• Membrane Journal
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• v.26 no.2
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• pp.159-165
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• 2016

Polyimide hollow fiber membrane modules were prepared in order to investigate the process of multi stage gas separation. The modules performance was carried out using 50/50 of $N_2/SF_6$ mixed gas. The membrane modules has been tested for measuring gas flow rate and concentration under various stage cut at 0.5 MPa. The membrane modules showed a high recovery ratio at the same stage cut as $N_2/SF_6$ selectivity increased. Two stage process was fulfilled for improving $SF_6$ recovery ratio and $SF_6$ concentration. Eventually, two stage process showed higher performance of $SF_6$ recovery ratio and concentration ($SF_6$ recovery ratio = 95%, $SF_6$ conc. = 98%).

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.373-375
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• 2011

최근 태양전지 연구에서 저가격화를 실현하는 방법 중 하나로 폐 실리콘 웨이퍼를 재생하는 방법에 관하여 많은 연구가 진행되고 있다. 그러나 기존 웨이퍼 재생공정은 높은 재처리 비용과 복잡한 공정등의 많은 단점을 가지고 있다. 결정형 태양전지에서 저가격화 및 고효율은 태양전지를 제작하는데 있어 필수 요소 이다. 그 중 결정질 태양전지 고효율을 위한 여러 연구 방법 중 표면 텍스쳐링(texturing)에 관한 연구가 활발하다. 텍스쳐링은 표면반사에 의한 광 손실을 최소화 하여 효율을 증가시키기 위한 방법으로 습식 식각과 건식 식각을 사용하여 태양전지 표면 위에 요철 및 피라미드구조를 형성하여 반사율을 최소화 시킨다. 건식식각은 습식식각과 다른 환경적 오염이 적은 것과 소량의 가스만으로 표면 텍스쳐링이 가능하여 많은 연구가 진행중이다. 건식 식각 중 하나인 RIE(reactive ion etching)는 고주파를 이용하여 플라즈마의 이온과 silicon을 반응 시킨다. 실험은 RIE를 이용하여 SF6/02가스를 혼합하여 비등방성 에칭 및 피라미드 구조를 구현하였다. RIE 공정 중 SF6/02가스는 높은 식각 율을 갖으며 self-masking mechanism을 통해 표면이 검게 변화되고 반사율이 감소하게 된다. 이 과정을 통해 블랙 실리콘을 형성하게 된다. 블랙 실리콘은 반사율 10% 이하로 self-masking mechanism으로 바늘모양의 구조를 형성되는 게 특징이며 표면이 검은색으로 반사율이 낮아 효율증가로 예상되지만 실제 바늘 모양의 블랙 실리콘은 태양전지 제작에 있어 후속 공정 인 전극 형성 시 Ag Paste의 사이즈와 표면 구조를 감안할 때 태양 전지 제작 시 Series resistance를 증가로 효율 저하를 가져온다. 본 연구는 SF6/02가스를 혼합하여 기존 RIE로 형성된 바늘모양의 구조의 블랙 실리콘이 아닌 RIE 내부에 metal-mesh를 장착하여 단결정(100)실리콘 웨이퍼 표면을 텍스쳐링 하였고 SF6/02 가스 1:1 비율로 공정을 진행 하였다. metal-mesh 홀의 크기는 100um로 RIE 내부에 장착하여 공정 시간 및 Pressure를 변경하여 실험을 진행하였다. 공정 시간이 변경됨에 따라 단결정(100) 실리콘 웨이퍼 표면에 피라미드 구조의 균일한 1um 크기의 블랙 실리콘을 구현하였다. 바늘모양의 블랙 실리콘을 피라미드 구조로 구현함으로써 바늘 모양의 단점을 보완하여 태양전지 전기적 특성을 분석하여 태양전지 제작시 변환 효율을 증가시킬 것으로 예상된다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.2
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• pp.85-92
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• 2010

$SF_6$ gas has been widely used in many industrial fields as insulating, cleaning and covering gases due to its outstanding arc-extinguishing and insulating properties. However, global warming potential of $SF_6$ gas is 23,900 times more than that of $CO_2$ and it remains in the air during 3,200 years. For these reason, technological and economical effects could be expected for the separation of $SF_6$ from gas mixtures by hydrate forming process. In this study, we carried out morphological studies for the $SF_6$ hydrate crystal to understand its formation and growth mechanisms. $SF_6$ hydrate film was initially formed at the interfacial boundary between gas and liquid regions, and then subsequent dendrite crystals growth was observed. The dendrite crystals grew to the direction of gas region probably due to the guest gas concentration gradient. The detailed growth characteristics of $SF_6$ hydrate crystals such as nucleation, migration, growth and interference were discussed in this study.

• Membrane Journal
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• v.20 no.3
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• pp.249-258
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• 2010

In this study, we tried to observe the permeation on the single $O_2$, $CF_4$ and $SF_6$ gas using a PSF (polysulfone), PC (tetra-bromo polycarbonate) and PI (polyimide) hollow fiber membranes. We also observed the permselectivity on the $O_2/SF_6$ and $CF_4/SF_6$. According to the results of single gases permeation for different pressures, PSF membrane has the highest $O_2$ permeation of 37.5 GPU and PC membrane has the highest $SF_6$ permeation of 2.7 GPU and the highest $CF_4$ permeation of 2.5 GPU at 1.1 MPa. According to the results of single gases permeation for different temperatures, PSF membrane has the highest permeation of $O_2$ at $45^{\circ}C$ and PC membrane has the highest permeation of $SF_6$ and $CF_4$ at $25^{\circ}C$. From the result of $O_2/SF_6$ and $CF_4/SF_6$ permselectivity for different pressures and temperature, the highest permeation and the lowest permselectivity were observed in the PSF and PC membrane. On the contrary, the lowest permeation and the highest permselectivity was observed in the PI membrane.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.237-240
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• 2004

