• 한국진공학회지
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• 제15권6호
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• pp.619-623
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• 2006

FBAR(Film Bulk Acoustic Resonator) 소자의 공진특성을 결정하는 가장 중요한 요소는 압전막의 압전성을 들 수 있다. FBAR 압전막으로 유력한 ZnO 압전박막은 (002)면 c-축 우선배향성(preferred orientation)의 정도에 따라서 압전성이 결정된다. 그러므로 ZnO 박막의 우선배향성에 관한 연구는 많은 연구자들의 관심사가 되어왔다. 본 논문에서는 ZnO 보조씨드충(helped seed layer)을 이용하여 ZnO 압전박막의 우선배향성에 대하여 조사하였으며, rocking curve의 표준편차$(\sigma)$ 값이 $1.15^{\circ}$인 주상형 결정립을 가진 c-축 ZnO 압전박막이 우수한 압전특성을 나타내는 것을 확인하였다.

• Structural Engineering and Mechanics
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• 제42권5호
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• pp.677-699
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• 2012

This article studies the secondary resonances of a clamped-clamped microresonator under combined electrostatic and piezoelectric actuations. The electrostatic actuation is induced by applying the AC-DC voltage between the microbeam and the electrode plate that lies at the opposite side of the microbeam. The piezoelectric actuation is induced by applying the DC voltage between upper and lower sides of piezoelectric layer. It is assumed that the neutral axis of bending is stretched when the microbeam is deflected. The drift effect of piezoelectric layer (the phenomenon where there is a slow increase of the free strain after the application of a DC field) is neglected. The equations of motion are solved by using the multiple scale perturbation method. The system possesses a subharmonic resonance of order one-half and a superharmonic resonance of order two. It is shown that using the DC piezoelectric actuation, the sensitivity of AC-DC electrostatically actuated microresonator under subharmonic and superharmonic resonances may be tuned. In addition, it is shown that the tuning domain of the microbeam under combined electrostatic and piezoelectric actuations at subharmonic and superharmonic conditions is larger than the tuning domain of microbeam under only the electrostatic actuation.

• 한국위성정보통신학회논문지
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• 제6권1호
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• pp.28-31
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• 2011

본 논문에서는 d33 모드로 구동하여 우수한 성능을 가지는 RF-MEMS 스위치의 구현을 위한 희생층과 구조층의 조합으로서 DLC와 포토레지스트를 제안하였다. 포토레지스트의 경화현상을 방지하기 위하여 DLC 구조층은 상온에서 RF-PECVD 방법을 이용하여 증착하였다. 그리고 PZT 압전층은 RF 마그네트론 스퍼터링 방법을 이용하여 상온에서 구조층 위에 증착하였으며, 희생층의 제거 후 결정화를 위하여 급속 열처리 (RTA) 장비를 이용하여 후 열처리하였다. PZT의 결정화 과정과 DLC의 기계적 성질의 변화를 다양한 온도조건에 따라 분석한 결과 DLC는 PZT의 결정화 온도까지 영률과 강도면에서 우수한 특성을 나타냄을 확인하였다. 또한 포토레지스트를 사용함으로서 공정을 단순화하고 낮은 비용으로 제작이 가능하였다.

• 한국전기전자재료학회논문지
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• 제21권6호
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• pp.503-508
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• 2008

In order to reduce the piezoelectric field originated from the well layer which resides in InGaN/GaN light emitting diode, InGaN/GaN superlattice buffer layers were grown at the bottom and the top of the active layer. Measuring the photoluminescence spectra with different reverse bias voltages clearly revealed the condition of the flat band under which the transition energy is maximized and the linewidth is minimized. Accordingly, the piezoelectric field of $In_{0.15}Ga_{0.85}N$ in our sample was estimated as -1.08 MV/cm. It is less than half the value reported in the previous studies, and it is evidenced that the strain has reduced due to the superlattice buffer layers.

• 한국정밀공학회지
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• 제19권11호
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• pp.120-128
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• 2002

Interfacial cracks in a piezoelectric layer bonded to dissimilar elastic layers under the combined anti-plane mechanical shear and in-plane electrical leadings are considered. By using Fourier cosine transform, the mixed boundary value problem is reduced to a singular integral equation which is solved numerically to determine the stress intensity factors. Numerical results for the effects of the material properties and layer geometries on the stress intensity factors are obtained.

