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http://dx.doi.org/10.7464/ksct.2013.19.2.113

Effect of Reaction Gases on PFCs Treatment Using Arc Plasma Process  

Park, Hyun-Woo (Department of Chemical Engineering, Inha University)
Choi, Sooseok (Regional Innovation Center for Environmental Technology of Thermal Plasma, Inha University)
Park, Dong-Wha (Department of Chemical Engineering, Inha University)
Publication Information
Clean Technology / v.19, no.2, 2013 , pp. 113-120 More about this Journal
Abstract
The treatment of chemically stable perflourocompounds (PFCs) requires a large amount of energy. An energy efficient arc plasma system has been developed to overcome such disadvantage. $CF_4$, $SF_6$ and $NF_3$ were injected into the plasma torch directly, and net plasma power was estimated from the measurement of thermal efficiency of the system. Effects of net plasma power, waste gas flow rate and additive gases on the destruction and removal efficiency (DRE) of PFCs were examined. The calculation of thermodynamic equilibrium composition was also conducted to compare with experimental results. The average thermal efficiency was ranged from 60 to 66% with increasing waste gas flow rate, while DRE of PFCs was decreased with increasing gas flow rate. On the other hand, DRE of each PFCs was increased with the increasing input power. Maximum DREs of $CF_4$, $SF_6$ and $NF_3$ were 4%, 15% and 90%, respectively, without reaction gas at the fixed input power and waste gas flow rate of 3 kW and 70 L/min. A rapid increase of DRE was found using hydrogen or oxygen additional gases. Hydrogen was more effective than oxygen to decompose PFCs and to control by-products. The major by-product in the arc plasma process with hydrogen was hydrofluoric acid that is easy to be removed by a wet scrubber. DREs of $CF_4$, $SF_6$ and $NF_3$ were 25%, 39% and 99%, respectively, using hydrogen additional gas at the waste gas flow rate of 100 L/min and the input power of 3 kW.
Keywords
Plasma; $CF_4$; $SF_6$; $NF_3$;
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