• Title/Summary/Keyword: Polishing

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Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications (텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가)

  • Cho, Byoung-Jun;Kwon, Tae-Young;Kim, Hyuk-Min;Venkatesh, Prasanna;Park, Moon-Seok;Park, Jin-Goo
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.61-66
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    • 2012
  • Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

Assessment of dust exposure and personal protective equipment among dental technicians (치과기공사의 분진노출 수준 및 개인보호구 착용 실태 - 대구지역을 중심으로 -)

  • Park, Soo-Chul;Jeon, Man-Joong;SaKong, Joon
    • Journal of Technologic Dentistry
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    • v.33 no.1
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    • pp.93-102
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    • 2011
  • Purpose: The study aimed to evaluate working environment for dental technician by measuring dust level, ventilation conditions and the use of personal protective equipment and to provide basic information required to improve working environment and develop health education programs for dental technician. Methods: A total of 240 dental technician who are registered with the Daegu Association of Dental technician and working at 34 dental laboratories participated in the study. And the dust level was measured at 21 different spots in 16 dental laboratories out of 34. Results: Of 34 dental laboratories, 31 (91.2%) were equipped with a ventilator, but the remaining 3 (8.8%) did not have a ventilator. By the number of ventilator, 1 to 3 ventilators were found in 22 dental laboratories (71.0%), 4 to 6 ventilators were in 7 laboratories (22.5%) and more than 7 ventilators in 2 laboratories(6.5%). According to the frequence of changing filters in dust collector, 20 dental laboratories (58.9%) changed filters every four weeks, 10 laboratories (29.4%) changed them every six weeks and 4 laboratories (11.7%) changed them every eight weeks. Of total respondents, 114 (61.3%) said they wore a mask all the time while working, 56 (29.6%) said they frequently wore a mask, 19 (10.1%) said they did not wear a mask. As for the type of masks, 159 (84.1%) used a disposable mask, 25 (13.2%) used a cotton mask and 5 (2.7%) used an anti-dust mask. For dust sat on their outfits while working, 102 (54.0%) shook their uniforms inside workplace to keep dust off the uniforms, 64 (33.9%) did not anything until they wash their uniforms and 23 (12.1%) shook their uniforms outside workplace to keep dust off the uniforms. Of total respondents, 182 (96.3%) had a particle in their eyes while carrying out grinding work. Based on the measurement of floating dust at workplace, 3 dental laboratories showed dust concentration exceeding the minimum level of 10 mg/$m^3$ allowed under the permit for environment. Of those, 1 laboratory had the dust concentration that was more than 1.5 times higher than the minimum level. Dust concentration was higher in laboratories that used a dust collector with 0.5 horse power and changed filters more than 3 weeks ago. Dust comprised of nickel (more than 70%), chrome (9%) and others. The mean chrome concentration was more than twice higher than the minimum permissible level of 0.5 mg/$m^3$. There were two laboratories that showed chrome concentration exceeding the level of 0.4 mg/$m^3$. Like dust concentration, chrome level was higher in laboratories that used a dust collector with 0.5 horse power and changed filters more than 3 weeks ago. There were six laboratories that had nickel concentration exceeding the minimum permissible level of 1 mg/$m^3$. Of those, one laboratory had nickel concentration that was more than three times higher than the minimum permissible level. Nickel concentration was also higher in laboratories that used a dust collector with 0.5 horse power and changed filters more than 3 weeks ago. Conclusion: It is not likely that heavy metal concentrations found in the study constitute respiratory dust. It is however necessary for health of dental technician to apply the Industrial Safety and Healthy Law to dental laboratories and make recommendations for the use of personal protective equipment, installation of a proper number of ventilators, more frequent change of filters in dust collector and improved ventilation for polishing work. At the same time, dental technician need education on how to use personal protective equipment and how to efficiently remove dust from their uniforms.

