• 제목/요약/키워드: Precision Machine

검색결과 2,985건 처리시간 0.028초

VCM을 이용한 리소그래피용 레티클 스테이지의 설계 및 기구학적 해석 (Design and Kinematic Analysis of the Reticle Stage for Lithography Using VCM)

  • 오민택;김문수;김정한
    • 한국공작기계학회논문집
    • /
    • 제17권3호
    • /
    • pp.86-93
    • /
    • 2008
  • This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

박막 절단용 PZT 구동 미세깊이 조절 장치의 특성 (Characteristics of a PZT-Driven Micro Depth Adjustment Device for Cutting Coated Film)

  • 류상오;김화영;안중환
    • 한국생산제조학회지
    • /
    • 제23권6호
    • /
    • pp.630-635
    • /
    • 2014
  • This study aims to develop a PZT-driven depth adjustment device with a flexure hinge and to investigate its static/dynamic characteristics. This device will be applied to rapidly and accurately trace a flat surface with slight waviness of up to several hundreds of micrometers in magnitude. One typical example is to cut a film coated on a steel plate. A depth control system composed of PMAC, PZT/PZT amplifier, flexure hinge/knife, and laser displacement sensor is implemented on a desktop three-axis machine and an actual cutting test is conducted on a steel workpiece with a sinusoidal-wavy surface. It is verified that the dynamic characteristics of the device limit the maximum cutting speed and depth precision.

An efficent method of binocular data reconstruction

  • Rao, YunBo;Ding, Xianshu;Fan, Bojiang
    • KSII Transactions on Internet and Information Systems (TIIS)
    • /
    • 제9권9호
    • /
    • pp.3721-3737
    • /
    • 2015
  • 3D reconstruction based on binocular data is significant to machine vision. In our method, we propose a new and high efficiency 3D reconstruction approach by using a consumer camera aiming to: 1) address the configuration problem of dual camera in the binocular reconstruction system; 2) address stereo matching can hardly be done well problem in both time computing and precision. The kernel feature is firstly proposed in calibration stage to rectify the epipolar. Then, we segment the objects in the camera into background and foreground, for which system obtains the disparity by different method: local window matching and kernel feature-based matching. Extensive experiments demonstrate our proposed algorithm represents accurate 3D model.

미세 리브 구조에서 COC 및 PP의 사출성형 특성 (Injection Molding Characteristics of COC and PP in Micro Rib Structure)

  • 정우철;허영무;신광호;윤길상;장성호
    • 소성∙가공
    • /
    • 제15권2호
    • /
    • pp.158-163
    • /
    • 2006
  • The demand for the miniaturization and high-precision of machine part has recently increased in new technology like biotechnology(BT) and nanotechnology(NT). The purpose of this study is to analyze the molding characteristics according to injection conditions by measuring the filling height in micro injection molding of the polypropylene(PP) and cyclic olefin copolymer(COC). The result shows that the filling effect of COC is better than that of PP in micro rib structure with injection molding process.

판상 미세 리브 구조의 사출성형 특성 (Injection Molding Characteristics of Micro Rib Structure on the Plate)

  • 신광호;윤길상;장성호;정우철;허영무
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2005년도 추계학술대회 논문집
    • /
    • pp.444-447
    • /
    • 2005
  • In recent industry, according to pursuit the miniaturization and high-precision of machine part with development of new technology as If, BT the development of mold manufacturing technology for mass production is accompanied. In this study, after executing the injection molding process of micro structure on the plate which the aspect ratio is 10, the characteristic of each molding condition is investigated by observing the filling height.

  • PDF

NC선반 절삭공구마모 문제점 보정을 위한 CNC 성능개선 시스템 연구 (CNC System Improvement Research of NC Lathe Abrasion-Based on User Defined Module)

  • 박은식;김한식
    • 한국산업융합학회 논문집
    • /
    • 제11권3호
    • /
    • pp.135-140
    • /
    • 2008
  • This paper researched about Development Cutting Tool User Defined Module Based(PMCUDMS) on Simulation that was able to adapt themselves to rapid development of software and hardware to adopt. It is basic research that develops a scheme whereby technic make property. This paper theorized about to realize Cutting Tool User Defined Module Based on Simulation which is developing CNC Software flows from building Windows XP operating system's image that is possible realtime acting and multitasking to correct. And Cutting Tool User Defined Module Based on Simulation component which was consisted of basis OS, NC Code parser, Servo Motor Control, Simulator, Man-Machine Interface.

