The Study on In-situ Diagnosis of Chemical Vapor Deposition Processes
![]() |
Jeon, Ki-Moon
(KRISS)
Shin, Jae-Soo (Department of Advanced Materials Engineering, Dae Jeon University) Lim, Sung-Kyu (NNFC) Park, Sang-Hyun (NNFC) Kang, Byoung-Koo (Nanotek) Yune, Jin-Uk (HCT) Yun, Ju-Young (KRISS) Shin, Yong-Hyeon (KRISS) Kang, Sang-Woo (KRISS) |
1 | A theory for multiresolution signal decomposition : the wavelet representation, IEEE Transaction on Pattern Analysis and Machine Intelligence, 11, 674-693, (1989). DOI |
2 | S. G. Mallat, Multifrequency channel decompositions of images andwavelet models. IEEE Transactions on 37, (1989). DOI |
3 | I. Daubechies, Comm. Pure Appl. Math. 41, 909-996 (1988). DOI |
4 | B. Kim and K. Kwon, J. Appl. Phys. 93, 76 (2003). DOI |
5 | B. Kim, S. Kong, and B. T. Lee, J. Vac. Sci. Technol. A 20, 146 (2002). DOI |
6 | R. W. Chen, H. Huang, C. J. Spanos, and M. Gatto, J. Vac. Sci. Technol. A 14, 1901 (1996). DOI |
7 | J. F. O'Hanlon and H. G. Parks, J. Vac. Sci. Technol. A 10, 1863 (1992). DOI |
8 | L. Peters, International Technology Roadmap for Semiconductors (ITRS), (2007). |
9 | P. J. Ziemann, P. Liu, N. P. Rao, D. B. Kittelson, and P. H. McMurry, J. Aerosol. Sci. 26, 745 (1995). DOI |
![]() |