Journal of Applied Reliability (한국신뢰성학회지:신뢰성응용연구)

The Korean Reliability Society (한국신뢰성학회)
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Reliable design and electrical characteristics of vertical MEMS probe tip

수직형 MEMS 프로브 팁의 신뢰성 설계 및 전기적 특성평가

  • Lee, Seung-Hun (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Chu, Sung-Il (Nanobio research center, Korea Institute of Science and Technology) ;
  • Kim, Jin-Hyuk (Nanobio research center, Korea Institute of Science and Technology) ;
  • Han, Dong-Chul (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Moon, Sung (Nanobio research center, Korea Institute of Science and Technology)
  • 이승훈 (서울대학교 기계항공공학부) ;
  • 추성일 (한국과학기술연구원 나노바이오연구센터) ;
  • 김진혁 (한국과학기술연구원 나노바이오연구센터) ;
  • 한동철 (서울대학교 기계항공공학부) ;
  • 문성욱 (한국과학기술연구원 나노바이오연구센터)
  • Published : 2007.03.31
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Abstract

Probe card is a test component which is to classify the known good die with electrical contact before the packaging in the ATE (automatic testing equipment). Conventional probe tip was mostly needle type, it has been difficult to meet with conventional type, because of decreasing chip size, pad to pad pitch and pads size increasingly. For that reason, probe cards using MEMS (micro electro mechanical system) technology have been developed for various semiconductor chips. In this paper, Area Array type MEMS Probe tip was designed,, fabricated, and characterized its mechanical and electrical properties. The authors found that good electrical characteristics under $1{\Omega}$ were acquired with gold (Au) and aluminium (Al) pad contact test over 0.5gf and 4gf respectively. And, contact resistance variation under $0.1{\Omega}$ were achieved with 100,000 times of repetition test. And, insertion loss (IS) for high frequency operation was ascertained over 300MHz at -3dB loss.

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