• Title/Summary/Keyword: Porous thin film

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Effect of pre-treatment in 0.5 M oxalic acid containing various NH4F concentrations on PEO Film Formation of AZ91 Mg Alloy (NH4F가 첨가된 0.5 M 옥살산 전처리가 AZ91 마그네슘 합금의 PEO 피막 형성에 미치는 영향)

  • Kwon, Duyoung;Song, Pung-Keun;Moon, Sungmo
    • Journal of the Korean institute of surface engineering
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    • v.55 no.1
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    • pp.24-31
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    • 2022
  • This study investigated the effect of pre-treatment on the PEO film formation of AZ91 Mg alloy. The pre-treatment was conducted for 10 min at room temperature in 0.5 M oxalic acid (C2H2O4) solution containing various ammonium fluoride (NH4F) concentrations. The pre-treated AZ91 Mg specimens were anodized at 100 mA/cm2 of 300 Hz AC for 2 min in 0.1 M NaOH + 0.4 M Na2SiO3 solution. When AZ91 Mg alloy was pretreated in 0.5 M oxalic acid with NH4F concentration less than 0.3 M, continuous dissolution of the AZ91 Mg alloy occurred together with the formation of black smuts and arc initiation time for PEO film formation was very late. It was noticed that corrosion rate of the AZ91 Mg alloy became faster if small amount of NH4F concentration, 0.1 M, is added. The fast corrosion is attributable to fast formation of porous fluoride together with porous oxides in the reaction products. On the other hand, when AZ91 Mg alloy was pretreated in 0.5 M oxalic acid with sufficient NH4F more than 0.3 M, a thin and dense protective film was formed on the AZ91 Mg alloy surface which resulted in faster initiation of arcs and formation of PEO film.

Preparation of Thin Film Electrolyte for Solid Oxide Fuel Cell by Sol-Gel Method and Its Gas Permeability (졸-겔법을 이용한 고체산화물연료전지의 전해질 박막 제조 및 가스 투과도)

  • Son, Hui-Jeong;Lee, Hye-Jong;Lim, Tak-Hyoung;Song, Rak-Hyun;Peck, Dong-Hyun;Shin, Dong-Ryul;Hyun, Sang-Hoon;Kilner, John
    • Journal of the Korean Ceramic Society
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    • v.42 no.12 s.283
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    • pp.827-832
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    • 2005
  • In this study, thin electrolyte layer was prepared by 8YSZ ($8mol\%$ Yttria-Stabilized Zirconia) slurry dip and sol coating onto the porous anode support in order to reduce ohmic resistance. 8YSZ polymeric sol was prepared from inorganic salt of nitrate and XRF results of xerogel powder exhibited similar results $(99.2\pm1wt\%)$ compared with standard sample (TZ-8YS, Tosoh Co.). The dense and thin YSZ film with $1{\mu}m$ thickness was synthesized by coating of 0.7M YSZ sol followed by heat-treatment at $600^{\circ}C$ for 1 h. Thin film electrolyte sintered at $1400^{\circ}C$ showed no gas leakage at the differential pressure condition of 3 atm.

Analysis of Heat and Mass Transfer in an Evaporative Cooler with Fully Wetted Channel (채널이 수막으로 완전히 덮여 있는 증발식 냉각기에서의 열 및 물질전달 해석)

  • Song, Chan-Ho;Lee, Dae-Yeong;No, Seung-Tak
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.12
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    • pp.1766-1775
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    • 2001
  • A theoretical analysis on the heat and mass transfer in an evaporative cooler is presented in this work. The evaporative cooler is modeled as a channel filled with porous media the interstitial surface of which is covered by thin water film. Assuming that the Lewis number is unity and the water vapor saturation curve is linear, exact solutions to the energy and vapor concentration equations are obtained. Based on the exact solutions, the characteristics of the heat and mass transfer in the evaporative cooler are investigated. The comparison of the cooling performance between the evaporative cooler and the usual sensible heat exchanger is also carried out. Obviously, the evaporative heat exchanger shows better cooling performance than the sensible heat exchanger. This is due to the latent heat of water vaporization, which results in apparent increases both in the interstitial heat transfer coefficient and the specific heat of the air stream in the evaporative cooler.

