• Title/Summary/Keyword: RAMAN

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Micro Raman Spectroscopic Analysis of Local Stress on Silicon Surface in Semiconductor Fabrication Process (반도체 제조 공정에서 실리콘 표면에 유입된 Stress의 마이크로 Raman 분광분석)

  • Son, Min Young;Jung, Jae Kyung;Park, Jin Seong;Kang, Sung Chul
    • Analytical Science and Technology
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    • v.5 no.4
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    • pp.359-366
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    • 1992
  • Using micro-Raman spectrometer, we investigated the evaluation of microstress on silicon surface after the local thermal oxidation. The induced stress of silicon surface after local thermal oxidation shows maximum value at the interface of silicon oxide and active area. The smaller the size of active area, the larger stress. From the evaluation of three other device isolation processes, A, B and moB, whose active size has $0.45{\mu}m$ in length, moB process is turned out to have the lowest stress value and the smallest bird's beak effect.

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Electrochemical and Raman Spectroscopy Analysis for D- and L-Tryptophan-b-Cyclodextrin Inclusion Complexes

  • Jeong, Yu-Ra;Lee, So-Ra;Son, Pyeong-Soo;Choi, Seong-Ho
    • Journal of the Korean Applied Science and Technology
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    • v.32 no.3
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    • pp.451-460
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    • 2015
  • An enantioselective recognition of D- and L-tryptophan (Trp)-b-cyclodextrin (CD) inclusion complex was performed using electrochemical and FT-Raman spectroscopic analysis. From the electrochemical analysis, the selectivity coefficient ($K_{DL}$) of b-CD inclusion complexes was found higher than that of the D- and L-Trp in phosphate buffered saline (PBS, pH=7.0) solution. The percentage of enantioselectivity ($I_{%{ee}}$) for peak current of D-Trp-b-CD inclusion complexes was observed higher than that of L-Trp-b-CD inclusion complexes in PBS solution. From Raman spectroscopy, chemical shift difference (D, $cm^{-1}$) for the C=C stretch, ring vibration, and ring breathing of D-Try-b-CD inclusion complex were observed higher than that of L-Trp-b-CD inclusion complex. The electrochemical and Raman spectroscopic analyses were found very useful for chiral detection of racemic amino acid in the presence of b-CD.

Raman Spectroscopy Analysis of Inter Metallic Dielectric Characteristics in IC Device (Silicon 기반 IC 디바이스에서의 층간 절연막 특성 분석 연구)

  • Kwon, Soon Hyeong;Pyo, Sung Gyu
    • Journal of the Microelectronics and Packaging Society
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    • v.23 no.4
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    • pp.19-24
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    • 2016
  • Along the few nano sizing dimensions of integrated circuit (IC) devices, acceptable interlayer material for design is inevitable. The interlayer which include dielectric, interconnect, barrier etc. needs to achieve not only electrical properties, but also mechanical properties for endure post manufacture process and prolonging life time. For developing intermetallic dielectric (IMD) the mechanical issues with post manufacturing processes were need to be solved. For analyzing specific structural problem and material properties Raman spectroscopy was performed for various researches in Si semiconductor based materials. As improve of the laser and charge-coupled device (CCD) technology the total effectiveness and reliability was enhanced. For thin film as IMD developed material could be analyzed by Raman spectroscopy, and diverse researches of developing method to analyze thin layer were comprehended. Also In-situ analysis of Raman spectroscopy is introduced for material forming research.

Reaction Monitoring of Imine Synthesis Using Raman Spectroscopy

  • Lee, Moon-Kwon;Kim, Hye-Sung;Rhee, Hak-June;Choo, Jae-Bum
    • Bulletin of the Korean Chemical Society
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    • v.24 no.2
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    • pp.205-208
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    • 2003
  • Laser-induced Raman spectroscopy has been utilized to demonstrate its feasibility for studying the kinetics of imine formation in chloroform solvent. The imine formation, by the nucleophilic addition of primary amine to the carbonyl group of ketone, has been monitored at ten minute intervals for eight hours. The intensity of the C=O stretching mode at 1684 $cm^{-1}$ was measured to determine the rate constant of the reaction. In order to correct the sample-to-sample fluctuations in Raman peak area, this peak was normalized to the C-Cl bending peak at 666 $cm^{-1}$. By the peak area change during the course of reaction, the second order rates at three different temperatures have been determined. The substituent effects on the π conjugations of imine product have also been investigated. On the basis of Raman frequency shifts, the delocalization properties of the aromatic system modified by substitution of a hydrogen atom with -Cl and $-CH_3O$ groups could be clearly understood.

