• Title/Summary/Keyword: Process Chamber

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Respiration Rate Measurement based on Motion Compensation using Infrared Camera (열화상 카메라를 이용한 움직임 보정 기반 호흡 수 계산)

  • Kwon, Jun Hwan;Shin, Cheung Soo;Kim, Jeongmin;Oh, Kyeong Taek;Yoo, Sun Kook
    • Journal of Korea Multimedia Society
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    • v.21 no.9
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    • pp.1076-1089
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    • 2018
  • Respiration is the process of moving air into and out of the lung. Respiration changes the temperature in the chamber while exchanging energy. Especially the temperature of the face. Respiration monitoring using an infrared camera measures the temperature change caused by breathing. The conventional method assumes that motion is not considered and measures respiration. These assumptions can not accurately measure the respiration rate when breathing moves. In addition, the respiration rate measurement is performed by counting the number of peaks of the breathing waveform by displaying the position of the peak in a specific window, and there is a disadvantage that the breathing rate can not be measured accurately. In this paper, we use KLT tracking and block matching to calibrate limited weak movements during breathing and extract respiration waveform. In order to increase the accuracy of the respiration rate, the position of the peak used in the breath calculation is calculated by converting from a single point to a high resolution. Through this process, the respiration signal could be extracted even in weak motion, and the respiration rate could be measured robustly even in various time windows.

Optimization of Amorphous Indium Gallium Zinc Oxide Thin Film for Transparent Thin Film Transistor Applications

  • Shin, Han Jae;Lee, Dong Ic;Yeom, Se-Hyuk;Seo, Chang Tae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.352.1-352.1
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    • 2014
  • Indium Tin Oxide (ITO) films are the most extensively studied and commonly used as ones of TCO films. The ITO films having a high electric conductivity and high transparency are easily fabricated on glass substrate at a substrate temperature over $250^{\circ}C$. However, glass substrates are somewhat heavy and brittle, whereas plastic substrates are lightweight, unbreakable, and so on. For these reasons, it has been recently suggested to use plastic substrates for flexible display application instead of glass. Many reaearchers have tried to produce high quality thin films at rood temperatures by using several methods. Therefore, amorphous ITO films excluding thermal process exhibit a decrease in electrical conductivity and optical transparency with time and a very poor chemical stability. However the amorphous Indium Gallium Zinc Oxide (IGZO) offers several advantages. For typical instance, unlike either crystalline or amorphous ITO, same and higher than a-IGZO resistivity is found when no reactive oxygen is added to the sputter chamber, this greatly simplifies the deposition. We reported on the characteristics of a-IGZO thin films were fabricated by RF-magnetron sputtering method on the PEN substrate at room temperature using 3inch sputtering targets different rate of Zn. The homogeneous and stable targets were prepared by calcine and sintering process. Furthermore, two types of IGZO TFT design, a- IGZO source/drain material in TFT and the other a- ITO source/drain material, have been fabricated for comparison with each other. The experimental results reveal that the a- IGZO source/drain electrode in IGZO TFT is shown to be superior TFT performances, compared with a- ITO source/drain electrode in IGZO TFT.

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Parameters Effect on Fabrication of Nuclear Fuel by Plasma Deposition (플라즈마 침적에 의한 핵열료 제조에 미치는 변수들의 영향)

  • Jeong, In-Ha;Bae, Gi-Gwang
    • Korean Journal of Materials Research
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    • v.8 no.9
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    • pp.783-790
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    • 1998
  • New process development of nuclear fuel fabrication for nuclear power plant was attempted by induction plasma technology with yttria-stabilized-zirconia ($\textrm{ZrO}_{2}$-$\textrm{Y}_{2}\textrm{O}_{3}$)powder, similar to $\textrm{UO}_{2}$, in the respect of melting point and physicochemical characteristics. Extent of powder melting was affected greatly by plasma plate power and particle size. Being optimized such as, sheath gas composition, probe position, particle size and spraying distance, dense deposit of 97.91% T.D. with deposition rate 20mm/min was attained at the condition of 120/20$\ell$/min of Ar/$\textrm{H}_{2}$ flow rate, 80kw of plate power, 8cm of probe position, 200Torr of chamber pressure and 18cm of spraying distance. The pellet of 96.5% of theoretical density was formed with homogeneity and nice exterior view at the best condition of deposition experiments, and the possibility of new nuclear pellet fabrication process was confirmed. The main and interrelated effects on deposit density were assessed by ANOVA(Ana1ysis of Variance).

