• 제목/요약/키워드: Planar stage

검색결과 107건 처리시간 0.021초

Modeling and Multivariable Control of a Novel Multi-Dimensional Levitated Stage with High Precision

  • Hu Tiejun;Kim Won-jong
    • International Journal of Control, Automation, and Systems
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    • 제4권1호
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    • pp.1-9
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    • 2006
  • This paper presents the modeling and multivariable feedback control of a novel high-precision multi-dimensional positioning stage. This integrated 6-degree-of-freedom. (DOF) motion stage is levitated by three aerostatic bearings and actuated by 3 three-phase synchronous permanent-magnet planar motors (SPMPMs). It can generate all 6-DOF motions with only a single moving part. With the DQ decomposition theory, this positioning stage is modeled as a multi-input multi-output (MIMO) electromechanical system with six inputs (currents) and six outputs (displacements). To achieve high-precision positioning capability, discrete-time integrator-augmented linear-quadratic-regulator (LQR) and reduced-order linearquadratic-Gaussian (LQG) control methodologies are applied. Digital multivariable controllers are designed and implemented on the positioning system, and experimental results are also presented in this paper to demonstrate the stage's dynamic performance.

선형 유도기 구동 방식 공기 베어링 스테이지에 관한 연구 (Study on the Air-bearing Stage Driven by Linear Induction Motors)

  • 정광석;심기본
    • 한국정밀공학회지
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    • 제27권6호
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    • pp.39-46
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    • 2010
  • Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.

평면충돌제트에 의한 고온 판 냉각과정의 열전달 해석 (Analysis of Heat Transfer in Cooling of a Hot Plate by Planar Impingement Jet)

  • 안대환;김동식
    • 대한기계학회논문집B
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    • 제33권1호
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    • pp.17-27
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    • 2009
  • Water jet impingement cooling is used to remove heat from high-temperature surfaces such as hot steel plates in the steel manufacturing process (thermo-mechanical cooling process; TMCP). In those processes, uniform cooling is the most critical factor to ensure high strength steel and good quality. In this study, experiments are performed to measure the heat transfer coefficient together with the inverse heat conduction problem (IHCP) analysis for a plate cooled by planar water jet. In the inverse heat transfer analysis, spatial and temporal variations of heat transfer coefficient, with no information regarding its functional form, are determined by employing the conjugate gradient method with an adjoint problem. To estimate the two dimensional distribution of heat transfer coefficient and heat flux for planar waterjet cooling, eight thermo-couple are installed inside the plate. The results show that heat transfer coefficient is approximately uniform in the span-wise direction in the early stage of cooling. In the later stage where the forced-convection effect is important, the heat transfer coefficient becomes larger in the edge region. The surface temperature vs. heat flux characteristics are also investigated for the entire boiling regimes. In addition, the heat transfer rate for the two different plate geometries are compared at the same Reynolds number.

직선 이송축의 3자유도 오차 보정을 위한 미세 구동 스테이지 개발 및 성능 평가 (Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation of a Linear Axis)

  • 이재창;이민재;양승한
    • 한국정밀공학회지
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    • 제34권1호
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    • pp.53-58
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    • 2017
  • A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

자기부상 스테이지의 제어를 위한 모델링에 관한 연구 (A Study on the modeling for the control of magnetic levitation stage)

  • 남택근;김용주
    • Journal of Advanced Marine Engineering and Technology
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    • 제27권7호
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    • pp.862-871
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    • 2003
  • In this paper, we addressed a modeling for the magnetic levitation stage. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for propulsion. Therefore. this stage can generate six degrees of freedom motion by the combination of forces. We derived a mechanical dynamics equation using Lagrangian method and electromechanical dynamics equation by using Co-energy method. Based on the derived dynamics, we can analyze the stage motion that is subject to the input currents and forces.

Three-dimensional structural health monitoring based on multiscale cross-sample entropy

