• KIEE International Transactions on Electrophysics and Applications
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• 제4C권4호
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• pp.149-154
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• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• International Journal of Aeronautical and Space Sciences
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• 제14권1호
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• pp.99-104
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• 2013

Configuration design, analysis, and wind tunnel test of a vane-type multi-function air data probe (MFP) was described. First, numerical analysis was conducted for the initial configuration of the MFP in order to investigate aerodynamic characteristics. Then, the design was modified to improve static and dynamic stability for better response characteristics. The modified configuration design was verified through wind tunnel tests. The test results are also used to verify the accuracy of the analytical method. The analytically estimated aerodynamic damping provided by the Navier-Stokes equation solver correlated well with the wind tunnel test results. According to the calculation, the damping coefficient estimated from ramp motion analysis yielded a better correlation with the wind tunnel test than pitch oscillation analysis.

• 한국신뢰성학회지:신뢰성응용연구
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• 제7권1호
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• pp.23-29
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• 2007

Probe card is a test component which is to classify the known good die with electrical contact before the packaging in the ATE (automatic testing equipment). Conventional probe tip was mostly needle type, it has been difficult to meet with conventional type, because of decreasing chip size, pad to pad pitch and pads size increasingly. For that reason, probe cards using MEMS (micro electro mechanical system) technology have been developed for various semiconductor chips. In this paper, Area Array type MEMS Probe tip was designed,, fabricated, and characterized its mechanical and electrical properties. The authors found that good electrical characteristics under $1{\Omega}$ were acquired with gold (Au) and aluminium (Al) pad contact test over 0.5gf and 4gf respectively. And, contact resistance variation under $0.1{\Omega}$ were achieved with 100,000 times of repetition test. And, insertion loss (IS) for high frequency operation was ascertained over 300MHz at -3dB loss.

• 한국정밀공학회지
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• 제20권8호
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• pp.101-107
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• 2003

A new mechanical probe for 3-D feature measurement on coordinate measuring machines (CMMs) is presented. The probe is composed of the contact stylus and the three-component force sensor. With the stylus mounted on the force sensor, the probe can not only measure 3-D features, but also detect contact force acting on the stylus tip. Furthermore, the probing direction and the actual contact position can be determined by the relationship among three components of contact force to be detected. In this paper, transformation matrix representing the relationship between the external force acting on the stylus tip and the output voltages of measurement gauges is derived and calibrated. The prototype of probe is developed and its availability is investigated through the experimental setup for calibration test of the probe. A series of experimental results show that the proposed probe can be an effective means of improving the accuracy of touch probing on CMM.

• 한국재료학회지
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• 제22권10호
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• pp.545-551
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• 2012

In semiconductor manufacturing, the circuit integrity of packaged BGA devices is tested by measuring electrical resistance using test sockets. Test sockets have been reported to often fail earlier than the expected life-time due to high contact resistance. This has been attributed to the formation of Sn oxide films on the Au coating layer of the probe pins loaded on the socket. Similar to contact failure, and known as "fretting", this process widely occurs between two conductive surfaces due to the continual rupture and accumulation of oxide films. However, the failure mechanism at the probe pin differs from fretting. In this study, the microstructural processes and formation mechanisms of Sn oxide films developed on the probe pin surface were investigated. Failure analysis was conducted mainly by FIB-FESEM observations, along with EDX, AES, and XRD analyses. Soft and fresh Sn was found to be transferred repeatedly from the solder bump to the Au surface of the probe pins; it was then instantly oxidized to SnO. The $SnO_2$ phase is a more stable natural oxide, but SnO has been proved to grow on Sn thin film at low temperature (< $150^{\circ}C$). Further oxidation to $SnO_2$ is thought to be limited to 30%. The SnO film grew layer by layer up to 571 nm after testing of 50,500 cycles (1 nm/100 cycle). This resulted in the increase of contact resistance and thus of signal delay between the probe pin and the solder bump.

• 한국염색가공학회지
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• 제32권4호
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• pp.185-192
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• 2020

A novel binding site for metal ion made by designing molecule with tetrazolo quinoline with hydrazine carboxamide (TQC) and the designed molecule successfully synthesized. The probe works by selectively detecting Al3+ ion via both fluorimetric and colorimetric approach. The probe's effectiveness towards aluminium ion detection is highly sensitive and selective with no substantial interference with other competing ions. The added Al3+ ion to TQC fetched a rapid change of visual color to yellow from colorless, also the response of fluorescence turn-on. The fluorescence turn-on and color change visibly by the probe TQC with Al3+ ion credited to the ICT phenomenon (intramolecular charge-transfer transition). The likely interaction of the probe with aluminium ion has also been there predicted from ESI-MS spectral analysis results. The usefulness of the probe confirmed by practical utility by making a test kit to monitor Al3+ ion in water which showed a naked eye detection by notable color change.

• 한국기계가공학회지
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• 제2권1호
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• pp.75-84
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• 2003

In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

• 한국산업융합학회 논문집
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• 제2권2호
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• pp.155-163
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• 1999

In this study, single cylinder engines with different tumble ratio were made to find out in-cylinder fluid motion and flame propagation. Tumble ratio derived from the steady state flow rig test. Flame propagation speed was obtained using cylinder head gasket ionization probe and the piston ionization probe. And the combustion pressure in cylinder was measured to analyze the combustion characteristics. In case of high tumble engine, BSFC and BSHC were decreased and BSNOx was increased at part load test. Also BMEP and combustion peak pressure was increased at full load test. Tumble flow motion had an great effects on initial burning period rather than main burning period in part load test.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1278-1280
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• 1995

A probe type fiber-optic sensing techique for electric current measurement is applied in this paper. The technique is based on the Faraday effect which meaning is that polarization state of light is rotated by magnetic field. In experiment, test wire is located at inside and outside of the probe to be measured. The experimental results prove not only linear property, but also polarization rotation property according to the distance from outside of probe.

• 한국정밀공학회지
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• 제5권3호
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• pp.48-62
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• 1988

A triple hot-wire probe has an essential potentiality for the measure- ment of an instantaneous velocity vector in a three dimensional unsteady flow with large amplitude of velocity fluctuations, the key problems asso- ciated with this instrument are the directional range of applicability and the accuracy. This present paper is concerned with a new method of the techniques of calibration and data processing to estimate the three dimensional flow field using an arbitrary shaped triple hot-wire probe. The method is not based on the assumptions of orthogonality or symmetry and it is especially useful for applications to a hand-made probe where probe geometry is not accurately known. The test application is made to evaluate the effect of cone angles of symmetric non-orthogonal probe.