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Dry Etching of GaAs and AlGaAs Semiconductor Materials in High Density BCl3and BCl3/Ar Inductively Coupled Plasmas (BCl3및 BCl3/Ar 고밀도 유도결합 플라즈마를 이용한 GaAs와 AlGaS 반도체 소자의 건식식각)

  • Lim, Wan-tae;Baek, In-kyoo;Lee, Je-won;Cho, Guan-Sik;Jeon, Min-hyun
    • Korean Journal of Materials Research
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    • v.13 no.10
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    • pp.635-639
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    • 2003
  • We investigated dry etching of GaAs and AiGaAs in a high density planar inductively coupled plasma system with BCl$_3$and BCl$_3$/Ar gas chemistry. A detailed etch process study of GaAs and ALGaAs was peformed as functions of ICP source power, RIE chuck power and mixing ratio of $BCl_3$ and Ar. Chamber process pressure was fixed at 7.5 mTorr in this study. The ICP source power and RIE chuck power were varied from 0 to 500 W and from 0 to 150 W, respectively. GaAs etch rate increased with the increase of ICP source power and RIE chuck power. It was also found that etch rates of GaAs in $15BCi_3$/5Ar plasmas were relatively high with applied RIE chuck power compared to pure 20 sccm $BCl_3$plasmas. The result was the same as AlGaAs. We expect that high ion-assisted effect in $BCl_3$/Ar plasma increased etch rates of both materials. The GaAs and AlGaAs features etched at 20 sccm $BCl_3$and $15BCl_3$/5Ar with 300 W ICP source power, 100 W RIE chuck power and 7.5 mTorr showed very smooth surfaces(RMS roughness < 2 nm) and excellent sidewall. XPS study on the surfaces of processed GaAs also proved extremely clean surfaces of the materials after dry etching.

Study of Seal-off Triggered Vacuum Switch(TVS) for High Voltage and High Current (고전압 대전류용, Seal-off TVS(Triggered Vacuum Switch) 연구)

  • Park, S.S.;Han, Y.J.;Kim, S.H.;Kwon, Y.K.;Kim, S.H.;Park, Y.J.;Hong, M.S.;Nam, S.H.
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1823-1826
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    • 2002
  • The purpose of this experiment was to develope Triggered Vacuum Switch (TVS) for the high voltage and high current. The TVS has an array of rods of alternate polarity in which a fixed gap spacing is maintained between the rods. The cross section of each rod has trapezoidal shape. It consists of electrode, ceramic chamber, getter and trigger. Currently, triggered vacuum switch (TVS) with seal-off has been designed and fabricated at PAL. An experimentation and trigger devices for TVS were designed for testing characteristics of electricity. For making the prototype of TVS, it is developed of fabrication process and fined of electrode material. The fabrication of the TVS is a lot of process which have manufacturing of part, chemical clean, ceramic brazing and metal welding. The fabricated TVS is tested of leak for vacuum, hold-off voltage and conditioning of trigger system. The TVS has pinch-off after it is removed of gas in the TVS and activated of getter in degassing furnace. The prototype TVS tested about 20 kV, 75 kA, 83 ${\mu}s$ with 100 kJ capacitor bank and inductance 5 ${\mu}H$. This paper describes the results of tests and the characteristics of the switch.

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A novel method for manufacturing macroscale patterns to enhance electrical efficiency by Triboelectric generator (마찰전기 발전기의 전기 효율을 향상하기 위한 macroscale 패턴 제조 방식 연구)

  • Yang, Jun-Ho;Lee, Jaeyoung
    • Journal of Energy Engineering
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    • v.29 no.1
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    • pp.75-84
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    • 2020
  • This study investigates a simple, yet effective and affordable, manufacturing method to increase the electrical efficiency by triboelectric generator (TEG) applying 3D printers. In this study, we propose the newly manufacturing method for producing a macroscale surface patterning. Overall experiments were conducted in designed test-bed chamber system which can control the magnitude and frequency of the frictional force and the relative humidity. Furthermore, we can demonstrate the voltage enhancement of macroscale surface patterns about 1.6-fold. The peak voltage producing by TEG was as high as 18 V. In comparison with conventional process that employ micro- and nanoscale patterns, the proposed process by 3D printer is faster and more suitable for mass production.

Chemical Vapor Deposition of Tantalum Carbide from TaCl5-C3H6-Ar-H2 System

  • Kim, Daejong;Jeong, Sang Min;Yoon, Soon Gil;Woo, Chang Hyun;Kim, Joung Il;Lee, Hyun-Geun;Park, Ji Yeon;Kim, Weon-Ju
    • Journal of the Korean Ceramic Society
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    • v.53 no.6
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    • pp.597-603
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    • 2016
  • Tantalum carbide, which is one of the ultra-high temperature ceramics, was deposited on graphite by low pressure chemical vapor deposition from a $TaCl_5-C_3H_6-Ar-H_2$ mixture. To maintain a constant $TaCl_5/C_3H_6$ ratio during the deposition process, $TaCl_5$ powders were continuously fed into the sublimation chamber using a screw-driven feeder. Sublimation behavior of $TaCl_5$ powder was measured by thermogravimetric analysis. TaC coatings have various phases such as $Ta+{\alpha}-Ta_2C$, ${\alpha}-Ta_2C+TaC_{1-x}$, and $TaC_{1-x}$ depending on the powder feeding methods, the $C_3H_6/TaCl_5$ ratio, and the deposition temperatures. Near-stoichiometric TaC was obtained by optimizing the deposition parameters. Phase compositions were analyzed by XRD, XPS, and Raman analysis.