Electrical Properties of Porous SiO2/ITO Nano Films (다공성 SiO2/ITO 나노박막의 전기적 특성)

  • Sin, Yong-Uk;Kim, Sang-U
    • Korean Journal of Materials Research
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    • v.12 no.1
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    • pp.94-99
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    • 2002
  • The electrical properties of porous $SiO_2/ITO$ nano thin film were studied by complex impedance and conductive mechanisms were analyzed. According to the results of complex impedance, the activation energy of $SiO_2/ITO$ and $Zn-SiO_2/ITO$ were 0.309 eV, 0.077 eV in below $450^{\circ}C$ and 0.147 eV in over $450^{\circ}C$, respectively. In case of $SiO_2/ ITO$, slightly direct tunneling occurred at room temperature. The contribution for conduction was very tiny because of high barrier of silica. However, the conductivity abruptly increased in over $300^{\circ}C$ by Thermally assisted tunneling. In case of $Zn-SiO_2/ITO$, high conductivity in 1.26 ${\Omega}^{ -1}{cdot}cm^{-1}$ at room temperature appeared by space charge conduction or Frenkel-poole emission that Zn ions play a role as localized electron states.

Nanopore Generation in Low Dielectric Organosilicate and SiCOH Thin Films

  • Heo, Kyu-Young;Yoon, Jin-Hwan;Jin, Kyeong-Sik;Jin, Sang-Woo;Oh, Kyoung-Suk;Choi, Chi-Kyu;Ree, Moon-Hor
    • Proceedings of the Polymer Society of Korea Conference
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    • 2006.10a
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    • pp.298-298
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    • 2006
  • There has been much interest in incorporating nanoscale voids into dielectric materials in order to reduce their k value, and thus in producing low-k porous interdielectric materials. One approach to the development of low-k dielectric materials is the templated polycondensation of organosilicate precursors in the presence of a thermally labile, organic polymeric porogen. The other is SiOCH films have low dielectric constant as well as good mechanical strength and high thermal stability through PECVD. In this article we explore the nanopore generation mechanism of organosilicate film using star-shape porogen and SiOCH film using bis-trimethylsilylmethane (BTMSM) precursor.

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A Study of Optical Characteristics Correlated with Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry (Ellipsometry를 이용한 저 유전상수를 갖는 SiOCH박막의 광학특성 연구)

  • Park, Yong-Heon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.3
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    • pp.228-233
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    • 2010
  • We studied the optical characteristics correlated with low dielectric constants of low-k SiOCH thin films through ellipsometry. The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The Si-O-CHx, Si-O-Si, Si-CHx, CHx and Si-H bonding groups were specified by FTIR spectroscopic spectra, and the groups coupled with the nano-porous structural organic/inorganic hybrid-type of SiOCH thin films which has extremely low dielectric constant close to 2.0. The structural groups includes highly dense pore as well as ions in SiOCH thin films affecting to complex refraction characteristics of single layer on the p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-light source in the range from 190 nm to 2100 nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

Optimization of Electrochemical Etching Parameters in Porous Silicon Layer Transfer Process for Thin Film Solar Cell (초박형 태양전지 제작에 Porous Silicon Layer Transfer기술 적용을 위한 전기화학적 실리콘 에칭 조건 최적화에 관한 연구)

  • Lee, Ju-Young;Koo, Yeon-Soo;Lee, Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.18 no.1
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    • pp.23-27
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    • 2011
  • Fabrication of porous silicon(PS) double layer by electrochemical etching is the first step in process of ultrathin solar cell using PS layer transfer process. The porosity of the porous silicon layer can be controlled by regulating the formation parameters such as current density and HF concentration. PS layer is fabricated by electrochemical etching in a chemical mixture of HF and ethanol. For electrochemical etching, highly boron doped (100) oriented monocrystalline Si substrates was used. Ths resistivity of silicon is $0.01-0.02\;{\Omega}{\cdot}cm$. The solution composition for electrochemical etching was HF (40%) : $C_2H_5OH$(99 %) : $H_2O$ = 1 : 1 : 2 (by volume). In order to fabricate porous silicon double layer, current density was switched. By switching current density from low to high level, a high-porosity layer was fabricated beneath a low-porosity layer. Etching time affects only the depth of porous silicon layer.

