• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• Journal of Korean Society of Transportation
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• v.26 no.4
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• pp.123-133
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• 2008

Information collection systems and applications in a ubiquitous environment has emerged as a leading issue in transportation and logistics. A productive application example is a traffic information collection system based on probe vehicles and wireless communication technology. Estimation of hourly OD pairs using probe OD data is a possible target. Since probe OD data consists of sample OD pairs, which vary over time and space, computation of sample rates of OD pairs and expansion of sample OD pairs into static OD pairs is required. In this paper, the authors proposed a method to estimate sample OD data with probe data in Jeju City and expand those into static OD data. Mean absolute percentage difference (MAPD) error between observed traffic volume and assigned traffic volume was about 22.9%. After removing abnormal data, MAPD error improved to 17.6%. Development of static OD estimation methods using probe vehicle data in a real environment is considered the main contribution of this paper.

• Journal of Biosystems Engineering
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• v.22 no.1
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• pp.59-67
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• 1997

An experimental apparatus was developed for the rapid determination of thermal conductivity by transient probe method. The theoretical basis for transient probe method has been investigated. The mathematical model for this method is the Carslaw and Jaeger model which is used perfect line source theory. The small needle probe which is equipped with thermocouple and heating element is constructed. A software that performs data analysis and acquisition is programmed. The influence of the power dissipated per unit length of the probe has been assessed for glycerin. The result showed no significant correlation between thermal conductivity and power input. Determination made with this experimental apparatus were found to agree well with the recommended thermal conductivity data.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• Corrosion Science and Technology
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• v.2 no.2
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• pp.98-101
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• 2003

The Electrical Resistance Probe of carbon steel and weight loss coupons were exposed in atmosphere and in the lake water of Hanoi. The comparison of data received by two methods after one year exposure was presented. The correspondence of the data of these methods on the exposure time in both environments showed a capacity of using Electrical Resistance Probe in Vietnamese natural corrosion testing of Carbon steel.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.552-555
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• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.31 no.1D
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• pp.43-50
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• 2011

The monitoring system for link travel speed using taxi probe is one of key sub-systems of ITS. Link travel speed collected by taxi probe has been widely employed for both monitoring the traffic states of urban road network and providing real-time travel time information. When sample size of taxi probe is small and link travel time is longer than a length of time interval to collect travel speed data, and in turn the missing state is inevitable. Under this missing state, link travel speed data is real-timely not collected. This missing state changes from single to multiple time intervals. Existing single interval prediction techniques can not generate multiple future states. For this reason, it is necessary to replace multiple missing states with the estimations generated by multi-interval prediction method. In this study, a multi-interval prediction method to generate the speed estimations of single and multiple future time step is introduced overcoming the shortcomings of short-term techniques. The model is developed based on Non-Parametric Regression (NPR), and outperformed single-interval prediction methods in terms of prediction accuracy in spite of multi-interval prediction scheme.

• Transactions of the Society of Information Storage Systems
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• v.1 no.1
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• Genomics & Informatics
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• v.9 no.1
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• pp.28-36
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• 2011

Most statistical methods for finding interesting genes are focusing on the summary values with large fold-changes or large variations. Very few methods consider the probe level data. We developed a new measure to detect reliability that incorporates the probe level data. This reliability measure is useful for exploring the microarray data without ignoring the probe level data. It is easy to calculate, and it can be used for all the other statistical methods as a good guideline to find real differentially expressed genes. Instead of filtering out genes before the analysis, we use whole genes in the analysis and make decisions with new reliability measures.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.03a
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• pp.119-126
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• 2008

Ground stiffness(shear wave velocity) is one of the key parameters in geotechnical earthquake engineering. An In-situ seismic technique has its own advantages and disadvantages over the others in stiffness measurements. By combining the crosshole and seismic cone techniques and utilizing favourable features of bender elements, a new hybrid probe has been developed in order to enhance data quality and easiness of testing. The basic structure of the probe, called "MudFork", is a fork composed of two blades, on each of which source and receiver bender elements were mounted respectively. To evaluate the disturbance caused by the penetration of the probe, shear wave velocity measurements were carried out in the Kaolinite slurry in the laboratory. Finally, the probe was penetrated in coastal mud near Incheon, Korea, using SPT(standard penetration test)rods pushed with a routine boring machine and shear wave velocity measurements were carried out. The results were verified with data from laboratory and cone testing. The performance of the probe turns out to be excellent in terms of data quality and testing convenience.