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검색결과 533건 처리시간 0.025초

반도체 세정 공정 평가를 위한 나노입자 안착 시스템 개발 (Development of Particle Deposition System for Cleaning Process Evaluation in Semiconductor Fabrication)

  • 남경탁;김영길;김호중;김태성
    • 반도체디스플레이기술학회지
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    • 제6권4호
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    • pp.49-52
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    • 2007
  • As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using SMPS (Scanning Mobility Particle Sizer) and deposited on the wafer by electrostatic force. The Experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

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홍수범람모의를 위한 내외수 연계모형 개발 (Development of a Coupled Model for the Flood Inundation Simulation)

  • 김형준;조용식
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2005년도 학술발표회 논문집
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    • pp.1047-1052
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    • 2005
  • The purpose of this study is developing a coupled model for the flood analysis. Firstly, the model(river model) describing the inundation in a river solves the two-dimensional Saint Venant equations with a finite difference method and it is possible moving boundary treatment. The other model(inland model) in developed based on the ILLUDAS model to describe the conveyance capacity of a stormwater sewer system. Finally, a coupled model is applied to a real situation. The newly developed coupled model simulates reasonably the flood event occurred in a river and a inland simultaneously

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낙동강유역에서의 천변저류지에 의한 홍수 저감영향 분석 (Flood Mitigation Analysis by Applying Off-line Storage Basins in Nakdong River)

  • 한건연;조완희;백진규
    • 한국수자원학회:학술대회논문집
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    • 한국수자원학회 2006년도 학술발표회 논문집
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    • pp.231-236
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    • 2006
  • 본 연구에서는 단일 첨두를 갖는 가상의 균일하도구간과 홍수피해가 극심하게 나타나고 있는 낙동강유역에 대하여 Saint-Venant 방정식을 음해적으로 유한차분하여 수치적으로 해석한 수리학적 하도추적을 FLDWAV 모형을 이용하여 수행함으로써 홍수파의 전달양상과 천변저류지의 홍수 저감영향을 분석하였다. 균일하도구간에 대한 적용은 천변저류지의 규모와 운영조건 그리고 설치위치에 따른 홍수 저감영향을 비교검토함으로써 천변저류지의 최적 규모 및 설치위치를 결정하는데 효과적인 참고 자료가 될 것으로 기대된다. 또한 낙동강유역에 대한 적용에서는 낙동강 하천정비 기본계획에 근거한 계획홍수량으로 모의를 수행하였다. 낙동강 유역종합 치수계획 보고서에 제시된 10개의 천변저류지에 대한 모의를 통해 실제 낙동강유역의 홍수 저감영향을 분석함으로써 하천제방 계획시 경제적인 하천 제방단면 결정을 위한 참고 자료 및 효과적인 홍수피해 경감대책 수립을 위한 기초 자료를 제시하고자 한다.

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SPATIAL DECAY BOUNDS OF SOLUTIONS TO THE NAVIER-STOKES EQUATIONS FOR TRANSIENT COMPRESSIBLE VISCOUS FLOW

  • Liu, Yan;Qiu, Hua;Lin, Changhao
    • 대한수학회지
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    • 제48권6호
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    • pp.1153-1170
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    • 2011
  • In this paper, spatial decay estimates for the time dependent compressible viscous isentropic flow in a semi-infinite three dimensional pipe are derived. An upper bound for the total energy in terms of the initial boundary data is obtained as well. The results established in this paper may be viewed as a version of Saint-Venant's principle in transient compressible Navier-Stokes flow.

The finite element model research of the pre-twisted thin-walled beam

  • Chen, Chang Hong;Zhu, Yan Fei;Yao, Yao;Huang, Ying
    • Structural Engineering and Mechanics
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    • 제57권3호
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    • pp.389-402
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    • 2016
  • Based on the traditional mechanical model of thin-walled straight beam, the paper makes analysis and research on the pre-twisted thin-walled beam finite element numerical model. Firstly, based on the geometric deformation differential relationship, the Saint-Venant warping strain of pre-twisted thin-walled beam is deduced. According to the traditional thin-walled straight beam finite element mechanical model, the finite element stiffness matrix considering the Saint-Venant warping deformations is established. At the same time, the paper establishes the element stiffness matrix of the pre-twisted thin-walled beam based on the classic Vlasov Theory. Finally, by calculating the pre-twisted beam with elliptical section and I cross section and contrasting three-dimensional solid finite element using ANSYS, the comparison analysis results show that pre-twisted thin-walled beam element stiffness matrix has good accuracy.

식품 유래 박테리아 현장검출용 바이오센서 (Biosensors for On-the-spot Detection of Bacteria from Foods)

  • 이원일;김보영;손영민;김아리;이내응
    • 센서학회지
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    • 제25권5호
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    • pp.354-364
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    • 2016
  • Recently there have been extensive research activities on the development of on-the-spot detection technologies for bacteria from foods due to growing high demand for food safety. In particular, on-the-spot detection devices using biosensors with rapid, highly sensitive and multiplexed sensing capability are promising for portable or mobile applications. Firstly, issues related to on-the-spot bacteria detection are discussed. Then, detection methods for bacteria, types of biosensors depending on transducing principle and receptors, and platforms for integration of biosensors and signal readers are reviewed. Finally, prospects for development of on-the-spot detection devices are summarized.

Confocal Microscopy of Colloidal Suspensions

  • Kim, Jin Young;Weon, Byung Mook
    • Applied Microscopy
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    • 제44권1호
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    • pp.30-33
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    • 2014
  • Colloidal systems or colloids consist of microparticles or nanoparticles (solute) uniformly suspended in a liquid (solvent), also called colloidal suspensions. They can mimic and exhibit microscopic or atomic aspects of molecular and atomic systems. They have been increasingly studied because of their similarity with atomic systems. They can be microscopically observed by optical microscopes because they are large enough in size and slow in motion to be monitored; microscopic methods are very useful and powerful in research on colloidal systems. Recently, confocal laser microscopy has been known as a powerful tool to obtain information of real-space and real-time behaviors of colloidal suspensions. In particular, it is possible to exactly track individual colloids in three dimensions with confocal microscopy. In this article, we briefly discuss the usefulness of confocal microscopy in colloidal systems that are currently used as model systems to resolve important questions in materials science.