Sulfur Hexafluoride, SF6 is widely used for leak detection and as a gaseous dielectric in transformers, condensers and circuit breakers. SF6 gas is also effective as a cleanser in the semiconductor industry. This paper presents a numerical study of the sealing force of disk type seal in SF6 gas safety valve. The sealing force on the disk seal is analyzed by the FEM method based on the Taguch's experimental design technique. Disk seals in SF6 gas safety valve are designed with 9 design models based on 3 different contact length, compressive ratio and gas pressure. The calculated results of Cauchy stress and strain showed that the sealing characteristics of Teflon PTFE is more effective compared to that of FKM(Viton), which is related to the stiffness of the materials. And also, the contact length of the disk seal is important design parameter for sealing the SF6 gas leakage in the safety valve.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1334-1335
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• 2008

Although many studies have been carried out about binary gas mixtures with $SF_6$, few studies were presented about breakdown characteristics of $SF_6/CF_4$ mixtures. At present study the breakdown characteristics of $SF_6/CF_4$ mixtures in uniform and nonuniform field was performed. The experiments were carried out under AC voltages. The sphere-sphere electrode whose gap distance was 1 mm was used and the point-plane electrode whose gap distance was 3 mm was used in a test chamber. $SF_6/CF_4$ mixture contained 20% $SF_6$ and 80% $CF_4$ and the experimental gas pressure ranged from 0.1 to 0.5 MPa. The results show that addition of $SF_6/CF_4$ mixtures increase AC breakdown voltages. In uniform field the breakdown voltages of gas were linearly increased according to the pressure. However in nonuniform field the breakdown voltages of gas were increased nonlinearly.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.36 no.11
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• pp.796-805
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• 1987

The flashover voltages have been investigated for spacer and unbridged-gap in SF6-N2 gas mixtures up to the value of 760(torr. cm), The gap was stressed by DC source The results obtained are as follows` 1) The flashover voltages for an unbridged gap and for a spacer in SF6, N2 and SF6-N2 gas mixtures follow the Paschen's curve. 2) The polarity effects was not observed in both unbridged gap and a spacer which had per ect contact with an electrode. The flashover voltages for negative polatity are lower than those for positive polarity in case of imperfect contact. 3) 3%flashover voltage is decreased by putting a spacer which had perfect contact with an electrode. The spacer which has a gap void shows the lowest flashover voltage. 4) The lowest spacer efficiency was obtained with higher gas pressure & large amount of N2 content. The flashover voltages depend on the gas pressure rather than the spacer efficienty at low value of pd. 5) The flashover voltages of gas mixtures of N2 with SF6 are relatively high, even though the amount of SF6 gas content is small.

• Clean Technology
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• v.19 no.2
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• pp.113-120
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• 2013

The treatment of chemically stable perflourocompounds (PFCs) requires a large amount of energy. An energy efficient arc plasma system has been developed to overcome such disadvantage. $CF_4$, $SF_6$ and $NF_3$ were injected into the plasma torch directly, and net plasma power was estimated from the measurement of thermal efficiency of the system. Effects of net plasma power, waste gas flow rate and additive gases on the destruction and removal efficiency (DRE) of PFCs were examined. The calculation of thermodynamic equilibrium composition was also conducted to compare with experimental results. The average thermal efficiency was ranged from 60 to 66% with increasing waste gas flow rate, while DRE of PFCs was decreased with increasing gas flow rate. On the other hand, DRE of each PFCs was increased with the increasing input power. Maximum DREs of $CF_4$, $SF_6$ and $NF_3$ were 4%, 15% and 90%, respectively, without reaction gas at the fixed input power and waste gas flow rate of 3 kW and 70 L/min. A rapid increase of DRE was found using hydrogen or oxygen additional gases. Hydrogen was more effective than oxygen to decompose PFCs and to control by-products. The major by-product in the arc plasma process with hydrogen was hydrofluoric acid that is easy to be removed by a wet scrubber. DREs of $CF_4$, $SF_6$ and $NF_3$ were 25%, 39% and 99%, respectively, using hydrogen additional gas at the waste gas flow rate of 100 L/min and the input power of 3 kW.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.22 no.12
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• pp.79-86
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• 2008

This paper presents the experimental results of impulse breakdown characteristics in $SF_6/N_2$ gas mixtures under a highly non-uniform electric field with a change in temperature. The test temperature ranges from -25[$^{\circ}C$] to 25[$^{\circ}C$]. The processes of impulse preliminary breakdown developments were analyzed by the measurements of current pulse and luminous signals. As a result, the temperature dependance of breakdown voltage for the negative polarity was much stronger than that for the positive polarity. When increasing the temperature, The leader stepping time for the negative polarity was shown to be longer than that for the positive polarity. The results presented in this paper can be used as a useful information in designing the gas insulation lines with prominent ability for lightning surge.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2001.11a
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• pp.145-149
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• 2001

The most of faults in gas insulation of power facilities are caused by partial discharge. Therefore we simulated partial discharge and measured the radiated electromagnetic wave emitted from partial discharge in SF$_{6}$ gas by biconical antenna. This paper describes time delay and electric fields pulse characteristics of radiated electromagnetic waves with distance(1[m], 3[m], 5[m]) between antenna and discharge source.e.