A High-speed Atomic Force Microscope for Precision Measurement of Microstructured Surfaces
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Cui, Yuguo
(Nano-Metrology and Control Laboratory, Research Center for Precision Nanosystems Department of Nanomechanics, Toboku University)
Arai, Yoshikazu (Nano-Metrology and Control Laboratory, Research Center for Precision Nanosystems Department of Nanomechanics, Toboku University) Asai, Takemi (Nano-Metrology and Control Laboratory, Research Center for Precision Nanosystems Department of Nanomechanics, Toboku University) Ju, BinFeng (Nano-Metrology and Control Laboratory, Research Center for Precision Nanosystems Department of Nanomechanics, Toboku University) Gao, Wei (Nano-Metrology and Control Laboratory, Research Center for Precision Nanosystems Department of Nanomechanics, Toboku University) |
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