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http://dx.doi.org/10.6117/kmeps.2015.22.4.025

PLC Devices Fabricated on Flexible Plastic Substrate by Roll-to-Roll Imprint Lithography  

Kang, Ho Ju (Department of Cogno-Mechatronics Engineering, Pusan National University)
Kim, Taehoon (Department of Cogno-Mechatronics Engineering, Pusan National University)
Jeong, Myung Yung (Department of Cogno-Mechatronics Engineering, Pusan National University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.22, no.4, 2015 , pp. 25-29 More about this Journal
Abstract
Demand for a low-cost, high-throughput, and high-resolution patterning method for fabricating devices continues to increase. The roll-to-roll (R2R) imprint lithography technique has received a great deal of attention as a means of fabricating next-generation devices. In this paper, we propose a fabrication method for polymeric planar lightwave circuit (PLC) devices that uses R2R imprint lithography. The proposed technique uses an elastomeric polydimethylsiloxane (PDMS) mold. A Si wafer with micro patterns is used as the Si master. The PDMS mold is then replicated from the Si master. By applying a precise web tension and at a given web speed, we fabricated a micro-patterned PLC device. The insertion losses were 4.0 dB for a $1{\times}2$ optical splitter. As such, the proposed method of fabricating a PLC device by the R2R process was shown to be an effective solution.
Keywords
Planar lightwave circuit; Polymeric roll mold; R2R process; Roll-to-Roll imprint lithography; Optical interconnection;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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