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http://dx.doi.org/10.9725/kstle-2013.29.4.213

Fabrication of Tungsten Probe Tips for AFM using Electrochemical Etching  

Han, Gue-Bum (Dept. of Manufacturing System and Design Engineering, Seoul National University of Science & Technology)
Jang, Hyuna (Dept. of Manufacturing System and Design Engineering, Seoul National University of Science & Technology)
Ahn, Hyo-Sok (Dept. of Manufacturing System and Design Engineering, Seoul National University of Science & Technology)
Publication Information
Tribology and Lubricants / v.29, no.4, 2013 , pp. 213-217 More about this Journal
Abstract
As commercial atomic force microscopy (AFM) probes made of Si and $Si_3N_4$ have low stiffness, it is difficult to induce sufficient elastic deformation on the surface of a specimen in a tapping mode. Therefore, high-guality phase contrast images can not obtained. On the other hand, a tungsten AFM probe has relatively higher stiffness than a commercial AFM probe. Accordingly, it is expected to provide an enhanced phase contrast image, which is an effective tool for achieving a better understanding of the micromechanical properties of worn surfaces and wear mechanisms. In this study, on electrochemical etching method was optimized to fabricate tungsten probe tips for an AFM. Electrochemical etching was performed by applying pulse waves with a 20% duty cycle at various voltages instead of only a DC voltage, which has been commonly used.
Keywords
pulse width modulation; atomic force microscopy; duty cycle; electrochemical etching; tungsten wire;
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