Etching Mechanism of $YMnO_3$ Thin Films in High Density $CF_{4}/Ar$ Plasma
(고밀도 $CF_{4}/Ar$ 플라즈마에서 $YMnO_3$ 박막의 식각 매카니즘)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2001.05b
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- pp.12-16
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- 2001