• 반도체디스플레이기술학회지
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• 제16권4호
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• pp.63-67
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• 2017

In this study, We developed a simple and low cost capacitive pressure mapping sensor and microcontroller-base lock-in amplifier array. We developed capacitive type pressure mapping sensor by forming the electrode and adhesives on plastic films using only the printing process, and the finishing the process by bonding the two films. Lock-in amplifier array was based on a general purpose microcontroller and had only a charge amplifier as analog circuits. In this study, a $10{\times}10$ capacitive type pressure mapping sensor and lock-in amplifier array was fabricated and its characteristics were analyzed.

• 한국의류학회지
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• 제46권5호
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• pp.723-740
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• 2022

This study aimed to develop an Arduino-based garment pressure device (APD) on the basis of using Single-Tact sensor by suggesting the reliable clothing pressure range and coefficient of selected sensors through the APD calibration process. Once the APD was validated, the pressure of the experimental men's lower body compression wears was measured using the APD and was compared to the pressure measured using the existing air-pack type pressure meter. The subjects were one mannequin and eight men in their 20's, and the trial compression wears were calf sleeves and pants. Clothing pressures were measured in hip, mid-thigh, calf, and ankle. In terms of the 99% confidence level, the experimental clothing pressure measured at the designated measuring points using the APD was considered identical to the one measured using an existing clothing pressure meter. Therefore, on the basis of the experiment results, this study demonstrated that the APD is as reliable as the existing clothing pressure meter within the pressure ranges of 0.54-16.79 kPa and 0.18-25.47 kPa as provided by the SingleTact sensor supplier's data on the basis of using an external ADC (Analog to Digital Converter) module.

• ETRI Journal
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• 제38권4호
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• Smart Structures and Systems
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• 제9권6호
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• pp.535-547
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• 2012

Controlling the balance of motion in a context involving a biped robot navigating a rugged surface or a step is a difficult task. In the present study, a $3{\times}5$ flexible piezoelectric tactile sensor array is developed to provide a foot pressure map and zero moment point for a biped robot. We introduce an innovative concept involving structural electrodes on a piezoelectric film in order to improve the sensitivity. The tactile sensor consists of a polymer piezoelectric film, PVDF, between two patterned flexible print circuit substrates (FPC). Additionally, a silicon rubber bump-like structure is attached to the FPC and covered by a polydimethylsiloxane (PDMS) layer. Experimental results show that the output signal of the sensor exhibits a linear behavior within 0.2 N ~ 9 N, while its sensitivity is approximately 42 mV/N. According to the characteristic of the tactile sensor, the readout module is designed for an in-situ display of the pressure magnitudes and distribution within $3{\times}5$ taxels. Furthermore, the trajectory of the zero moment point (ZMP) can also be calculated by this program. Consequently, our tactile sensor module can provide the pressure map and ZMP information to the in-situ feedback to control the balance of moment for a biped robot.

• 대한기계학회논문집B
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• 제27권9호
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• pp.1248-1255
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• 2003

Pressure coefficient in a rotating discharge hole was measured to gain insight into the influence of rotation on the discharge characteristics of rotating discharge holes. Pressures inside the hole were measured by a telemetry system that had been developed by the authors. The telemetry system is characterized by the diversity of applicable sensor type. In the present study, the telemetry system was modified to measure static pressure using piezoresistive pressure sensors. The pressure sensor is affected by centrifugal force and change of orientation relative to the gravity. The orientation of sensor installation for minimum rotating effect and zero gravity effect was found out from the test. Pressure coefficients in a rotating discharge hole were measured in longitudinal direction as well as circumferential direction at various rotating speeds and three different pressure ratios. From the results, the behaviors of pressure coefficient that cannot be observed by a non-rotating setup were presented. It was also shown that the discharge characteristics of rotating discharge hole is much more influenced by the Rotation number irrespective of pressure ratio.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.553-554
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• 2012

