Chemical Vapor Deposition of Tantalum Carbide from TaCl5-C3H6-Ar-H2 System |
Kim, Daejong
(Nuclear Materials Development Division, Korea Atomic Energy Research Institute)
Jeong, Sang Min (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) Yoon, Soon Gil (Department of Materials Engineering, Chungnam National University) Woo, Chang Hyun (Research and Development Division, Tokai Carbon Korea) Kim, Joung Il (Research and Development Division, Tokai Carbon Korea) Lee, Hyun-Geun (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) Park, Ji Yeon (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) Kim, Weon-Ju (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) |
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