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Study on the Air-bearing Stage Driven by Linear Induction Motors  

Jung, Kwang-Suk (Department of Mechanical Engineering, Chungju National Univ.)
Shim, Ki-Bon (Graduate School, Department of Mechanical Engineering, Chungju National Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.27, no.6, 2010 , pp. 39-46 More about this Journal
Abstract
Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.
Keywords
Air Bearing Stage; Linear Induction Motor; Magnetic Circuit; Nano Step Test; Vector Control;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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