Laser Solutions (한국레이저가공학회지)
- Volume 12 Issue 3
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- Pages.1-6
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- 2009
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- 1229-0963(pISSN)
Micromachining for plastic mold steel using DPSS UV laser and wet etching
DPSS UV Laser와 습식 식각을 이용한 금형강 미세 가공
- Min, Kyoung-Ik (Korea Institute of Machinery and Materials) ;
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Kim, Jae-Gu
(Korea Institute of Machinery and Materials) ;
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Cho, Sung-Hak
(Korea Institute of Machinery and Materials) ;
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Choi, Doo-Sun
(Korea Institute of Machinery and Materials) ;
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Whang, Kyung-Hyun
(Korea Institute of Machinery and Materials)
- Published : 2009.09.30
Abstract
This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of