• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.354-360
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• 1999

PCN-PZT piezoelectric acceleration sensors of annular shear mode voltage type were fabricated and their characteristics have been investigated. Field tests are also carried out. To avoid noise problems from the environmental conditions, acceleration sensors employed solid state micro-electronics for pre-amplifier. The calibration procedures based on the principle of the comparison method were adopted for investigating the characteristics of fabricated acceleration sensors. The voltage sensitivity and resonant frequency of fabricated acceleration sensors were 83mv/g, 23kHz, respectively. The lower and upper frequency limit were 4Hz and 9kHz, respectively. The variation of the voltage sensitivity showed 10% at $-406{\circ}C\; and\; 9%\; at\; 121^{\circ}C$ compared to that of reference temperature at $40^{\circ}C$.

• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.76-84
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• 2006

Arrayed ultrasonic sensors based on the piezoelectric thin film (lead-zirconate-titanate: Pb($Zr_{0.52}Ti_{0.48})O_{3}$) having composite membrane structure are fabricated. Different thermal and elastic characteristics of each layer generate the residual stress during the high temperature deposition processes, accomplished diaphragm is consequently bowing. We present the membrane deflection effects originated from the residual stress on the resonant frequencies of the sensor chips. The resonant frequencies ($f_r$) measured of each sensor structures are located in the range of $87.6{\sim}111\;kHz$, these are larger $30{\sim}40\;kHz$ than the resultant frequencies of FEM. The primary factors of $f_r$ deviations from the ideal FEM results are the membrane deflections, and the influence of stiffness variations are not so large on that. Membrane deflections have the effect of total thickness increase which sensitively change the $f_r$ to the positive direction. Stress generations of the membrane are also numerically predicted for considering the effect of stiffness variations on the $f_r$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.419-422
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• 1998

There are lots of researches which are using quratz crystal in order to apply it to sensors, for example, mass detect sensor, humidity sensor, gas sensor, etc. We tried to apply quartz crystal to the sensor using the resonant frequency and the resistance properties. Four kinds of fatty acid which are having the same head group are coated at the surface of quartz crystal, the shift of the resonant frequency and the resistance are observed according to length of the tail group. Myristic acid$(C_{14})$, palmitic acid$(C_16)$, stearic acid$(C_{18})$, and arachidic acid$(C_{20})$ were coated by Langmuir-Blodgett(LB) technique. As results, the resonant frequency shift was observed linearly. However, there are some difference compared with Sauerbrey's equation. It can be explained by the effect of the temperature property and/or humidity. On the other hand, the shift of the resistance was observed nonlinearly.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 1999년도 추계학술발표대회 논문집
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• pp.251-257
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• 1999

Smart structure that contains sensors, which are either embedded in a composite material or attached to a structure, is currently receiving considerable attention. Fiber Bragg grating sensor, one of the optical fiber sensors, has been widely used to sense strain and temperature for smart structures since both parameters change the resonant frequency of the grating. In this paper, according to the various heating and cooling conditions the thermal behavior of unidirectional composite material was monitored by embedding the fiber Bragg grating sensors in the longitudinal and transverse directions of unidirectional composites. The thermal behavior of unidirectional composite material was monitored for various heating and cooling rates and applied pressure. It was found that the thermal behavior was unaffected by pressure variations and heating and cooling rates applied to the composites. The thermal strains were measured by considering the shift in Bragg wavelength that was generated by the thermal expansion of composite specimen. The longitudinal and transverse C.T.E.'s were also obtained from the corresponding temperature-thermal strain curves.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1147-1152
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• 2004

Switched Reluctance Motors have an inexpensive, intrinsic simplicity and low cost that makes them well suited to home appliance and office applications. However the motor suffering with necessity of shaft position sensor, lead to non-linearity of operations. Further, the involvement of static converters deteriorates the operational power factor. Implementation of a sensorless algorithm, can remove the need of position sensors. Also, the drive includes a compact power factor control in the input stage by implementing Zero Current Switching Quasi-Resonant Boost Technology. This paper presented, aims at optimized low line current distortion, high power factor, low cost and a shaft position sensorless Switched Reluctance Motor drive.

• 한국전기전자재료학회논문지
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• 제13권6호
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• pp.502-508
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• 2000

In order to detect the partial discharge with the metallic particle in GIS the AE(Acoustic Emission) sensor was designed and simulated by ANSYS 5.5 and manufactured as the coupled vibration mode. The measured resonant frequency and the maximum sensitivity frequency of three coupled AE sensors were as follows ; 147.88 kHz in 8.1mm $\Phi$$\times$8.1mm 128.82 kHz and 58.8 kHz in 9.5 mm$\Phi$$\times$9.5mm, 85.22 kHz and 32.6 kHz in 14.3 mm$\Phi$$\times$14.3 mm, resonant frequency of the AE sensor. The AE sensor of 9.5 mm$\Phi$$\times$9.5mm responded higher than the other coupled vibration mode AE sensor at the partial discharge detection in GIS.

• ETRI Journal
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• 제28권6호
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• pp.739-744
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• 2006

In this paper, we report numerically calculated results of testing a temperature-insensitive refractive sensor based on a planar-type long-period waveguide grating (LPWG). The LPWG consists of properly chosen polymer materials with an optimized thermo-optic coefficient for the core layer in a four-layer waveguide structure. The resonant wavelength shift below the spectral resolution of the conventional optical spectrum analyzer is obtained accurately over a temperature change of ${\pm}7.5^{\circ}C$ even without any temperature control. The refractive index sensitivity of the proposed grating scheme is about 0.004 per resonant wavelength shift of 0.1 nm for an optimized thermo-optic coefficient.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.286-289
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• 1999

In order to detect the partial discharge with the metallic particle in GIS, AE sensor was designed and simulated by ANSYS, and manufactured as the coupled vibration mode. The resonant frequency of three Coupled AE sensors were as follows ; 147.88 kHz in 8.1 mm$\Phi$ $\times$ 8.1mm, 128.82 kHz in 9.5 mm$\Phi$ $\times$ 9.5mm, 85.22 kHz in 14.3mm$\Phi$ $\times$14.3mm. That frequency is λ/2 resonant frequency. AE sensor of 9.5mm$\Phi$ $\times$9.5mm responded higher than the other coupled vibration mode AE sensor at the partial discharge detection in GIS.

• 센서학회지
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• 제18권3호
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.