• Smart Structures and Systems
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• 제4권1호
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• pp.35-46
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• 2008

In this paper the authors address the problem of comparing two different smart damping techniques using the numerical modelling of the electro-mechanical impedance for plate structures partially treated with active constrained layer damping treatments. The paper summarizes the modelling procedures including a finite element formulation capable of accounting for the observed behaviour. The example used is a smart cantilever plate structure containing a viscoelastic material (VEM) layer sandwiched between a piezoelectric constrained layer and the host vibrating plate. Comparisons are made between active constrained layer and active damping only and based on the resonance frequency amplitudes of the electrical admittance numerically evaluated at the surface of the piezoelectric model of the vibrating structure.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.204-209
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• 2000

It is the first step to establish the exact vibration model of the structure when constructing the smart structure with desired vibration scheme. In this paper, vibration model of beam with piezoelectric element boned on the surface is presented by considering the thickness effect of the bond layer. In contrast to the previous papers which neglect the effect of bond layer, the presented vibration model considers the effect of bond layer assuming the prefect bond condition. The perfect bond condition is tested by comparing the controllability of beams with three types of bond layer. An optimal vibration control of the beam can be performed when there exists perfect-bond condition between the piezoelectric element and the main structure.

• Advances in nano research
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• 제13권3호
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• pp.233-245
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• 2022

Resently, the use of smart structures has been heightened up rapidly. For this issue, vibration analysis related to a graphene nanoplatelet composite (GPLRC) nanodisk which is attached to a piezoelectric layer and is subjected to thermal loads is explored in the current paper. The formulation of this study is obtained through the energy method and nonlocal strain gradient theory, and then it is solved employing generalized differential quadrature method (GDQM). Halpin-Tsai model in addition to the mixture's rule are utilized to capture the material properties related to the reinforced composite layer. The compatibility conditions are presented for exhibiting the perfect bounding between two layers. The results of this study are validated by employing the other published articles. The impact of such parameters as external voltage, the radius ratio, temperature difference, and nonlocality on the vibrational frequency of the system is investigated in detail.

• Structural Engineering and Mechanics
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• 제89권6호
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• pp.571-578
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• 2024

The bistable thin cylindrical shell is developable structure with the ability to transition between its two stable configurations. This structure offers significant potential applications due to its excellent deformability. In this paper, the composite thin cylindrical shell consisting of the composite layer and the piezoelectric layer was investigated. The material and geometric parameters of the shell were found to influence its stable characteristics. The analysis model of the composite thin cylindrical shell incorporating the piezoelectric layer was developed, and the expressions for its strain energy were derived. By applying the minimum energy principle, the impact of the electric field intensity on the bi-stable behaviors of the cylindrical shell was analyzed. The results showed that the shell exhibited the bistability only under the appropriate electric field strength. And the accuracy of the theoretical prediction was verified by simulation experiments. This study provides an important reference for the application of deployable structures.

• 대한기계학회논문집A
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• 제32권10호
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• pp.856-865
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• 2008

Damage mechanisms in bending piezoelectric actuators under electric fatigue loading are addressed in this work with the aid of an acoustic emission (AE) technique. Electric cyclic fatigue tests have been performed up to $10^7$ cycles on the fabricated bending piezoelectric actuators. An applied electric loading range is from -6 kV/cm to +6 kV/cm, which is below the coercive field strength of the PZT ceramic. To confirm the fatigue damage onset and its pathway, the source location and distributions of the AE behavior in terms of count rate and amplitude are analyzed over the fatigue range. It is concluded that electric cyclic loading leads to fatigue damages such as transgranular damages and intergranular cracking in the surface of the PZT ceramic layer, and intergranular cracking even develops into the PZ inner layer, thereby degrading the displacement performance. However, this fatigue damage and cracking do not cause the final failure of the bending piezoelectric actuator loaded up to $10^7$ cycles. Investigations of the AE behavior and the linear AE source location reveal that the onset time of the fatigue damage varies considerably depending on the existence of a glass-epoxy protecting layer.