Study of ALD Process using the Line Type Plasma Source
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Kwon, Gi Chung
(Kwangwoon Univ. Electrophysics)
Jo, Tae Hoon (Kwangwoon Univ. Electrophysics) Choi, Jin Woo (Kwangwoon Univ. Electrophysics) Song, Sae Yung (NainTech) Seol, Jae Yoon (NainTech) Lee, Jun Sin (Sungkyunkwan Univ. College of information & Communication engineering) |
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