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http://dx.doi.org/10.5369/JSST.2006.15.1.013

Gas sensing characteristics of carbon nanotube gas sensor using a diaphragm structure  

Cho, Woo-Sung (Department of Electronic Engineering, Korea University)
Moon, Seung-Il (Department of Electronic Engineering, Korea University)
Kim, Young-Cho (Department of Electronic Engineering, Chungwoon University)
Park, Jung-Ho (Department of Electronic Engineering, Korea University)
Ju, Byeong-Kwon (Department of Electrical Engineering, Korea University)
Publication Information
Journal of Sensor Science and Technology / v.15, no.1, 2006 , pp. 13-19 More about this Journal
Abstract
The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.
Keywords
gas sensor; carbon nanotube; nitrogen dioxide; recovery;
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