• Transactions on Semiconductor Engineering
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• v.1 no.1
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• pp.9-13
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• 2023

An AlGaN/GaN heterojunction-based hydrogen sensor with SnO₂ nanoparticles/Pd catalyst layer was fabricated for room-temperature hydrogen detection. The fabricated sensor exhibited unstable drift in standby current when it was operated at room temperature. The instability in the sensing signal was dramatically improved when the sensor was operated under UV illumination.

• Journal of Sensor Science and Technology
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• v.23 no.6
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• pp.420-424
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• 2014

Aluminum-scandium nitride ($Al_{1-x}Sc_xN$) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 50% $N_2$/Ar. The effect of Sc-doping on the structure and piezoelectric properties of AlN films has been investigated using SEM, XRD, surface profiler and pressure-voltage measurements. The as-deposited AlN films showed polycrystalline phase, and the Sc-doped AlN film, the peak of AlN (002) plane and the crystallinity became very strong. With Sc-doping, the crystal size of AlN film was grown from ~20 nm to ~100 nm. The output signal voltage of AlN sensor showed a linear behavior between 15~65 mV, and output signal voltage of Sc-doped AlN sensor was increased over 7 times. The pressure-sensing sensitivity of AlN film was calculated about 10.6mV/MPa, and $Al_{0.88}Sc_{0.12}N$ film was calculated about 76 mV/MPa.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.7
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• pp.82-88
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• 1993

This paper describes fabrication of relative type capacitive pressure sensor to be in great demand for many fields. The fabricated sensor consists of two parts` a sensing diaphragm and a pyrox glass cover. The sensor size is 4.5${\times}3.4mm$^{2})$ and 400$\mu$m thick. To improve the nonlinearity, this sensor is designed a rectangular silicon diaphragm with a center boss structure, and in order to improve the temperature characteristics of the sensor in a packaging process, the sensing element is mounted on the pyrex glass support. Some suggestions toward the design and fabrication of improved sensors have been presented. The zero pressure capacitance, Co of sensor is 26.57pF, and the change of capacitance, ${\Delta}$C is 1.55pF from 0Kgf/Cm$^{2}$ to 1Kgf/Cm$^{2}$ at room temperature. The nonlinearity of the sensor output with center boss diaphragm is 1.29%F.S., and thermal zero shift and thermal sensitivity shift is less than 1.43%F.S./$^{\circ}C$and 0.14% F.S./$^{\circ}C$, respectively.

• Journal of Auto-vehicle Safety Association
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• v.7 no.2
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• pp.39-43
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• 2015

NDIR (Non-dispersive infrared Rays) alcohol sensor has been prototyped and its temperature characteristics were measured. In order to design novel optical alcohol sensor, elliptical structures with one common foci were modeled and analyzed their optical properties. After analyzing elliptic optical structures, a prototype alcohol sensor module was tested according to the temperature variations from $-20^{\circ}C$ to $35^{\circ}C$. The offset voltages of alcohol sensor decreased from 1.1056 V at the temperature $-20^{\circ}C$ to 0.7339 V at $35^{\circ}C$. However, the highest sensitivity of alcohol sensor showed about $303{\mu}V/ppm$ at room temperature.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.13-19
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• 2006

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.368-371
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• 2003

The humidity sensors with a stable characteristics and gas sensors operating at room temperature have been fabricated, and a multi-functional sensor system which has gas sensor, humidity sensor, temperature sensor and control circuit has been applied to the microwave oven system. For a suitable cooking state, the humidity sensors was more applicable to heating and defrosting condition than gas sensors, however, the dynamic characteristics of gas sensors were obtained in the easy burning food such as pop corn.

• Journal of Power System Engineering
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• v.10 no.4
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• pp.43-49
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• 2006

Nowadays, the thermal environments of classrooms are usually adjusted by the ceiling type air-conditioning system with a temperature sensor installed on inlet of an air-conditioner. However, it is not clear that the conventional temperature sensor position is proper to satisfy both thermal comport and energy saving in summer especially. Therefore, this study is aimed at finding out the best position of the temperature sensor on the purpose of the comfort thermal environment and energy saving. The different 5 positions for the temperature sensor are supposed in this paper to analyze thermal environment by CFD. From the analysis through the CFD simulations, the best position of the temperature sensor satisfying for both comfort thermal environment and energy saving is obtained.

• Journal of Electrochemical Science and Technology
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• v.10 no.3
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• pp.294-301
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• 2019

The quasi-solid-state hybrid electrolytes were synthesized by chemical cross-linking reaction of methacrylate-functionalized $SiO_2$ ($MA-SiO_2$) and tetra (ethylene glycol) diacrylate in aqueous electrolyte. A quasi-solid-state electrolyte synthesized by 6 wt.% $MA-SiO_2$ exhibited a high ionic conductivity of $177mS\;cm^{-1}$ at room temperature. The electrochemical $H_2$ sensor assembled with quasi-solid-state electrolyte showed relatively fast response and high sensitivity for hydrogen gas at ambient temperature, and exhibited better durability and stability than the liquid electrolyte-based sensor. The simple construction of the sensor and its sensing characteristics make the quasi-solid-state hydrogen sensor promising for practical application.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1993.10a
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• pp.393-402
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• 1993

Two field test installations are discussed. In the first one a new ammonia sensor and an accurate ventilation rate sensor are combined. They are installed in the exhaust chimney in a ventilated pig house. The relative humidity and the room temperature are measured as well. In the second one, an in situ NH$_3$longrightarrowNO converter with subsequent NOx analyser is also being added for accurate ammonia measurement . In this way , the continuous measurement of the total NH$_3$emission can be obtained , the performance of the NH$_3$ sensor can be evaluated, and the ammonia reduction techniques can be tested. The outputs of measurement are fed into a data acquisition system then to a PC in the laboratory. There has been realised the first test installation with which research on the new ammonia sensor is carried out. The primary research results are presented.

• Journal of the Institute of Convergence Signal Processing
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• v.13 no.1
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• pp.1-5
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• 2012

In this study, we constructed a virtual auditory display(VAD) that enables listener to move in a room freely. The VAD system was installed in a soundproof room($4.7m(W){\times}2.8m(D){\times}3.0m(H)$). The system consisted of a personal computer, a sound presentation device, and a three-dimensional ultrasound sensor system. This system acquires listener's location and position from a three-dimension ultrasonic sensor system covering the entire room. Localization was realized by convolving the sound source with head related transfer functions(HRTFs) on personal computer(PC). The calculated result is generated through a LADOMi(Localization Auditory Display with Opened ear-canal for Mixed Reality). The HRTFs used in the experiment were measured for each listener with loudspeakers constantly 1.5m away from the center of the listener' s head in an anechoic room. To evaluate the system performance, we experimented a search task of a sound source position in the condition that the listener is able to move all around the room freely. As a result, the positioning error of presented sound source was within 30cm in average for all listeners.