Porous silicon-based chemical and biosensors (다공질 실리콘 구조를 이용한 화학 및 바이오 센서)

  • Kim, Yun-Ho;Park, Eun-Jin;Choi, Woo-Seok;Hong, Suk-In;Min, Nam-Ki
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2410-2412
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    • 2005
  • In this study, two types of PS substrate were fabricated for sensing of chemical and biological substances. For sensing of the humidity and chemical analyzes such as $CH_3OH$ or $C_2H_5OH$, PS layers are prepared by photoelectrochemical etching of silicon wafer in aqueous hydrofluoric acid solution. To evaluate their sensitivity, we measured the resistance variation of the PS diaphragm. As the amplitude of applied voltage increases from 2 to 6Vpp at constant frequency of 5kHz, the resistance variation for humidity sensor rises from 376.3 to $784.8{\Omega}$/%RH. And the sensitivities for $CH_3OH$ and $C_2H_5OH$ were 0.068 uA/% and 0.212 uA/%, respectively. For biological sensing application, amperometric urea sensors were fabricated based on porous silicon(PS), and planar silicon(PLS) electrode substrates by the electrochemical methods. Pt thin film was sputtered on these substrates which were previously formed by electrochemical anodization. Poly (3-methylthiophene) (P3MT) were used for electron transfer matrix between urease(Urs) and the electrode phase, and Urs also was by electrochemically immobilized. Effective working area of these electrodes was determined for the first time by using $Fe(CN)_6^{3-}/Fe(CN)_6^{4-}$ redox couple in which nearly reversible cyclic voltammograms were obtained. The $i_p$ vs $v^{1/2}$ plots show that effective working electrode area of the PS-based Pt thin film electrode was 1.6 times larger than the PLS-based one and we can readily expect the enlarged surface area of PS electrode would result in increased sensitivity by ca. 1.6 times. Actually, amperometric sensitivity of the Urs/P3MT/Pt/PS electrode was ca 0.91uA/$mM{\cdot}cm^2$, and that of the Urs/P3MT/Pt/PLS electrode was ca. 0.91uA/$mM{\cdot}cm^2$ in a linear range of 1mmol/L to 100mmol/L urea concentrations

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Effects of Bottom Electrode to Dielectric and Electrical Properties of MOD Derived Ferroelectric SBT Thin Films (MOD 법으로 제조한 강유전성 SBT 박막에서 하부전극이 유전 및 전기적 특성에 미치는 영향)

  • 김태훈;송석표;김병호
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.8
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    • pp.694-699
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    • 2000
  • S $r_{0.9}$/B $i_{2.1}$/T $a_{2}$/ $O_{9}$ solutions was synthesized by MOD (metalorganic decomposition) method. SBT thin films with 2000$\AA$ thickness were prepared on Ir $O_2$/ $SiO_2$/Si and Pt/Ti/ $SiO_2$/Si substrates using the spin coating process and then investigated the dielectric and electrical properties of them. In the case of using Ir $O_2$bottom electrode the hysteresis loop was saturated at lower temperature than Pt/Ti electrode but the breakdown phenomenon was occurred at low voltage because of the rough surface morphology and porous microstructure of SBT thin films. As the results of the fatigue and imprint characteristics related to the lifetime and reliability of devices after 10$^{10}$ cycles the fatigue rates were about 10% at the Ir $O_2$and Pt/Ti bottom electrodes. Both SBT thin films with Ir $O_2$ and with Pt/Ti bottom electrodes show a slight tendency to imprint after 10$^{9}$ cycles but do not lead to a failure.e.e.

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MnO2 Nanowires Electrodeposited in a Porous Network of Agarose Gel as a Pseudocapacitor Electrode

  • Jin, Sohyun;Ryu, Ilhwan;Lim, Geo;Yim, Sanggyu
    • Journal of Electrochemical Science and Technology
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    • v.11 no.4
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    • pp.406-410
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    • 2020
  • Despite a simple preparation of manganese oxide (MnO2) nanowires by electrodeposition, the improvement in specific capacitance (Csp) and voltammetric response of the MnO2 nanowire-based electrodes has been quite limited. This is attributed to the poor electrical conductivity of MnO2 and its dense bulk morphology due to the aggregation of the nanowires. This study investigated the capacitive performance of MnO2 nanowires electrodeposited on agarose thin films. The good ionic conductivity and porous network of the agarose film provided favorable growth conditions for the MnO2 nanowires with suppressed aggregation. A maximum Csp value of 686 F/g measured at a scan rate of 10 mV/s was obtained, which was significantly larger than that of 314 F/g for the agarose-free MnO2 electrode at the same scan rate. The rate capability was also improved. The Csp measured at a high scan rate of 100 mV/s retained 74.0% of the value measured at 10 mV/s, superior to the retention of 71.1% for the agarose-free MnO2 electrode.