PVA:CS) ratio showed comparable performance to the commercialized Nafion membrane and produced more electricity than the other synthesized membranes. The PVA:CS membrane implemented MFCs produced a maximum power density of 0.026 mW cm^-2 from organic waste with stable performance. Therefore, it can be applied to a cost-effective MFC system.

• Journal of Powder Materials
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• v.24 no.4
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• pp.308-314
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• 2017

$Fe_3O_4$/Fe/graphene nanocomposite powder is synthesized by electrical wire explosion of Fe wire and dispersed graphene in deionized water at room temperature. The structural and electrochemical characteristics of the powder are characterized by the field-emission scanning electron microscopy, X-ray diffraction, Raman spectroscopy, field-emission transmission electron microscopy, cyclic voltammetry, and galvanometric discharge-charge method. For comparison, $Fe_3O_4$/Fe nanocomposites are fabricated under the same conditions. The $Fe_3O_4$/Fe nanocomposite particles, around 15-30 nm in size, are highly encapsulated in a graphene matrix. The $Fe_3O_4$/Fe/graphene nanocomposite powder exhibits a high initial charge specific capacity of 878 mA/g and a high capacity retention of 91% (798 mA/g) after 50 cycles. The good electrochemical performance of the $Fe_3O_4$/Fe/graphene nanocomposite powder is clearly established by comparison of the results with those obtained for $Fe_3O_4$/Fe nanocomposite powder and is attributed to alleviation of volume change, good distribution of electrode active materials, and improved electrical conductivity upon the addition of graphene.

• Korean Journal of Materials Research
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• v.24 no.1
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• pp.37-42
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• 2014

Well-distributed ruthenium (Ru) nanoparticles decorated on porous carbon nanofibers (CNFs) were synthesized using an electrospinning method and a reduction method for use in high-performance elctrochemical capacitors. The formation mechanisms including structural, morphological, and chemical bonding properties are demonstrated by means of field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). To investigate the optimum amount of the Ru nanoparticles decorated on the porous CNFs, we controlled three different weight ratios (0 wt%, 20 wt%, and 40 wt%) of the Ru nanoparticles on the porous CNFs. For the case of 20 wt% Ru nanoparticles decorated on the porous CNFs, TEM results indicate that the Ru nanoparticles with ~2-4 nm size are uniformly distributed on the porous CNFs. In addition, 40 wt% Ru nanoparticles decorated on the porous CNFs exhibit agglomerated Ru nanoparticles, which causes low performance of electrodes in electrochemical capacitors. Thus, proper distribution of 20 wt% Ru nanoparticles decorated on the porous CNFs presents superior specific capacitance (~280.5 F/g at 10 mV/s) as compared to the 40 wt% Ru nanoparticles decorated on the porous CNFs and the only porous CNFs. This enhancement can be attributed to the synergistic effects of well-distributed Ru nanoparticles and porous CNF supports having high surface area.

• Journal of Surface Science and Engineering
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• v.41 no.5
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• pp.226-231
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• 2008

Titanium and its alloy have been widely used in dental implant and orthopedic prostheses. Electrochemical characteristics of dental implant in the various simulated body fluids have been researched by using electrochemical methods. Ti-6Al-4V alloy implant was used for corrosion test in 0.9% NaCl, artificial saliva and simulated body fluids. The surface morphology was observed using scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX). The electrochemical stability was investigated using potentiosat (EG&G Co, 263A). The corrosion surface was observed using scanning electron microscopy (SEM). From the results of potentiodynamic test in various solution, the current density of implant tested in SBF and AS solution was lower than that of implant tested in 0.9% NaCl solution. From the results of passive film stability test, the variation of current density at constant 250 mV showed the consistent with time in the case of implant tested in SBF and AS solution, whereas, the current density at constant 250mV in the case of implant tested in 0.9% NaCl solution showed higher compared to SBF and AS solution as time increased. From the results of cyclic potentiodynamic test, the pitting potential and |$E_{pit}\;-\;E_{corr}$| of implant tested in SBF and AS solution were higher than those of implant tested in 0.9% NaCl solution.

• Journal of the Korean Electrochemical Society
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• v.23 no.3
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• pp.66-72
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• 2020

In this study, the development of biosensors capable of bi-enzyme reactions by including Horseradish peroxidase and glucose oxidase was carried out for detection of glucose. The sensors were manufactured using electro deposition method to reduce production time, and screen printed electrodes (SPE) were used to produce economical sensors. To check the bienzyme effect, the sensor was compared and analyzed with single enzyme biosensor. The characteristics of the sensor were evaluated using scanning electron microscopy(SEM), cyclic voltammetry(CV), electrochemical impedance spectroscopy(EIS), chronoamperometry(CA), and flow injection analysis(FIA). Analysis results from SEM, CV and EIS confirmed that the enzymes are well fixed to the electrode surface. In addition, it was confirmed that bi-enzyme biosensors manufactured from the CA method improved signal performance by 200% compared to single enzyme biosensors. From this results, we were able to explain that HRP and GOD react catalyzed to each other. And the results of FIA showed that the intensity of each current signal was constant when the same concentration of glucose was injected four times. In addition, by analyzing the intensity of current signals for glucose concentrations, the biosensors manufactured in this study showed excellent trends in signal sensitivity, reproducibility and stability.