The Effect of Three Surface Sealants on Microleakage of Class V Composite Resin Restorations (복합레진으로 수복한 5급 와동의 미세누출에 대한 3종의 레진 표면 전색제의 효과)

  • Lee, Won-Cheol;Ryu, Jae-Jun
    • The Journal of Korean Academy of Prosthodontics
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    • v.47 no.2
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    • pp.182-190
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    • 2009
  • Statement of problem: Microleakage at the occlusal and gingival margin of Class V cavities restored with composite resin has traditionally been considered an obstacle to successful restoration. Purpose: The aim of this study was to assess the effectiveness of three different surface sealants(Fortify, Permaseal and Biscover LV) on the marginal sealing of Class V light-activated composite resin restorations(Z250). Material and methods: Forty noncarious human premolars and molars extracted within a three-month period were selected. Class V cavities with the occlusal margin in enamel and gingival margin in cementum were prepared in both buccal and lingual surfaces. The teeth, randomly assigned in four groups with twenty cavities in each group, were restored with composite resin after applying an adhesive system(Clearfil SE bond). After the finishing and polishing procedures, the restorations were covered with a specific surface sealants, except for the control samples, which were not sealed. After placing restorations, the specimens were thermocycled, and immersed in a 2% methylene blue solution for twenty four hours and sectioned longitudinally. The marginal microleakage was evaluated at the occlusal and gingival interfaces using a microscope and compared among the four groups using ANOVA test and Wilcoxon Rank-Sum test($\alpha$=0.05). Results: Statistical analysis showed that there was significantly less leakage when the surface sealants were used than there was in control group(P<.05). There were no significant differences of microleakage at occlusal and gingival margins among groups. There were no significant differences between microleakage of occlusal and gingival margins in each group. Fortify was not statistically different from control group at the gingival margin(P>.05). Conclusion: Application of surface sealants was an effective method of surface coating in reducing microleakage at occlusal and gingival margins of Class V composite resin restorations. However, it is certain that some microleakage still occurred despite the application of surface sealants, especially gingival margins.

EVALUATION ON THE ABRASION RESISTANCE OF A SURFACE SEALANT (레진전색제의 마모저항성에 대한 평가)

  • Kim, Soo-Mee;Han, Sae-Hee;Cho, Young-Gon
    • Restorative Dentistry and Endodontics
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    • v.32 no.3
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    • pp.180-190
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    • 2007
  • The purpose of this study was to evaluate the abrasion resistance of surface penetrating sealant which was applied on a composite resin restoration and to provide proper time to reapply sealant on composite resin surface. Two hundred rectangular specimens, sized $8\times3\times2mm$, were made of Micronew (Bisco, Inc., Schaumburg, IL, U.S.A) and divided into two groups; F group (n = 10) was finished with coarse and medium grit of Sof-Lex discs and BisCoverwas applied B group (n = 190) after finishing with discs. B group was again subdivided into nineteen subgroups From B-1 group to B-18 group were subjected to toothbrush abrasion test using a distilled water-dentifrice slurry and toothbrush heads B-IM group was not subjected to toothbrush abrasion test. Average surface roughness (Ra) of each group was calculated using a surface roughness tester (Surfcorder MSE-1700: Kosaka Laboratory Ltd., Tokyo, Japan) . A representative specimen of each group was examined by FE-SEM (S-4700: Hitachi High Technologies Co., Tokyo, Japan). The data were analysed using cluster analysis, paired t-test, and repeated measure ANOVA. The results of this study were as follows; 1. Ra off group was $0.898{\pm}0.145{\mu}m$ and B-IM group was $0.289{\pm}0.142{\mu}m$. Ra became higher from B-1 group $(0.299{\pm}0.48{\mu}m$ to B-18 group $(0.642{\pm}0.313{\mu}m$. 2. Final cluster center of Ra was $0.361{\mu}m$ in cluster 1 $(B-IM\simB-7)$, $0.511{\mu}m$ in cluster 2 $(B-8\simB-14)$ and $0.624{\mu}m$ in cluster 3 ($(B-15\simB-18)$. There were significant difference among Ra of three clusters. 3 Ra of B-IM group was decreased 210.72% than Ra of F group. Ra of B-8 group and B-15 group was increased 35.49% and 51.35% respectively than Ra of B-IM group. 4. On FE-SEM, B-IM group showed the smoothest resin surface. B-8 group and B-15 group showed vertically shallow scratches , and wide and irregular vertical scratches on composite resin surface respectively. Within a limitation of this study, finished resin surface will be again smooth and glazy if BisCover would be reapplied within 8 to 14 months after applying to resin surface.

