• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• 한국전자파학회논문지
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• 제21권7호
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• pp.831-841
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• 2010

일반적으로 수직형 프로브는 가늘고 긴 S-자형 구조가 중복되기 때문에 신호 전달 특성이 저하되므로 이것에 대한 개선이 필요하다. 본 논문에서 제안된 프로브는 캔틸리버형보다 적은 면적을 차지하는 수직형으로 동시에 많은 메모리를 테스트하기에 적합하며, 특히 외부 압력이 가해졌을 때 분기된 스프링에 의해 폐 루프(closed loop)가 형성되어 기존의 S-자형 수직형 프로브보다 기계적 특성뿐만 아니라 전기적 신호 전달 특성이 개선된 새로운 형태의 수직형 프로브를 제안하였다. 제안된 프로브를 제작하여 측정 및 시뮬레이션을 통해 기존의 S-자형 수직형 프로브보다 오버드라이브(overdrive)는 1.2배, 컨택 포스(contact force)는 2.5배, 신호 전달특성은 $0{\sim}10$ GHz에서 최대 1.4 dB 개선되는 것을 확인하였다. 또한 프로브 카드(probe card)의 신호 전달 특성을 예측할 수 있는 시뮬레이션 모델을 개발하였다. 이를 위하여 프로브 카드를 구성하는 각 부품의 기하학적 특성에 맞도록 2.5D 또는 3D Full-wave 시뮬레이터를 사용하였으며, 계산된 결과는 측정 결과와 매우 잘 일치 하였다.

• 한국기계가공학회지
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• 제2권1호
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• pp.75-84
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• 2003

In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.83-86
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• 2004

Carbon nanotube (CNT) tips in tapping mode atomic force microscopy (AFM) enable very high-resolution imaging, measurements, and manipulation at the nanoscale. We present recent results based on experimental analysis that yield new insights into the dynamics of CNT probe tips in tapping mode AFM. Experimental measurements are presented of the frequency response and dynamic amplitude-distance data of a high-aspect-ratio multi-walled (MW) CNT tip to demonstrate the non-linear features including tip amplitude saturation preceding the dynamic buckling of the MWCNT. Surface scanning is performed using a MWCNT tip on a SiO$_2$ grating to verify the imaging instabilities associated with MWCNT buckling when used with normal control schemes in the tapping mode. Lastly, the choice of optimal setpoints for tapping mode control using CNT probe tip are discussed using the experimental results.

• Journal of Biosystems Engineering
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• 제34권5호
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• pp.382-389
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• 2009

An in-situ probe-based spectrophotometer has been developed. This system used two spectrometers to measure soil reflectance spectra from 450 nm to 2200 nm. It collects soil electrical conductivity (EC) and insertion force measurements in addition to the optical data. Six fields in Kansas were mapped with the VIS-NIR (visible-near infrared) probe module and sampled for calibration and validation. Results showed that VIS-NIR correlated well with carbon in all six fields, with RPD (the ratio of standard deviation to root mean square error of prediction) of 1.8 or better, RMSE of 0.14 to 0.22%, and $R^2$ of 0.69 to 0.89. From the investigation of carbon variability within the soil profile and by tillage practice, the 0-5 cm depth in a no-till field contained significantly higher levels of carbon than any other locations. Using the selected calibration model with the soil NIR probe data, a soil profile map of estimated carbon was produced, and it was found that estimated carbon values are highly correlated to the lab values. The array of sensors (VIS-NIR, electrical conductivity, insertion force) used in the probe allowed estimating bulk density, and three of the six fields were satisfactory. The VIS-NIR probe also showed the obtained spectra data were well correlated with nitrogen for all fields with RPD scores of 1.84 or better and coefficient of determination ($R^2$) of 0.7 or higher.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.665-666
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.405-406
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• 2010

• 한국소음진동공학회논문집
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• 제14권6호
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• pp.495-502
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• 2004

This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• Tribology and Lubricants
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• 제29권4호
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• pp.213-217
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• 2013

As commercial atomic force microscopy (AFM) probes made of Si and $Si_3N_4$ have low stiffness, it is difficult to induce sufficient elastic deformation on the surface of a specimen in a tapping mode. Therefore, high-guality phase contrast images can not obtained. On the other hand, a tungsten AFM probe has relatively higher stiffness than a commercial AFM probe. Accordingly, it is expected to provide an enhanced phase contrast image, which is an effective tool for achieving a better understanding of the micromechanical properties of worn surfaces and wear mechanisms. In this study, on electrochemical etching method was optimized to fabricate tungsten probe tips for an AFM. Electrochemical etching was performed by applying pulse waves with a 20% duty cycle at various voltages instead of only a DC voltage, which has been commonly used.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.263-268
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• 2003

This paper presents a result of performance evaluation fur non-contact scanning probe microscopy with respect to the vibration characteristics of cantilevers with tips. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made fur the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.