• Journal of Photoscience
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• 제10권1호
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• pp.97-104
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• 2003

The excitation wavelength dependence of laser ablation dynamics of an azobenzene-containing urethane-urea copolymer film was investigated by measuring the laser fluence dependence of etch depth, transient absorbance change at each excitation wavelength, and transient absorption spectra. Moreover expansion/contraction dynamics was studied by applying nanosecond time-resolved interferometry. The threshold was determined at several excitation wavelengths from etch depth measurement, while time-integrated absorbance was obtained under excitation conditions. The photon energy required to remove the topmost of surface layer of the film did not .depend on excitation wavelength, and the penetration depth of excitation pulse dominated the etch depth. When the excitation wavelength was longer than 500 nm, permanent swelling was clearly observed but not for shorter wavelength excitation. In the latter case, photoisomerization occurred during excitation and the following photoreduction may play an important role. On the basis of the observations made in this study, a photochemical and photothermal mechanisms can explain mostly the short and long wavelength excitation results, respectively.

• 한국레이저가공학회지
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• 제13권1호
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• pp.11-15
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• 2010

Indium tin oxide (ITO) provides high electrical conductivity and transparency in the visible and near IR (infrared) wavelengths. Thus, it is widely used as a transparent electrode for the fabrication of liquid crystal displays (LCDs) and organic light emitting diode displays (OLRDs), photovoltaic devices, and other optical applications. Lasers have been used for removing coating on polymer substrate for flexible display and electronic industry. In selective removal of ITO layer, laser wavelength, pulse energy, scan speed, and the repetition rate of pulses determine conditions, which are efficient for removal of ITO coating without affecting properties of the polymer substrate. ITO coating removal with a laser is more environmentally friendly than other conventional etching methods. In this paper, pattering of ITO film from polymer substrates is described. The Yb:KGW femtosecond laser processing system with a pulse duration of 250fs, a wavelength of 1030nm and a repetition rate of 100kHz was used for removing ITO coating in air. We can remove the ITO coating using a scanner system with various pulse energies and scan speeds. We observed that the amount of debris is minimal through an optical and a confocal microscope, and femtosecond laser pulses with 1030nm wavelength are effective to remove ITO coating without the polymer substrate ablation.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2011년도 제36회 춘계학술대회논문집
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• pp.425-429
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• 2011

높은 레이저 복사 조도에 발생되는 금속 플라즈마의 발달 과정과 레이저 펄스 이후의 shadowgraph를 이용해 공기 중에서의 데토네이션과 연소 현상에 대해 연구되었다. 본 논문의 가장 중요한 점은 높은 레이저 에너지에 의해 삭마 된 알루미늄 플라즈마와 공기로부터의 산소와의 화학반응의 진행을 XRD를 통해 관측한 것이다. 또한 레이저를 통해 유도된 화학적 반응 파와 공기 중에서의 알루미늄 분진 폭발의 데토네이션과의 양적인 평가를 유도하였다. 이러한 연구는 덩어리 상태의 금속 샘플에서 산화제를 필요로 하지 않고 데토네이션을 발생시키는 새로운 방법을 제시할 것으로 여겨진다.

• 한국레이저가공학회지
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• 제12권3호
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• pp.1-6
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• 2009

This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of $FeCl_3$, $HNO_3$ in water as etchant. This method makes it possible to fabricate metallic roller mold because the microstructures are directly fabricated on the metal surface. In the range of operating conditions studied, $17\;{\mu}J$ laser pulse energy and 50 ms laser exposure time, an etchant containing 40wt% $FeCl_3$, 5wt% $HNO_3$ and etch time for 45 s gave the $10\;{\mu}m$ of micro dot pattern on plastic mold steel.

• 방사성폐기물학회지
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• 제8권3호
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• pp.181-188
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• 2010

레이저 용발법에 의한 금속 표면 제염특성을 평가하였다. 레이저로는 파장 532 nm, 펄스에너지 150 mJ, 펄스폭 5 ns의 큐스위치 Nd:YAG를 적용하였고, 금속 표면에 $CsNO_3$, $Co(NH_4)_2(SO_4)_2$, $Eu_2O_3$ 그리고 $CeO_2$를 오염시켜 이들의 제염 특성을 평가하였다. 제염 변수로는 레이저 적용횟수, 레이저 에너지 밀도 및 레이저 조사 각도 특성을 평가하였으며 각각 8, 13.3 J/$cm^2$ 및 $30^{\circ}$의 최적 조건을 확인하였다. 제염 효율은 오염성분의 비점과 관련이 있었으며 $CsNO_3>Co(NH_4)_2(SO_4)_2>Eu_2O_3>CeO_2$ 순이었다. 또한 여러 에너지 밀도 조건에서 스테인레스 스틸 재질의 식각 깊이 제어 특성을 규명하였다.

• 한국진공학회지
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• 제5권1호
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• pp.1-5
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• 1996

Noncrystalline films of diamond-like carbon (DLC) have been prepared by laser ablation technique at room temperature. A Q-switched Nd-YAG laser beam with wavelength of 1064 nm and pulse duration of 10 ns was focused onto a graphite target with power densities of about $10^9 W/\textrm{cm}^2$. The physical properties of the resulting films were analyzed with density, hardness, and resistivity measurements. The surface and bonding structure were investigated by atomic force microscopy (AFM), Raman spectroscopy, electron energy loss spectroscopy (EELS).

• 한국정밀공학회지
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• 제22권7호
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• pp.54-61
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• 2005

A simulator for virtual laser machining is developed to help understanding and predicting the effects of machining parameters on the final machined results. Main program is based on the model for polymer ablation with short pulse excimer lasers. Version f of the simulator is built using Visual Fortran to make the user work under visual environment such as Windows on PC, where the important machining parameters can be input via dialog box and the calculated results for machined shape, beam fluence, and temperature distribution can be plotted through the 2-D graphics windows. Version II of the simulator is built using HTML, CGI and JAVA languages, allowing the user to control the input parameters and to see the results plot through the internet.

• 한국레이저가공학회지
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• 제14권2호
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• 대한기계학회논문집B
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• 제36권2호
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• pp.197-204
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• 2012

본 논문에서는 공기 중에서 높은 레이저 복사 조도에 따른 효과에 의해 발생되는 금속 플라즈마의 발달 과정에 대하여 레이저 펄스가 끝나는 이후로 쉐도우그래프(Shadowgraph) 가시화 방법을 이용하여 현상을 연구하였다. 따라서 레이저에 의한 데토네이션의 발생과 이를 일으키는 연소 과정 대한 연구가 진행되었다. 본 논문의 가장 중요한 점들은 높은 레이저 에너지에 의해 삭마 된 기체 상태의 알루미늄과 공기로부터의 산소와의 화학 반응의 진행을 관측했을 뿐만 아니라, 화학 반응 최종 산화물을 X선 회절 분석법(X-Ray Diffraction)을 통해 관측한 것이다. 그리고 레이저를 통해 유도된 화학적 반응 파와 공기 중에서의 알루미늄 분진 폭발의 데토네이션과의 양적인 평가를 유도하였다. 이러한 연구는 덩어리 상태의 금속 샘플에서 공기 중의 산소를 이용하여 데토네이션을 발생시키는 새로운 방법을 제시할 것으로 여겨진다.

• 한국광학회:학술대회논문집
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• 한국광학회 2008년도 하계학술발표회 논문집
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• pp.359-360
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• 2008