EVALUATING THE RELIABILITY AND REPEATABILITY OF THE DIGITAL COLOR ANALYSIS SYSTEM FOR DENTISTRY (치과용 디지털 색상 분석용 기기의 정확성과 재현 능력에 대한 평가)

  • Jeong, Joong-Jae;Park, Su-Jung;Cho, Hyun-Gu;Hwang, Yun-Chan;Oh, Won-Mann;Hwang, In-Nam
    • Restorative Dentistry and Endodontics
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    • v.33 no.4
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    • pp.352-368
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    • 2008
  • This study was done to evaluate the reliability of the digital color analysis system (ShadeScan, CYNOVAD, Montreal. Canada) for dentistry. Sixteen tooth models were made by injecting the A2 shade chemical cured resin for temporary crown into the impression acquired from 16 adults. Surfaces of the model teeth were polished with resin polishing cloth. The window of the ShadeScan handpiece was placed on the labial surface of tooth and tooth images were captured, and each tooth shade was analyzed with the ShadeScan software. Captured images were selected in groups, and compared one another. Two models were selected to evaluate repeatability of ShadeScan, and shade analysis was performed 10 times for each tooth. And, to ascertain the color difference of same shade code analyzed by ShadeScan, CIE $L^*a^*b^*$values of shade guide of Gradia Direct (GC, Tokyo, Japan) were measured on the white and black background using the Spectrolino (GretagMacbeth, USA), and Shade map of each shade guide was captured using the ShadeScan. There were no teeth that were analyzed as A2 shade and unique shade. And shade mapping analyses of the same tooth revealed similar shade and distribution except incisal third. Color difference (${\Delta}E^*$) among the Shade map which analyzed as same shade by ShadeScan were above 3. Within the limits of this study, digital color analysis instrument for dentistry has relatively high repeatability, but has controversial in accuracy.

A Study on the Formation Process and the Settling Period of the Gwandong-Palkyung by the Thematic Exploration of Joseon Landscape Poetry and Paintings (옛 시문과 그림으로 살핀 관동팔경(關東八景)의 형상화 및 정착시기)

