• Asian Pacific Journal of Cancer Prevention
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• 제14권5호
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• pp.3063-3066
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• 2013

Objective: To test the microRNA-181c (miR-181c) expression in tissues and plasma of gastric cancer (GC) cases, analyze any correlations, and explore the possibility of miR-181c as a potential molecular marker for GC diagnosis. Materials and Methods: Relative miR-181c expression levels in cancers and plasma from 30 GC patients was tested using reverse transcription-real-time fluorescent quantitation PCR and compared to that in samples from 30 gastric ulcer and 30 chronic gastritis patients. Results: The miR-181c expression level in the GC tissues was significantly higher than that in the gastric ulcer and chronic gastritis tissues (P = 0.000), as was the miR-181c expression level in the GC plasma (P = 0.000). We determined that miR-181c expression in GC plasma was positively correlated to its expression in the GC tissues (P = 0.000). Conclusions: The expression of miR-181c is upregulated in GC tissues and plasma, and the miR-181c expression level in GC plasma is positively correlated to that in the corresponding cancer tissues. Plasma miR-181c is possibly a new serological marker for GC diagnosis.

• 한국진공학회지
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• 제20권2호
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• pp.86-92
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• 2011

본 연구에서는 새롭게 개발된 센서인 in-situ particle monitor (ISPM)와 기존센서의 기능을 업그레이드 한 센서인 self-plasma optical emission spectroscopy (SPOES)를 이용해 화학기상증착 진공공정을 진단하였다. 본 연구에서 사용된 증착공정 장비는 silane 가스를 이용한 silicon plasma enhanced chemical vapor deposition과 borophosphosilicate glass 증착장비이다. 두 장비의 증착 또는 클리닝 조건에서의 배출되는 오염입자와 배기가스를 개발된 센서를 이용해 공정상태를 실시간으로 진단하는 것과 개발된 센서의 센싱 능력을 검증하고자 하는 목적으로 연구가 진행되었다. 개발된 센서는 장비 배기구 설치되었으며, 공정압력, 유량, 플라즈마 파워 등의 공정변수 변화에 따른 오염입자 크기 및 분포와 배기 부산물의 변화를 측정하고, 측정 결과의 상호 연관성을 분석하였다.

• 반도체디스플레이기술학회지
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• 제15권4호
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• pp.33-35
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• 2016

In this study, a new plasma source was used in the ALD process. Line type plasma sources were analyzed by electric and magnetic field simulation. And the results were compared with plasma density and electron temperature measurement results. As a result, the results of the computer simulation and the diagnosis results of plasma density and electron temperature showed similar tendency. At this time, the plasma uniformity is 95.6 %. $Al_2O_3$ thin film was coated on 6 inch Si-wafer, using this plasma source. The uniformity of the thin film was more than 98% and the thin film growth rate was 0.13 nm/cycle.

• The Korean Journal of Ceramics
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• 제4권1호
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• pp.20-24
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• 1998

Thin films of diamond-like carbon(DLC) can be successfully deposited by using a magnetron plasma chemical vapor deposition (CVD) method with an rf(13.56 MHz) plasma of $C_dH_8$. Plasma characteristics are analyzed as a function of the magnetic field. As the magnetic field increases, both electron temperature ($T_e$) and density ($n_e$)increase, but the negative dc self-bias voltage (-$V_{ab}$) decreases, irrespective of gas pressures in the range of 1~7 mTorr. High deposition rates have been obtained even at low gas pressures, which may be attributed to the increased mean free path of electrons in the magentron plasma. Effects of rf power and additive gas on the structural properties of DLC films aer also examined by using various technique namely, TED(transmissio electron diffraction) microanalysis, FTIR, and Raman spectroscopies.

• Industrial Engineering and Management Systems
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• 제14권4호
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• pp.392-400
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• 2015

Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

• 대한수의학회지
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• 제43권4호
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• pp.641-648
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• 2003

Changes of plasma DNA contents and serum biochemical values were measured in rats administered with $HgCl_2$ to investigate the in vivo cytotoxic effects of mercury and examine the usefulness of these changes as indicators of mercury exposure and diagnosis of mercury poisoning. Rats were given once intraperitonealy $HgCl_2$(0.13. 0.32. 0.8 and 2 mg/kg b.w) and the changes of plasma DNA contents and serum biochemical values were measured at the time of 2, 4, 8, 24, 48 and 72 hours after the administration of $HgCl_2$. Plasma DNA contents began to increase from 2 hours after the administration of $HgCl_2$ in all the treatment groups significantly compared to control with dose-dependent pattern. The levels of plasma DNA reached to peak at 48 hours as 2.77, 7.60, 15.46 and 16.51 times higher than control in each treatment group of 0.13, 0.32, 0.8 and 2 mg/kgb.w, respectively and remained to be higher until 72 hours after the administration. The values of creatine kinase, aspartate aminotransferase, alanine aminotransferase, lactate dehydrogenase, blood urea nitrogen and glucose of serum were increased, however the values of alkaline phosphatase, total protein and triglyceride were decreased. These changes of increase and decrease showed dose-dependent pattern but the starting time, maintenance and magnitude of change were various and characteristic according to serum biochemical indices. Among the changes of serum biochemical values, those of aspartate aminotransferase, lactate dehydrogenase and blood urea nitrogen were apparently and significantly increased compared to control from 2 to 72 hours by the administration of 2 mg/kg $HgCl_2$. This study demonstrates that plasma DNA and serum biochemical values such as aspartate aminotransferase, lactate dehydrogenase, blood urea nitrogen and etc. are valuable as biomarkers for mercury exposure assessment and diagnosis of mercury poisoning.

