Pressure Sensing Properties of Al1-xScxN Thin Films Sputtered at Room Temperature
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Seok, Hye-Won
(Korea Institute of Ceramic Engineering and Technology)
Kim, Sei-Ki (Korea Institute of Ceramic Engineering and Technology) Kang, Yang-Koo (Korea Institute of Ceramic Engineering and Technology) Lee, Young-Jin (Korea Institute of Ceramic Engineering and Technology) Hong, Yeon-Woo (Korea Institute of Ceramic Engineering and Technology) Ju, Byeong-Kwon (Department of Electrical Engineering, Korea University) |
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