  • Rho, Jae-Hyun;Son, Hee-Kyung
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.35 no.1
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    • pp.10-24
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    • 2017
  • The research takes note of the formation process and settling period of Gwandong-Palkyung(關東八景, Eight Sites of Eastern Korea), the representative palgyeong(prominent eight sites) and jipgyeong(集景, landscape collection of scenic beauty), and investigates the time of formation regarding the palkyung and jipgeyong of Gwandong's scenic beauty through the analysis and interpretation of bibliographic data, and reference data. The result of the study is as follows. As the first document that records the terminology of "Gwandong-Palkyung" is "Daphongeunggil(答洪應吉)" of Yi, Hwang(李滉), Gwandong-Palkyung is inferred to be settled within the recognition of the people even before the 16th century. The geographic analysis result including "Sinjeung Donggukyeojiseungram(新增東國輿地勝覽)", Gwandong-Palkyung expanded as Gwandong-Sipkyung in early to middle of the 16th century. The first confirmed landscape collection regarding Gwandong-Palkyung in this study is confirmed in Shin Zup(申楫)'s "Yeonggwandong-Palkyung(詠關東八景)", thus, the terminology of Gwandong-Palkyung existed before 16th century at the latest. The settlement time of current "Palkyung" collection is estimated to be early 17th century at the latest. Poetries regarding Gwandong-Palkyung, and the frequency on the appearance of Gwandong scenic beauties are analyzed as making clear of the concentrated phenomenon on the sceneries of Gwandong-Palkyung. On the other hand, the collection of Gwandong-Palkyung in the domain of arts is confirmed initially in the ${\ll}$Gwandongpalkyungdobyeong(關東八景圖屛)${\gg}$ of Heo, Pil(許泌). Gwandong-Palkyung, expressed as the actual scene landscape painting shows similar tendencies of the conditions in the jipgyeong from the poetry, but the appearance rate of the painting subject was more prominent in visual solidarity and cohesion due to the reflection of the importance on icon(圖像) of the art works produced with particular meaning in the case of fixed ideal system. From late Joseon to modern times, ${\ll}$palpokbyeongpung(八幅屛風)${\gg}$ of various forms of folk painting is a corroborative evidence notifying that the cultural phenomenon of Gwandong-Palkyung has entered the universal period of embrace. Also, the 13 scenic beauties of Gangwon-Do appearing in the games of Namseungdo and Myeongseungyuramdo include Gwandong-Palkyung, which confirms the settlement of Gwandog-Palkyung even within the culture of games in late Joseon. Such results demonstrate the existence of awareness regarding Gwandong-Palkyung from the first half of the 15th century, which is presumed to have completely settled in the 17th century through the continuous development of formative process in the 16th century. Ultimately, Gwandong-Palkyung is the concrete formation of regional scenic beauties that individually gained its reputations as scenery from the Koryo Dynasty to late 17th century. Gwandong-Palkyung of the scenic beauty of Gwandong is a unique cultural scenery of the region that have germinated and formed through the process of cutting and polishing of long time to collect the best eight of scenic beauty from the many participation of sightseeing culture.

MARGINAL MICROLEAKAGE AND SHEAR BOND STRENGTH OF COMPOSITE RESIN ACCORDING TO TREATMENT METHODS OF ARTIFICIAL SALIVA-CONTAMINATED SURFACE AFTER PRIMING (접착강화제 도포후 인공타액에 오염된 표면의 처리방법에 따른 복합레진의 번연누출과 전단결합강도)