  • Lin, Tzu Kang;Tseng, Tzu Chi;Lainez, Ana G.
    • Earthquakes and Structures
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    • 제12권6호
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    • pp.673-687
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    • 2017
  • A three-dimensional; structural health monitoring; vertical; planar; cross-sample entropy; multiscaleA three-dimensional structural health monitoring (SHM) system based on multiscale entropy (MSE) and multiscale cross-sample entropy (MSCE) is proposed in this paper. The damage condition of a structure is rapidly screened through MSE analysis by measuring the ambient vibration signal on the roof of the structure. Subsequently, the vertical damage location is evaluated by analyzing individual signals on different floors through vertical MSCE analysis. The results are quantified using the vertical damage index (DI). Planar MSCE analysis is applied to detect the damage orientation of damaged floors by analyzing the biaxial signals in four directions on each damaged floor. The results are physically quantified using the planar DI. With progressive vertical and planar analysis methods, the damaged floors and damage locations can be accurately and efficiently diagnosed. To demonstrate the performance of the proposed system, performance evaluation was conducted on a three-dimensional seven-story steel structure. According to the results, the damage condition and elevation were reliably detected. Moreover, the damage location was efficiently quantified by the DI. Average accuracy rates of 93% (vertical) and 91% (planar) were achieved through the proposed DI method. A reference measurement of the current stage can initially launch the SHM system; therefore, structural damage can be reliably detected after major earthquakes.

Attitude Control of Planar Space Robot based on Self-Organizing Data Mining Algorithm

  • Kim, Young-Woo;Matsuda, Ryousuke;Narikiyo, Tatsuo;Kim, Jong-Hae
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2005년도 ICCAS
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    • pp.377-382
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    • 2005
  • This paper presents a new method for the attitude control of planar space robots. In order to control highly constrained non-linear system such as a 3D space robot, the analytical formulation for the system with complex dynamics and effective control methodology based on the formulation, are not always obtainable. In the proposed method, correspondingly, a non-analytical but effective self-organizing modeling method for controlling a highly constrained system is proposed based on a polynomial data mining algorithm. In order to control the attitude of a planar space robot, it is well known to require inputs characterized by a special pattern in time series with a non-deterministic length. In order to correspond to this type of control paradigm, we adopt the Model Predictive Control (MPC) scheme where the length of the non-deterministic horizon is determined based on implementation cost and control performance. The optimal solution to finding the size of the input pattern is found by a solving two-stage programming problem.

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대면적 비접촉 스테이지에 구동기 적용을 위한 선형유도기의 변형된 2축 벡터 제어기 (The Modified Two-axis Vector Controller of Linear Induction Motor to Apply to the Non-contact Stage with Large Workspace)

  • 정광석;이상헌
    • 제어로봇시스템학회논문지
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    • 제14권4호
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    • pp.385-391
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    • 2008
  • To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.

가변주파수 스위칭 Flyback 컨버터를 이용한 자동차용 고압방전등 안정기의 설계 (Design of on Automotive HID Ballast using Variable Frequency Switching Flyback Converter)

  • 엄태욱;김윤호
    • 조명전기설비학회논문지
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    • 제22권4호
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    • pp.166-171
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    • 2008
  • 본 논문은 가변주파수 스위칭 방식의 flyback 컨버터를 이용한 자동차용 35[W]급 고휘도 방전 램프용 전자식 안정기의 고효율 제어시스템을 구현하였다. 또한 안정기 성능, 크기 그리고 효율을 고려하여 planar 변압기를 이용하여 flyback 컨버터를 설계하였다. HID 램프를 자동차에 적용하기 위해 복잡한 과도특성을 제어할 수 있는 매우 복잡한 제어회로와 고효율의 안정기의 제작이 요구되어진다. 제안된 전자식 안정기는 planar 변압기를 사용한 flyback 컨버터, full bridge 인버터와 승압 점화장치로 구성되어 있으며, flyback 컨버터의 스위칭 주파수는 안정기에 입력전압의 변화에 따라 제어되도록 설계하였고, planar변압기를 사용하여, 안정기의 가격과 크기를 크게 절감할 수 있었다. 제안된 시스템에 대한 성능 및 효율은 여러 가지 실험을 통해 확인하였다.

급속 응고한 Al-Pb 편정 합금의 조직과 성질;I. 급속 응고 조직 특성 (Structure and Properties of Rapidly-Solidified Al-Pb Monotectic Alloys.;I. Characteristics of Rapidly-Solidified Microstructure)

  • 김명호;배차헌;이호인
    • 한국주조공학회지
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    • 제9권1호
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    • pp.73-79
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    • 1989
  • Microstructural characteristics of Al-3.63wt.%Pb hyper-monotectic alloy rapidly-solidified by melt spinning were examined. Possibility of forming a planar liquid -solid interface during rapid solidification of this alloy was also considered with a morphological stability theory, and a mechanism of forming banded structure observed at the bottom parts of melt-spinned specimens was considered as well. Application of the absolute stability criterion predicts the liquid-solid interface of the primary aluminium phase to be able to maintain a planar interface during the early stage of rapid solidification. Formation of banded structure was supposed to be resulted from the release of latent heat during solidification, which affect the stability of a planar liquid-solid interface.

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