Nanosecond Gated Raman Spectroscopy for Standoff Detection of Hazardous Materials

  • Chung, Jin Hyuk;Cho, Soo Gyeong
    • Bulletin of the Korean Chemical Society
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    • v.35 no.12
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    • pp.3547-3552
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    • 2014
  • Laser Raman spectroscopy is one of the most powerful technologies for standoff detection of hazardous materials including explosives. Supported by recent development of laser and sensitive ICCD camera, the technology can identify trace amount of unknown substances in a distance. Using this concept, we built a standoff detection system, in which nanosecond pulse laser and nanosecond gating ICCD technique were delicately devised to avoid the large background noise which suppressed weak Raman signals from the target sample. In standoff detection of explosives which have large kill radius, one of the most important technical issues is the detection distance from the target. Hence, we focused to increase the detection distance up to 54 m by careful optimization of optics and laser settings. The Raman spectra of hazardous materials observed at the distance of 54 m were fully identifiable. We succeeded to detect and identify eleven hazardous materials of liquid or solid particles, which were either explosives or chemical substances used frequently in chemical plants. We also performed experiments to establish the limit of detection (LOD) of HMX at 10 m, which was estimated to be 6 mg.

Stellar Wind Accretion and Raman O VI Spectroscopy of the Symbiotic Star AG Draconis

  • Lee, Young-Min;Lee, Hee-Won;Lee, Ho-Gyu;Angeloni, Rodolfo
    • The Bulletin of The Korean Astronomical Society
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    • v.43 no.1
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    • pp.63.4-64
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    • 2018
  • High resolution spectroscopy of the yellow symbiotic star AG Draconis is performed with the Canada-France-Hawaii Telescope to analyse the line profiles of Raman scattered O VI broad emission features at $6825{\AA}$ and $7082{\AA}$ with a view to investigating the wind accretion process from the mass losing giant to the white dwarf. These two spectral features are formed through inelastic scattering of O $VI{\lambda}{\lambda}32$ and 1038 with atomic hydrogen. We find that these features exhibit double-component profiles with red parts stronger than blue ones with the velocity separation of ~ 60 km s-1 in the O VI velocity space. Monte Carlo simulations for O VI line radiative transfer are performed by assuming that the O VI emission region constitutes a part of the accretion flow around the white dwarf and that Raman O VI features are formed in the neutral part of the slow stellar wind from the giant companion. The overall Raman O VI profiles are reasonably fit with an azimuthally asymmetric accretion flow and the mass loss rate ~ 4 ${\times}$ 10^{-7} M_sun yr^{-1}. We also find that additional bipolar neutral regions moving away with a speed ~ 70 km s^{-1} in the directions perpendicular to the orbital plane provide considerably improved fit to the red wing parts of Raman features.

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Raman and Photoluminescence Study of Single-Walled Carbon Nanotubes Dispersed in Sodium Dodecyl Sulfate Aqueous Solution Using Ultrasonication (계면활성제를 이용한 단층 탄소나노튜브 분리에 따른 라만과 Photoluminescence 연구)

  • Park, June;Seong, Maeng-Je
    • Journal of the Korean Vacuum Society
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    • v.17 no.2
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    • pp.170-174
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    • 2008
  • We have studied, using Raman and photoluminescence (PL) spectroscopy, material property changes of single-walled carbon nanotubes (SWCNTs) dispersed in sodium dodecyl sulfate(SDS) aqueous solution by ultrasonication. Radial breathing mode Raman intensities of the dispersed SWCNTs shows different behavior depending on their chiralities as the sonication time increases. As the amount of SWCNTs dispersed in 1wt% SDS solution increases, both a downshift of the G-band Raman frequency and an enhancement in the PL intensity were observed.