  • Cho, Young-Gon;Ko, Kee-Jong;Lee, Suk-Jong
    • Restorative Dentistry and Endodontics
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    • v.25 no.1
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    • pp.46-55
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    • 2000
  • During bonding procedure of composite resin, the prepared cavity can be contaminated by saliva. In this study, marginal microleakage and shear bond strength of a composite resin to primed enamel and dentin treated with artificial saliva(Taliva$^{(R)}$) were evaluated. For the marginal microleakage test, Class V cavities were prepared in the buccal surfaces of fifty molars. The samples were randomly assigned into 5 groups with 10 samples in each group. Control group was applied with a bonding system (Scotchbond$^{TM}$ Multi-Purpose plus) according to manufacture's directions without saliva contamination. Experimental groups were divided into 4 groups and contaminated with artificial saliva for 30 seconds after priming: Experimental 1 group ; artificial saliva was dried with compressed air only, Experimental 2 group ; artificial saliva was rinsed and dried. Experimental 3 group ; cavities were etched with 35% phosphoric acid for 15 seconds after rinsing and drying artificial saliva. Experimental 4 group ; cavities were etched with 35% phosphoric acid for 15 seconds and primer was reapplied after rinsing and drying artificial saliva. All the cavities were applied a bonding agent and filled with a composite resin (Z-100$^{TM}$). Specimens were immersed in 0.5% basic fuschin dye for 24 hours and embedded in transparent acrylic resin and sectioned buccolingually with diamond wheel saw. Four sections were obtained from one specimen. Degree of marginal leakage was scored under stereomicroscope and their scores were averaged from four sections. The data were analyzed by Kruscal-Wallis test and Fisher's LSD. For the shear bond strength test, the buccal or occlusal surfaces of one hundred molar teeth were ground to expose enamel(n=50) or dentin(n=50) using diamond wheel saw and its surface was smoothed with Lapping and Polishing Machine(South Bay Technology Co., U.S.A.). Samples were divided into 5 groups. Treatment of saliva-contaminated enamel and dentin surfaces was same as the marginal microleakage test and composite resin was bonded via a gelatin capsule. All specimens were stored in distilled water for 48 hours. The shear bond strengths were measured by universal testing machine (AGS-1000 4D, Shimaduzu Co., Japan) with a crosshead speed of 5 mm/minute. Failure mode of fracture sites was examined under stereomicroscope. The data were analyzed by ANOVA and Tukey's studentized range test. The results of this study were as follows : 1. Enamel marginal microleakage showed no significant difference among groups. 2. Dentinal marginal microleakages of control, experimental 2 and 4 groups were lower than those of experimental 1 and 3 groups (p<0.05). 3. The shear bond strength to enamel was the highest value in control group (20.03${\pm}$4.47MPa) and the lowest value in experimental 1 group (13.28${\pm}$6.52MPa). There were significant differences between experimental 1 group and other groups (p<0.05). 4. The shear bond strength to dentin was higher in control group (17.87${\pm}$4.02MPa) and experimental 4 group (16.38${\pm}$3.23MPa) than in other groups, its value was low in experimental 1 group (3.95${\pm}$2.51 MPa) and experimental 2 group (6.72${\pm}$2.26MPa)(p<0.05). 5. Failure mode of fractured site on the enamel showed mostly adhesive failures in experimental 1 and 3 groups. 6. Failure mode of fractured site on the dentin did not show adhesive failures in control group, but showed mostly adhesive failure in experimental groups. As a summary of above results, if the primed tooth surface was contaminated with artificial saliva, primer should be reapplied after re-etching it.

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OPACITY AND MASHING EFFECT OF THE OPAQUE SHADE COMPOSITE RESINS (Opaque shade 복합레진의 opacity와 배경 색상 차단 능력의 평가)

  • Park, Su-Jung;Hwang, Yun-Chan;Oh, Won-Mann;Hwang, In-Nam
    • Restorative Dentistry and Endodontics
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    • v.32 no.4
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    • pp.356-364
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    • 2007
  • The purpose of this study was to assess the background color-interceptive ability ana opacity of opaque shade composites (Universal composite, Filtek Z350, Charisma, Clearfil ST, Palpaque Estelite, Esthet-X, and Metafil Flo). Twenty four background specimens (diameter 5.5 mm, thickness 3.0 mm) with Root dentin Mustard (Bisco, Schaumburg, IL, USA) were made. The CIE $L^*a^*b^*$ value of background specimens was measured by a spectrophotometer (Spectrolino, GretagMacbeth, Regensdorf, Switzerland). Three specimens in every group were filled on the background specimens. The surface color of samples was measured by a spectrophotometer in 3.0 mm and every thickness to 0.5 mm while grinding. The color difference in the background color along with 3.0 mm specimen gauged the masking effect in each thickness while grinding and polishing. The opacity was calculated in 1 mm thick specimens. The opacity was in the decreasing order of Clearfil ST, Metafil Flo, Filtek Z350, Palpaque Estelite, Universal composite, Charisma, and Esthet-X (p < 0.05). As the thickness get reduced, $L^*$ value showed decreasing, $a^*$ increasing tendency. The surface color difference between pair of the 3.0 mm thick specimen and after grinding in same opaque resin was above 3.3 except Clearfil ST and Metafil Flo. The color difference (${\Delta}E^*$) between pair of background specimen and opaque resin built-up specimen showed more than 10.0 regardless kinds and thickness. The variance in opacity characteristics and color of the opaque composites is dependent upon manufacturer. When using the opaque resin, the optical properties of each material must be considered as well as cavity.

