Browse > Article
http://dx.doi.org/10.14579/MEMBRANE_JOURNAL.2016.26.2.159

Study on the Multi-stage Hollow Fiber Membrane Modules for SF6 Gas Separation  

Jeong, Su Jung (Airrane Co. Ltd.)
Lim, Joo Hwan (Airrane Co. Ltd.)
Koh, Hyung Chul (Airrane Co. Ltd.)
Ha, Seong Yong (Airrane Co. Ltd.)
Publication Information
Membrane Journal / v.26, no.2, 2016 , pp. 159-165 More about this Journal
Abstract
Polyimide hollow fiber membrane modules were prepared in order to investigate the process of multi stage gas separation. The modules performance was carried out using 50/50 of $N_2/SF_6$ mixed gas. The membrane modules has been tested for measuring gas flow rate and concentration under various stage cut at 0.5 MPa. The membrane modules showed a high recovery ratio at the same stage cut as $N_2/SF_6$ selectivity increased. Two stage process was fulfilled for improving $SF_6$ recovery ratio and $SF_6$ concentration. Eventually, two stage process showed higher performance of $SF_6$ recovery ratio and concentration ($SF_6$ recovery ratio = 95%, $SF_6$ conc. = 98%).
Keywords
hollow fiber membrane; sulfur hexafluoride ($SF_6$); gas separation; recovery ratio; stage-cut;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 E. Preisegger, R. Durschner, W. Klotz, C. A. Konig, H. Krahling, C. Neumann, and B. Zahn, "Non-$CO_2$ greenhouse gases: scientific understanding, control and implementation; Life cycle assessment electricity supply using $SF_6$ technology", pp. 391, Kluwer Academic Publishers, Dordrecht (1999).
2 W. T. Tsai, "The decomposition products of sulfur hexafluoride ($SF_6$): Reviews of environmental and health risk analysis", J. Fluorine Chem., 128, 1345 (2007).   DOI
3 O. Yamamoto, T. Takuma, A. Kawamura, K. Hashimoto, N. Hatano, and M. Kinouchi, "$SF_6$ gas recovery from $SF_6$/$N_2$ mixtures using polymer membrane", in Gaseous Dielectrics IX, pp. 555-560, Kluwer Academic/Plenum Publishers, New York, NY (2001).
4 S. J. Lee, J. S. Lee, M. W. Lee, J. W. Choi, and S. H. Kim, "Separation of sulfur hexafluoride ($SF_6$) from ternary gas mixtures using commercial polysulfone (PSf) hollow fiber membranes", J. Membr. Sci., 452, 315 (2014).
5 M. Maiss, L. P. Steele, R. J. Francey, P. J. Fraser, R. L. Langenfelds, N. B. A. Trivett, and I. Levin, "Sulfur hexafluoride- A powerful new atmospheric tracer", Atmos. Environ., 30, 1621 (1996).   DOI
6 M. K. W. Ko, N. D. Sze, W.-C. Wang, G. Shia, A. Goldman, F. J. Murcray, D. G. Murcray, and C. P. Rinsland, "Atmospheric sulfur hexafluoride: sources, sinks and greenhouse warming", J. Geophys. Res., 98, 499 (1993).
7 H. Lee, M. Lee, H. Lee, and S. Lee, "Separation and recovery of $SF_6$ gas from $N_2$/$SF_6$ gas mixtures by using a polymer hollow fiber membranes", J. Korean Soc. Environ. Eng., 33, 47 (2011).   DOI
8 H. J. Lee, M. W. Lee, H. K. Lee, H. S. Choi, and S. H. Lee, "Recovery of $SF_6$ gas from Gaseous Mixture ($SF_6/N_2/O_2/CF_4$) through Polymeric Membranes", Membr. J., 21, 23 (2011).
9 S. J. Lee, J. S. Lee, M. W. Lee, J. W. Choi, and S. H. Kim, "Separation of sulfur hexafluoride ($SF_6$) from ternary gas mixtures using commercial polysulfone (PSf) hollow fiber membranes", J. Membr. Sci., 452, 313 (2014).
10 S. E. Nam, A. Park, and Y. I. Park, "Separation and Recovery of F-gases", Membr. J., 23, 190 (2013).
11 O. Yamamoto, T. Takkuma, and M. Kinouchi, "Recovery of $SF_6$ from $N_2$/$SF_6$ gas mixtures by using a polymer membrane", IEEE Electr. Insul. Mag., 18, 32 (2002).   DOI
12 T. Pulles and A. van Amstel, "An overview of non-$CO_2$ greenhouse gases", J. Integr. Environ. Sci., 7, 3 (2010).   DOI
13 W. T. Tsai, H. P. Chen, and W. Y. Hsien, "A review of uses, environmental hazards and recovery/ recycle technologies of perfluorocarbons (PFCs) be mission from the semiconductor manufacturing process", J. Loss Prevent. Proc. Ind., 15, 65 (2002).   DOI
14 M. Toyoda, H. Murase, T. Inohara, H. Nadsuka, A. Kobayashi, K. Takano, and K. Ohkuma, "Application of Pressure Swing Adsorption to $SF_6$ Separation and Liquefaction from $SF_6$/$N_2$ Mixtures", IEEEE Electr. Insul. Mag., 3, 2156 (2000).
15 T. Beppu, "New Alternative Gas Process Feasibility Study for PFC Emission Reduction from Semiconductor CVD Chamber Cleaning", Greenhouse Gas Control Technologies - 6th International Conference, Volume II, 1269 (2003).
16 C. S. Lee, E. H. Cho, S. Y. Ha, J. T. Chung, and J. W. Rhim, "Multi-stage process study of PEI-PDMS hollow fiber composite membrane modules for $H_2$/$CO_2$ mixed gas separation", Membr. J., 23, 4 (2013).
17 2010 ISMI Semiconductor Greenhouse Gas (GHG) Reporting Rule Survey Results, International SEMATECH manufacturing Initiative (2010).
18 Airrane Co. Ltd, "Method for preparation of carbon molecular sieve hollow fiber membrane precursor, and carbon molecular sieve hollow fiber membrane precursor and carbon molecular sieve hollow fiber membrane manufactured thereby", KOR Patent, 10-1562307 (2015).
19 K. H. Seong, J. S. Song, H. C. Koh, S. Y. Ha, M. H. Han, and C. H. Cho, "Effect of carbonization conditions on gas permeation of methyl imide based carbon molecular sieve hollow fiber membranes", Membr. J., 23, 335 (2013).