A Study on Spectroscopic Analysis by using Raman Spectrometer of Multi-Guest Mixed Hydrates Containing $SF_6$ (Raman Spectroscopy를 이용한 $SF_6$ 혼합 하이드레이트의 분광학적 해석에 관한 연구)

  • Shin, H.J.;Moon, D.H.;Kim, M.C.;Kim, Y.S.;Seo, Y.W.;Lee, G.W.
    • 한국신재생에너지학회:학술대회논문집
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    • 2008.10a
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    • pp.223-225
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    • 2008
  • 하이드레이트는 저온.고압에서 저분자량의 게스트(guest)가 호스트(host)인 물분자 속에 포획되어 만들어지는데 일련의 과정은 물리적 반응을 통해 생성된다.본 연구에서는$CO_2$보다 지구온난화지수(Global Warming Potential)가 23,900배 높은 $SF_6$의 회수 및 정제기술로써 하이드레이트화를 이용하는 신기술 개발의 일환으로 분광학적 접근을 통해 $SF_6$ 혼합 하이드레이트의 정성 및 정량분석을 수행하였다. Raman Shift 분석 결과 $SF_6$$770cm^{-1}$에서 $v_1$ 진동주파수를 확인함으로써 하이드레이트 내 $SF_6$가 안정적으로 포집됨을 확인하였고 혼합가스 내 $SF_6$ 농도별로 만들어진 샘플의 Raman Shift를 통해서 $SF_6$의 하이드레이트 전환율을 가늠할 수 있었다.

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Raman Spectroscopy Studies of Graphene Nanoribbons and Chemical Doping in Graphene

  • Ryu, Sun-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.15-15
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    • 2011
  • Atom-thick graphene membrane and nano-sized graphene objects (NGOs) hold substantial potential for applications in future molecular-scale integrated electronics, transparent conducting membranes, nanocomposites, etc. To realize this potential, chemical properties of graphene need to be understood and diagnostic methods for various NGOs are also required. To meet these needs, chemical properties of graphene and optical diagnostics of graphene nanoribbons (GNRs) have been explored by Raman spectroscopy, AFM and STM scanning probes. The first part of the talk will illustrate the role of underlying silicon dioxide substrates and ambient gases in the ubiquitous hole doping of graphene. An STM study reveals that thermal annealing generates out-of-plane deformation of nanometer-scale wavelength and distortion in $sp^2$ bonding on an atomic scale. Graphene deformed by annealing is found to be chemically active enough to bind molecular oxygen, which leads to a strong hole-doping. The talk will also introduce Raman spectroscopy studies of GNRs which are known to have nonzero electronic bandgap due to confinement effect. GNRs of width ranging from 15 nm to 100 nm have been prepared by e-beam lithographic patterning of mechanically exfoliated graphene followed by oxygen plasma etching. Raman spectra of narrow GNRs can be characterized by upshifted G band and strong disorder-related D band originating from scattering at ribbon edges. Detailed analysis of the G, D, and 2D bands of GNRs proves that Raman spectroscopy is still a reliable tool in characterizing GNRs despite their nanometer width.

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A Novel Classification of Polymorphs Using Combined LIBS and Raman Spectroscopy

  • Han, Dongwoo;Kim, Daehyoung;Choi, Soojin;Yoh, Jack J.
    • Current Optics and Photonics
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    • v.1 no.4
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    • pp.402-411
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    • 2017
  • Combined LIBS-Raman spectroscopy has been widely studied, due to its complementary capabilities as an elemental analyzer that can acquire signals of atoms, ions, and molecules. In this study, the classification of polymorphs was performed by laser-induced breakdown spectroscopy (LIBS) to overcome the limitation in molecular analysis; the results were verified by Raman spectroscopy. LIBS signals of the $CaCO_3$ polymorphs calcite and aragonite, and $CaSO_4{\cdot}2H_2O$ (gypsum) and $CaSO_4$ (anhydrite), were acquired using a Nd:YAG laser (532 nm, 6 ns). While the molecular study was performed using Raman spectroscopy, LIBS could also provide sufficient key data for classifying samples containing different molecular densities and structures, using the peculiar signal ratio of $5s{\rightarrow}4p$ for the orbital transition of two polymorphs that contain Ca. The basic principle was analyzed by electronic motion in plasma and electronic transition in atoms or ions. The key factors for the classification of polymorphs were the different electron quantities in the unit-cell volume of each sample, and the selection rule in electric-dipole transitions. The present work has extended the capabilities of LIBS in molecular analysis, as well as in atomic and ionic analysis.