• BMB Reports
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• 제41권9호
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• pp.615-625
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• 2008

Over a last decade, intense interest has been focused on biomarker discovery and their clinical uses. This interest is accelerated by the completion of human genome project and the progress of techniques in proteomics. Especially, cancer biomarker discovery is eminent in this field due to its anticipated critical role in early diagnosis, therapy guidance, and prognosis monitoring of cancers. Among cancers, lung cancer, one of the top three major cancers, is the one showing the highest mortality because of failure in early diagnosis. Numerous potential DNA biomarkers such as hypermethylations of the promoters and mutations in K-ras, p53, and protein biomarkers; carcinoembryonic antigen (CEA), CYFRA21-1, plasma kallikrein B1 (KLKB1), Neuron-specific enolase, etc. have been discovered as lung cancer biomarkers. Despite extensive studies thus far, few are turned out to be useful in clinic. Even those used in clinic do not show enough sensitivity, specificity and reproducibility for general use. This review describes what the cancer biomarkers are for, various types of lung cancer biomarkers discovered at present and predicted future advance in lung cancer biomarker discovery with proteomics technology.

• Tuberculosis and Respiratory Diseases
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• 제42권5호
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• pp.646-653
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• 1995

연구배경: 폐결핵의 진단은 결핵균이 배양되면 확진이 되나, 실제 임상에서는 세균학적 진단이 양성으로 나타나지 않는 폐결핵 환자가 다수 존재하므로 활동성 위한 빠르고 확실한 진단방법이 임상에서 절실히 요구되고 있다, $\beta$-glucuronidase(이하 GLU)와 $\beta$-N-acetyl glucosaminidase(이하 NAG)는 폐내 탐식세포인 대식세포(macrophage)의 리소솜(lysosome) 효소들로서, 이산화규소가 폐내로 흡입되어 폐포내 대식세포에 의해서 탐식되고 이어서 대식세포가 파괴된 다고 알려진 규폐증에서 NAG의 혈중농도가 증가한다는 보고가 있었다. 또한 폐결핵에서도 세포내에서 증식된 결핵균을 충분히 사멸시키지 못하여 활동성 결핵 병변이 유발된 경우 파괴된 대식세포로부터 증식된 결핵균과 함께 GLU나 NAG도 유리될 것으로 추정된다. 본 연구는 활동성 폐결핵환자의 혈중 리소솜 효소 활성도가 비활동성 결핵환자나 정상대조군보다 높은지 여부와 혈중내 리소솜 효소의 측정이 활동성 폐결핵 진단법으로 이용될 수 있는지의 여부에 대해 알아보고자 하였다. 방법: 결핵균이 검출되어 활동성 폐결핵으로 진단된 환자군과 비활동성 폐결핵군 및 건강대조군에서 GLU와 NAG의 혈장내 농도 차이를 비교하였으며 활동성 폐결핵환자군에서는 투약에 따른 리소솜효소의 변동이 있는지를 관찰하기 위하여 투약후 2개월 뒤에 상기 효소들의 활성치를 다시 측정하여 진단시의 값과 비교하였다. 두가지 효소 모두 4-methylumbelliferyl substrates를 사용한 형광측정법으로 측정하였다. 결과: 1) 활동성 폐결핵군과 비활동정 폐결핵군 및 건강대조군 사이의 혈중 GLU와 NAG의 농도차이: 활동성 폐결핵군의 GLU 및 NAG의 혈중 농도는 $21.52{\pm}3.01$ 및 $325.4{\pm}23.37nmol$ product/h/ml of plasma(이하 단위표기생략)로서 비활동정 폐결핵군 $24.87{\pm}3.78$, $362.36{\pm}33.92$와 건강대조군 $25.45{\pm}4.05$, $324.44{\pm}28.66$ 사이에 차이가 없었다. 2) 활동성 폐결핵군에서 항결핵제 치료 전후의 혈중 NAG와 GLU의 농도차이: 활동성 폐결핵 치료시작 2개월후 GLU의 혈중치는 $41.18{\pm}5.23$으로서 치료전에 비해 통계적으로 유의하게 증가되었고(p값<0.05) NAG의 혈중농도는 $359.2{\pm}39.53$으로서 치료전과 차이가 없었다. 결론: 활동성 폐결핵환자의 혈장내 GLU 및 NAG의 농도는 비활동성 결핵군이나 건강대조군과 차이가 없었으므로 상기 효소들의 측정은 활동성 폐결핵 진단의 방법으로서 유용하지 않는 것으로 사료되었고 병 경과에 따른 혈중 GLU치의 증가에 대하여는 연구가 필요할 것으로 사료되었다.

• Current Photovoltaic Research
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• 제3권4호
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• pp.112-115
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• 2015

In this study, the surface of ITO films was modified using $N_2-O_2$ molecular plasma, and the effects of oxygen concentration in the plasma on the ITO surface properties were investigated. Upon plasma treatment of ITO films, the surface roughness of ITO films seldom changed up to the oxygen concentration in the range of 0% to 40%, while the roughness of the films slightly changed at or above the oxygen concentration of 60%. The contact angle of water droplet on ITO films dramatically changed with varying oxygen concentration in the plasma, and the minimum value was found to be at the oxygen concentration of 20%. The plasma resistance at this condition exhibited a maximum value, and the change of resistance showed an inverse relationship compared to that of contact angle. From these results, it was conjectured that the chemical reactions in the sheath of the molecular plasma dominated more than the physical actions due to energetic ion bombardment, and also the plasma resistance could be used as an indirect indicator to qualitatively diagnosis the state of plasma during the plasma treatment.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1998년도 제16회 학술발표회 논문개요집
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• pp.24-24
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• 1998