• 한국정밀공학회지
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• 제31권6호
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• pp.469-475
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• 2014

The roll to roll (RTR) imprint process is an integrated imprinting process where steps ranging from assignment of a function to a flexible rolled substrate to rewinding of the same substrate in a roll are performed. RTR imprint is a green, low-cost technology without limitations. In RTR imprint, it is important to manufacture the mold precisely and maintain uniform process condition. To this, process conditions have to include precision tension control, optimization of process parameters. We introduced RTR imprint to fabricate planar lightwave circuit (PLC) device for communication, by new schematic design and process optimization, we fabricated successfully optical device. The fabricated optical device showed the optical performance which was satisfied to meet international standard.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.597-598
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• 2013

• 마이크로전자및패키징학회지
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• 제22권4호
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• pp.25-29
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• 2015

저가격, 높은 생산성, 고해상도를 가지는 소자의 패턴 제작 방법에 대한 요구가 계속적으로 증가하고 있다. 롤투롤 연속생산 공정은 저비용, 대량생산이 가능한 차세대 공정으로 각광받고 있다. 본 논문에서는 PLC (planar lightwave circuit) 소자의 제작을 위해서 롤투롤 공정을 이용하여 제조하는 방법을 연구하였다. 제안한 기술은 polydimethylsiloxane (PDMS) 고분자를 이용하여 롤투롤 공정을 통해 PLC소자를 제작하는 공정을 연구하였다. 실리콘 웨이퍼에 형성된 마이크로 패턴을 복제 공정을 수행하였으며 이를 원통금형에 적용하여 롤투롤 공정의 롤 몰드(roll mold)로 사용하였다. 웹 텐션과 웹 속도의 공정 조건 최적화로 롤투롤 공정을 이용하여 PLC소자를 제작하였다. 제작된 PLC소자는 약4.0dB의 삽입손실을 가지는 $1{\times}2$ 광분배기이며, 제안한 롤투롤 공정 기술을 이용한 PLC소자의 제작 공정이 대량연속생산에 유효함을 확인하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.82-85
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• 2008

We are working towards large-area arrays of thin film transistors on polymer substrates using roll-to-roll (R2R) processes exclusively. Self-aligned imprint lithography (SAIL) is an enabler to pattern and align submicron features on meter-scaled flexible substrates in the R2R environment. The progress, current status and remaining issues of this new fabrication technology are presented.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.138-141
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• 2009

Progress in the development of a fully roll-to-roll selfaligned imprint process for producing active matrix backplanes with submicron aligned features on flexible substrates is reported. High performance transistors, crossovers and addressable active matrix arrays have been designed and fabricated using imprint lithography. Such a process has the potential of significantly reducing the costs of large area displays. The progress, current status and remaining issues of this new fabrication technology are reported.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1539-1543
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• 2006

We have developed self-aligned imprint lithography (SAIL) technology, an innovative method for roll-to-roll (R2R) fabrication of electronic devices on flexible plastic substrates. In this paper, we present the first R2R-produced ${\alpha}$-Si TFTs built on a polyimide substrate using the SAIL process, and prove the feasibility of this technology to enable R2R fabrication of flexible display active matrix (AM) backplanes with high precision and throughput.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.151-152
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• 2010

• 한국정밀공학회지
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• 제32권10호
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• pp.897-902
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• 2015

This study reports on a uniform resin coating method by using a doctor blade type dispenser. For high productivity, continuous imprint-lithography has been studied, and developed fabrication systems are used in several applications such as anti-reflection films, dry adhesives, and water collecting surfaces. In the continuous fabrication field, researchers have typically focused on patterning and demolding procedures. During the roll-to-roll fabrication process, however, the uniform resin coating process is also important in order to obtain a high quality product, which can be evaluated by uniform thickness, precise geometric expressions, and a thin residual layer. To achieve these, a doctor blade type dispenser was designed and fabricated. As a result, thickness of coated resin was well controlled by modulating the flow rate of the resin and blading gap. In addition, a very thin layer coating process (${\sim}10{\mu}m$) was achieved by softly contacting the blade on the substrate.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.808-810
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• 2005

Inexpensive large area arrays of thin film transistors (TFTs) on flexible substrates will enable many new display products that cannot be cost effectively manufactured by conventional means. This paper presents a new approach for low cost manufacturing of electronic devices using roll-to-roll (R2R) processes exclusively. It was developed in partnership by Hewlett Packard Laboratories and Iowa Thin Film Technologies (ITFT), a solar cell manufacturer. The approach combines ITFT's unique processes for vacuum deposition and etching of semiconductors, dielectrics and metals on continuous plastic webs with a method HP has invented for the patterning and aligning the multiple layers of a TFT with sub-micron accuracy and feature size.

• 한국생산제조학회지
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• 제18권3호
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• pp.307-314
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• 2009

Large area micro pattern replication has promising application potential in many areas. Rolling imprint process has been demonstrated as one of the most competitive processes for such micro pattern replication, because it has advantages in low cost, high throughput and high efficiency. In this paper, we developed a prototype of roll-to-flat(R2F) thermal imprint system for large area micro pattern replication process, which is one of the key processes in the fabrication of flexible displays. Experimental tests were conducted to evaluate the feasibility of system and the parameters' effect on the process, such as flat mold temperature, loading pressure and rolling speed. 100mm $\times$ 100mm stainless steel flat mold and commercially available polycarbonate sheets were used for the tests. The experimental results showed that the developed R2F system is suitable for fabrication of various micro devices with micro pattern over large area.