  • PDF

자기 연마재에 관한 연구 (A Study on Magnetic Abrasive)

  • 김희남
    • Design & Manufacturing
    • /
    • 제2권4호
    • /
    • pp.44-47
    • /
    • 2008
  • The magnetic polishing is the useful method to finish some machinery fabrications by using magnetic power. This method is one of the precision techniques and has an aim for clean technology in the transportation of the pure gas in the clean pipes. The magnetic abrasive polishing method is not so common in the field of machine that it is not known to widely. There are rarely researcher in this field because of non-effectiveness of magnetic abrasive. Therefore, in this paper we deals with the development of the magnetic abrasive with the use of Sr-Ferrite. In this development, abrasive grain A has been made by using the resin bond fabricated at low temperature. And magnetic abrasive powder was fabricated from the Sr-Ferrite which was crushed into 200 mesh. The XRD analysis result shows that only A abrasive and Sr-Ferrite crystal peaks were detected, explaining that resin bond was not any more to contribute chemical reaction. From SEM analysis, we found that A abrasive and Sr-Ferrite were strongly bonding with each other.

  • PDF

A fast adaptive numerical solver for nonseparable elliptic partial differential equations

  • Lee, June-Yub
    • Journal of the Korean Society for Industrial and Applied Mathematics
    • /
    • 제2권1호
    • /
    • pp.27-39
    • /
    • 1998
  • We describe a fast numerical method for non-separable elliptic equations in self-adjoin form on irregular adaptive domains. One of the most successful results in numerical PDE is developing rapid elliptic solvers for separable EPDEs, for example, Fourier transformation methods for Poisson problem on a square, however, it is known that there is no rapid elliptic solvers capable of solving a general nonseparable problems. It is the purpose of this paper to present an iterative solver for linear EPDEs in self-adjoint form. The scheme discussed in this paper solves a given non-separable equation using a sequence of solutions of Poisson equations, therefore, the most important key for such a method is having a good Poison solver. High performance is achieved by using a fast high-order adaptive Poisson solver which requires only about 500 floating point operations per gridpoint in order to obtain machine precision for both the computed solution and its partial derivatives. A few numerical examples have been presented.

  • PDF

Study on gesture recognition based on IIDTW algorithm

  • Tian, Pei;Chen, Guozhen;Li, Nianfeng
    • KSII Transactions on Internet and Information Systems (TIIS)
    • /
    • 제13권12호
    • /
    • pp.6063-6079
    • /
    • 2019
  • When the length of sampling data sequence is too large, the method of gesture recognition based on traditional Dynamic Time Warping (DTW) algorithm will lead to too long calculation time, and the accuracy of recognition result is not high.Support vector machine (SVM) has some shortcomings in precision, Edit Distance on Real Sequences(EDR) algorithm does not guarantee that noise suppression will not suppress effective data.A new method based on Improved Interpolation Dynamic Time Warping (IIDTW)algorithm is proposed to improve the efficiency of gesture recognition and the accuracy of gesture recognition. The results show that the computational efficiency of IIDTW algorithm is more than twice that of SVM-DTW algorithm, the error acceptance rate is FAR reduced by 0.01%, and the error rejection rate FRR is reduced by 0.5%.Gesture recognition based on IIDTW algorithm can achieve better recognition status. If it is applied to unlock mobile phone, it is expected to become a new generation of unlock mode.

고정밀 와이어컷 방전가공기용 200W급 스위칭모드 전원장치 개발 (Development of 200W Switchmode Power Supply for Precision Wire-cut Electric Discharge Machine)

  • 정인화;김종수;;이홍식;임근희;이병원
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2003년도 춘계학술대회 논문집 전기기기 및 에너지변환시스템부문
    • /
    • pp.314-317
    • /
    • 2003
  • 높은 정밀도와 고품위 가공이 요구되는 금형제작 등에서 사용되는 고정밀 와이어컷 방전가공기가 고속, 고정밀 가공특성을 갖기 위해서는 무엇보다도 제어와 출력특성이 우수한 고성능의 전원장치가 필요하다. 본 논문에서는 고정밀 와이어컷 방전가공기용 스위칭모드 보조 전원장치로 사용되는 200W 280Vdc 영전압 포워드 컨버터 개발에 대해 기술하고 있다.

  • PDF