Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.05b
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- Pages.12-16
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- 2001
Etching Mechanism of $YMnO_3$ Thin Films in High Density $CF_{4}/Ar$ Plasma
고밀도 $CF_{4}/Ar$ 플라즈마에서 $YMnO_3$ 박막의 식각 매카니즘
- Published : 2001.05.11
Abstract
We investigated the etching characteristics of