• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Journal of Sensor Science and Technology
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• v.32 no.1
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• pp.44-50
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• 2023

In this study, a polydimethylsiloxane (PDMS)-based drag force-type flowmeter was fabricated using a graphite-carbon nanotube (CNT) composite as a piezoresistive material and evaluated. The device was in the form of a cantilever, which was composed of the soft material, PDMS, and fabricated using a mold manufactured by a three-dimensional printer. The cost-effective graphite was mixed with CNTs to serve as a piezoresistive material. The optimal mixing ratio was investigated, and the piezoresistive material formed using a graphite:PDMS:CNT ratio of 1.5:1:0.01 was adopted, which showed a stable output and a high sensitivity. Various forward and backward air flows in the range of 0-10 m/s were measured using the fabricated flowmeter, and both tensile and compression characteristics were evaluated. The measured results showed a stable output, with the resistance change gradually increasing with the air flow rate. Repeatability characteristics were also tested at a repeated air flow of 10 m/s, and the flowmeter responded to the applied air flow well. Consequently, the fabricated device has a high sensitivity and can be used as a flowmeter.

• Elastomers and Composites
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• v.48 no.1
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• pp.76-84
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• 2013

The term 'Piezoresistive effect' describes a change in the electrical resistance of the material from deformed to its original shape by the external pressure, e.g., elongation, compression, etc. This phenomenon has various applications of sensors for monitoring pressure, vibration, and acceleration. Although there are many materials which have the piezoresistive effect, rubber (nano)composites with conductive fillers have attracted a great deal of attention because the piezoresistive effect appears at the various range of pressure by controlling the type of filler, particle size, particle shape, aspect ratio of particles, and filler content. Especially one can obtain the composites with elasticity and flexibility by using the rubber as a matrix. This paper aims to review the piezoresistive effect itself, their basic principles, and the various conductive rubber-composites with piezoresistive effect.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1422-1424
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• 1994

This paper deals with piezoresistive humidity sensor using polycrystalline silicon (Poly-Si ) with membrane in sensors of semiconductor. Poly-Si piezoresistors which have no temperature dependancy are deposited on silicon wafer, membrane is formed with micromachining technology, then polyimide is formed as a hygroscopic layer. Whereas the principle of conventional humidify sensors are based on the change in electrical properties of the material, the humidity induced volume change of a polyimide layer leads to a deformation of a silicon membrane in this case. This deformation is transformed into an output voltage by Poly-Si piezoresistive. Wheatstone bridge. Fabricated piezoresistive humidity sensors showed good linearity, response time, and long term stability.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.36 no.6
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• pp.415-421
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• 2023

In this study, the piezoresistive properties of cementitious composites enhanced with carbon nanotubes for improved electrical conductivity were analyzed using a deep learning-based transformer algorithm. Experimental execution was performed in parallel for acquisition of training data. Previous studies on mixture design, specimen fabrication, chemical composition analysis, and piezoresistive performance testing are also reviewed in this paper. Notably, specimens in which fly ash substituted 50% of the binder material were fabricated and evaluated in this study, in addition to carbon nanotube-infused specimens, thereby exploring the potential enhancement of piezoresistive characteristics in conductive cementitious materials. The experimental results showed more stable piezoresistive responses in specimens with fly-ash substituted binder. The transformer model was trained using 80% of the gathered data, with the remaining 20% employed for validation. The analytical outcomes were generally consistent with empirical measurements, yielding an average absolute error and root mean square error between 0.069 to 0.074 and 0.124 to 0.132, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.416-417
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• 2005

In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

• Smart Structures and Systems
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• v.29 no.2
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• pp.351-359
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• 2022

The present study investigated the synergistic effects of carbon nanotube (CNT) and carbon black (CB) inclusions on the piezoresistive sensing behaviors of cementitious composites. Four different CNT and CB combinations were considered to form different conductive networks in the binder material composed of Portland cement and fly ash. The cement was substituted with fly ash at levels of 0 or 50% by the mass of binder. The specimens were cured up to 100 days to observe the variations of the electrical characteristics with hydration progress, and the piezoresistive sensing behaviors of the specimens were measured under cyclic loading tests. The fabricated specimens were additionally evaluated with flowability, resistivity and cyclic loading tests, and morphological analysis. The scanning electron microscopy and energy disperse X-ray spectroscopy test results indicated that CNT and CB inclusion induced synergistic formations of electrically conductive networks, which led to an improvement of piezoresistive sensing behaviors. Moreover, the incorporation of fly ash having Fe³⁺ components decreased the electrical resistivity, improving both the linearity of fractional changes in the electrical resistivity and reproducibility expressed as R² under cyclic loading conditions.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.5
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• pp.350-354
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• 2020

In this study, a pressure sensor for each displacement was fabricated based on the silicon-based pressure sensor obtained through simulation results. Wires were bonded to the pressure sensor, and a piezoresistive pressure sensor was inserted into the printed circuit board (PCB) base by directly connecting a micro-electro-mechanical system (MEMS) sensor and a readout integrated circuit (ROIC) for signal processing. In addition, to prevent exposure, a non-conductive liquid silicone was injected into the sensor and the entire ROIC using a pipette. The packaging proceeded to block from the outside. Performing such packaging, comparing simple contact with strong contact, and confirming that the measured pulse wavelength appears accurately.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.274-274
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• 2008

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-SiC/SOI pressure sensor presents a high-sensitivity and excellent temperature stability.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.350-351
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• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.