• 센서학회지
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• 제23권6호
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• pp.409-415
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• 2014

We had presented an inductive type intraocular pressure sensor (L-sensor) in previous work. The distance between a micro coil and a ferrite on the membrane was modulated by pressure, and as a result the inductance and resonant frequency were changed. However, L-sensor has some problems to implant in eyes. First problem is low sensitivity. When L-sensor was implanted in rabbit's eyes, resonant frequency of L-sensor was very hard to detect. Second problem is biocompatibility. Size of L-sensor is $6{\times}7{\times}1.2mm$. When L-sensor was implanted in the eyes, it caused the inflammation. Therefore, this study suggests an inductive and capacitive type IOP sensor (LCsensor). The sensitivity of the LC-sensor 27.3 kHz/mmHg under 60mmHg. It is much larger than 14 kHz/mmHg of the L-sensor. And the size of LC-sensor is 47% smaller than L-sensor. After 2 weeks from the implantation of LC-sensor into rabbit eyes, we measured the changes of resonant frequency of LC-sensor according to increased IOP by Balanced Salt Solution (BSS) injection. As a result, the sensitivity of LC-sensor in in vivo test is 25 kHz/mmHg. That is similar to the sensitivity of in vitro test.

• 센서학회지
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• 제27권6호
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• pp.397-402
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• 2018

Proper seat design is critical to the safety, comfort, and ergonomics of automotive driver's seats. To ensure effective seat design, quantitative methods should be used to evaluate the characteristics of automotive seats. This paper presents a system that is capable of simultaneously monitoring body pressure distribution and surface deformation in a textile material. In this study, a textile-based capacitive sensor was used to detect the body pressure distribution in an automotive seat. In addition, a strain gauge sensor was used to detect the degree of curvature deformation due to high-pressure points. The textile-based capacitive sensor was fabricated from the conductive fabric and a polyurethane insulator with a high signal-to-noise ratio. The strain gauge sensor was attached on the guiding film to maximize the effect of its deformation due to bending. Ten pressure sensors were placed symmetrically in the hip area and six strain gauge sensors were distributed on both sides of the seat cushion. A readout circuit monitored the absolute and relative values from the sensors in realtime, and the results were displayed as a color map. Moreover, we verified the proposed system for quantifying the body pressure and fabric deformation by studying 18 participants who performed three predefined postures. The proposed system showed desirable results and is expected to improve seat safety and comfort when applied to the design of various seat types. Moreover, the proposed system will provide analytical criteria in the design and durability testing of automotive seats.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.387-388
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• 2008

High temperature micro pressure sensors were fabricated by polycrystalline (poly) 3C-SiC piezoresistors formed by oxidized SOI substrates with APCVD. These have been designed by bulk micromachining below $1{\times}1mm^2$ diaphragm and Si membrane $20{\mu}m$ thick. The pressure sensitivity of fabricated pressure sensor was 0.1 mV/Vbar. The non-linearity of sensor was ${\pm}0.44%$ FS and the hysteresis was 0.61% FS.TCS of pressure sensor was -1867 ppm/$^{\circ}C$, its TCR was -792 ppm/$^{\circ}C$, and TCGF to 5 bar was -1042 ppm/$^{\circ}C$ from 25 to $400^{\circ}C$.

• 센서학회지
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• 제31권3호
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• pp.145-150
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• 2022

The importance of flexible polymer-based pressure sensors is growing in fields like healthcare monitoring, tactile recognition, gesture recognition, human-machine interface, and robot skin. In particular, health monitoring and tactile devices require high sensor sensitivity. Researchers have worked on sensor material and structure to achieve high sensitivity. A simple and effective method has been to employ three-dimensional pressure sensors. Three-dimensional (3D) structures dramatically increase sensor sensitivity by achieving larger local deformations for the same pressure. In this paper, the performance, manufacturing method, material, and structure of high-sensitivity flexible pressure sensors based on 3D structures, are reviewed.