The Detection Characterization of NOX Gas Using the MWCNT/ZnO Composite Film Gas Sensors by Heat Treatment (열처리에 따른 MWCNT/ZnO 복합체 필름 가스센서의 NOX 가스 검출 특성)

  • Kim, Hyun-Soo;Jang, Kyung-Uk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.7
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    • pp.521-526
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    • 2018
  • In particular, gas sensors require characteristics such as high speed, sensitivity, and selectivity. In this study, we fabricated a $NO_X$ gas sensor by using a multi-walled carbon nanotube (MWCNT)/zinc oxide (ZnO) composite film. The fabricated MWCNT/ZnO gas sensor was then treated by a $450^{\circ}C$ temperature process to increase its detection sensitivity for NOx gas. We compared the detection characteristics of a ZnO film gas sensor, MWCNT film gas sensor, and the MWCNT/ZnO composited film gas sensor with and without the heat-treatment process. The fabricated gas sensors were used to detect $NO_X$ gas at different concentrations. The gas sensor absorbed $NO_X$ gas molecules, exhibiting increased sensitivity. The sensitivity of the gas sensor was increased by increasing the gas concentration. Additionally, while changing the temperature inside the chamber for the MWCNT/ZnO composite film gas sensor, we obtained its sensitivity for detecting $NO_X$ gas. Compared with ZnO, the MWCNT film gas sensor is excellent for detecting $NO_X$ gas. From the experimental results, we confirmed the enhanced gas sensor sensing mechanism. The increased effect by electronic interaction between the MWCNT and ZnO films contributes to the improved sensor performance.

Study of Using Carbon Dioxide for Obtaining Potassium Chloride from Cement By-Pass Dust (시멘트 바이패스 더스트 내 염화칼륨 수득을 위한 이산화탄소 적용 연구)

  • Kim, Kyoungseok;Chu, Yongsik
    • Resources Recycling
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    • v.26 no.6
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    • pp.38-44
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    • 2017
  • As by-pass dust (BPD) made from cement manufactured process is designated waste, it is required to bury as high cost. The main component of BPD is potassium chloride (KCl), and used for the fertilizer. For using KCl to the fertilizer, the pH value of KCl is required as neutral or weak acid. However, it is not suitable to apply BPD into the fertilizer directly without any other treatment because BPD's pH value is shown 12.0~12.5; a high base. In this study, the carbon dioxide ($CO_2$) was used for removing calcium oxide (CaO) and reducing pH value during manufacturing process of KCl. We fixed inner condition of the carbon test chamber as $25^{\circ}C$-50RH%, and retained 0~7 hours under the 20 vol% of $CO_2$ atmosphere. After experiment, we analyzed the content of CaO and pH value from each samples. The more time exposed to $CO_2$, the content of CaO and pH value are shown. Furthermore, pH value exposed in 6 hours nearly reached 7.

Vacuum Sealing Technology of the Flat Panel Display by using the Frit Glass Heatable in Vacuum (진공에서 소성 가능한 프릿을 이용한 평판디스플레이 진공실장기술)

  • Kwon, Sang Jik;Yoo, In Sang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.3
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    • pp.181-185
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    • 2016
  • One of the important issues for fabricating the microelectronic display devices such as FED, PDP, and VFD is to obtain a high vacuum level inside the panel. In addition, sustaining the initial high vacuum level permanently is also very important. In the conventional packing technology using a tabulation method, it is not possible to obtain a satisfiable vacuum level for a proper operation. In case of FED, the poor vacuum level results in the increase of operating voltage for electron emission from field emitter tips and an arcing problem, resultantly shortening a life time. Furthermore, the reduction of a sealing process time in the PDP production is very important in respect of commercial product. The most probable method for obtaining the initial high vacuum level inside the space with such a miniature and complex geometry is a vacuum in-line sealing which seals two glass plates within a high vacuum chamber. The critical solution for the vacuum sealing is to develop a frit glass to avoid the bubbling or crack problems during the sealing process at high temperature of about $400^{\circ}C$ under the vacuum environment. In this study, the suitable frit power was developed using a mixture of vitreous and crystalline type frit powders, and a vacuum sealed CNT FED with 2 inch diagonal size was fabricated and successfully operated.