Feasibility Study of Wetland-pond Systems for Water Quality Improvement and Agricultural Reuse (습지-연못 연계시스템에 의한 수질개선과 농업적 재이용 타당성 분석)

  • Jang, Jae-Ho;Jung, Kwang-Wook;Ham, Jong-Hwa;Yoon, Chun-Gyeong
    • Korean Journal of Ecology and Environment
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    • v.37 no.3 s.108
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    • pp.344-354
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    • 2004
  • A pilot study was performed from September 2000 to April 2004 to examine the feasibility of the wetland-pond system for the agricultural reuse of reclaimed water. The wetland system was a subsurface flow type, with a hydraulic residence time of 3.5 days, and the subsequent pond was 8 $m^3$ in volume (2 m ${\times}$ 2 m ${\times}$ 2 m) and operated with intermittent-discharge and continuous flow types. The wetland system was effective in treating the sewage; median removal efficiencies of $BOD_5$ and TSS were above 70.0%, with mean effluent concentrations of 27.1 and 16.8 mg $L^{-1}$, respectively, for these constituents. However, they did often exceed the effluent water quality standards of 20 mg $L^{-1}$. Removal of T-N and T-P was relatively less effective and mean effluent concentrations were approximately 103.2 and 7.2 mg $L^{-1}$, respectively. The wetland system demonstrated high removal rate (92 ${\sim}$ 90%) of microorganisms, but effluent concentrations were in the range of 300 ${\sim}$ 16,000 MPN 100 $mL^{-1}$ which is still high for agricultural reuse. The subsequent pond system provided further treatment of the wetland effluent, and especially additional microorganisms removal in addition to wetland-pond system could reduce the mean concentration to 1,000 MPN 100 $mL^{-1}$ from about $10^5$ MPN 100 $mL^{-1}$ of wetland influent. Other parameters in the pond system showed seasonal variation, and the upper layer of the pond water column became remarkably clear immediately after ice melt. Overall, the wetland system was found to be adequate for treating sewage with stable removal efficiency, and the subsequent pond was effective for further polishing. This study concerned agricultural reuse of reclaimed water using natural systems. Considering stable performance and effective removal of bacterial indicators as well as other water quality parameters, low maintenance, and cost-effectiveness, wetland- pond system was thought to be an effective and feasible alternative for agricultural reuse of reclaimed water in rural area.

Theory of moral leadership in the Great Learning (『대학(大學)』의 수신적(修身的) 지도자론(指導者論))

  • Seo, Eun-Sook
    • (The)Study of the Eastern Classic
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    • no.34
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    • pp.7-38
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    • 2009
  • This paper attempts to explore the theory of moral leadership in the Great Learning. There are two fundamental contents in the elements of moral leadership's human nature in the Great learning. These are meaning of general principle(綱領指趣) - studying, self cultivation and social authority from rectifying name, and category of concrete learning(學問綱目) - the scheme of manifesting original nature (明德之方) and the scheme of loving the people(親民之方). In this, there are two principles. One is the principle of stage. In the theory of moral leadership of the Great learning, there are stages from self-cultivation to making the world tranquil. The other is the principle of stop at the highest good in manifesting nature and loving the people. In the meaning of general principle, moral leader must have good nature that he or she preforms his or her original nature and accomplishes self-cultivation. For this he or she must learn and study, and endeavors self-polishing. In the category of concrete learning, at first, in the scheme of manifesting original nature, there are investigation things-extending knowledge and making the will sincere-rectifying the mind as the pre conditions of the self-cultivation, and moral leader must carry out harmonization peoples and accomplishing public morals as the result of self-cultivation. The harmonization people means that everyone has equal position and lives with each other in harmony In the scheme of loving the people, there are the connected ethics of self cultivation-regulating the family(修身齊家) and the connected ethics of regulating the family-ordering the state(齊家治國) by effect of self-cultivation.