• 제목/요약/키워드: Piezoelectric layer

검색결과 352건 처리시간 0.026초

마이크로 스트립라인 집중소자를 이용한 일체형 SAW 듀플렉서의 최적설계 및 실험 (Optimal Design and Experiment of One Chip Type SAW Duplexers using Micro_Strip Line Lumped Elements)

  • 이승희;노용래
    • 한국전기전자재료학회논문지
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    • 제16권7호
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    • pp.647-655
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    • 2003
  • Commonly used SAW duplexers have a difficulty on manufacture so that a transmission line is printed on the package or an LTCC multi-layer is needed because a quarter-wave transmission line which is a kind of an isolation network is applied to the SAW duplexers. In this study, new structures of one chip type SAW duplexers are proposed. In the proposed structure, Tx and Rx SAW ladder filters and isolation networks are located on a single 36LiTaO$_3$ piezoelectric substrate. The manufacture process is very simple than commonly used product. It is possible to improve tile performance by means of optimizing the micro-strip line lumped elements. It is easy to integrate and modulate with other surrounding components. The optimal design techniques can be applied to other kind of multi-port devices.

Using nano-micro-control technology to improve breathing pressure in vocal music technique teaching innovation

  • Jiayue Cui;Hongliang Zhang
    • Advances in nano research
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    • 제15권3호
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    • pp.239-251
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    • 2023
  • In the present study, we aim to use nanotechnology sensors/actuators to capture pressure and frequency of voice singers and to send signals for improving breathing pressure. In this regard, a circular composite structure having 3 different layers are used. The core layer is nano-composite material reinforced with graphene nanoplatelets. The face sheets are piezo electric materials connected to electrical circuit capable of measuring and applying voltage to the piezoelectric layers. This sensors have extremely smaller size than conventional sensors attached to the neck of singer and, hence, minimizes the influences on the output voice of the singer. A brief theoretical framework are presented for nonlocal strain gradient theory and geometry of the sensor is described in detail. The controlling procedure along with experimental results on 20 amateur and professional singer participants are also presented. The results of the study indicate that the participants could gain benefit from the device for improving their ability in phonation and keeping their frequency at a constant level although they have difficulty in the beginning of the experiment getting used to the device.

상온에서 성막한 고감도의 Al1-xScxN 박막의 압력 감지 특성 (Pressure Sensing Properties of Al1-xScxN Thin Films Sputtered at Room Temperature)

  • 석혜원;김세기;강양구;이영진;홍연우;주병권
    • 센서학회지
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    • 제23권6호
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    • pp.420-424
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    • 2014
  • Aluminum-scandium nitride ($Al_{1-x}Sc_xN$) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 50% $N_2$/Ar. The effect of Sc-doping on the structure and piezoelectric properties of AlN films has been investigated using SEM, XRD, surface profiler and pressure-voltage measurements. The as-deposited AlN films showed polycrystalline phase, and the Sc-doped AlN film, the peak of AlN (002) plane and the crystallinity became very strong. With Sc-doping, the crystal size of AlN film was grown from ~20 nm to ~100 nm. The output signal voltage of AlN sensor showed a linear behavior between 15~65 mV, and output signal voltage of Sc-doped AlN sensor was increased over 7 times. The pressure-sensing sensitivity of AlN film was calculated about 10.6mV/MPa, and $Al_{0.88}Sc_{0.12}N$ film was calculated about 76 mV/MPa.

3 차원 가정변형률 솔리드 요소를 이용한 압전 작동기/감지기 해석 (Papers : Three - dimensional assumed strain solid element for piezoelectric actuator/sensor analysis)

  • 조병찬;이상기;박훈철;윤광준;구남서
    • 한국항공우주학회지
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    • 제30권2호
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    • pp.67-74
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    • 2002
  • 본 논문에서는 18절점 가정 변형률 솔리드 요소를 이용하여, 기계적 물리량과 전기적 물리량이 완전히 연성된 정적 문제를 해석할 수 있는 유한요소 정식화 과정을 유도하였다. 요소 결점의 축방향 변위 자유도 외에 전기 자유도를 추가하여 주어진 변위와 하중에 의해 발생하는 유도전압을 계산할 수 있다. 또한 가정 변형률 요소를 사용함으로써 박판형 구조물을 모델할 때 발생할 수 있는 잠김현상을 해소하였다. 유도된 유한요소 정식을 바탕으로 프로그램을 작성하였으며, 몇가지 수치예제에 적용하여 작성된 코드를 검증하였다. 본 요소를 이용하여, 여러 가지 변수가 THUNDER의 작동변위에 미치는 영향을 분석하였다. 이를 통하여, 특정한 재료와 곡률을 갖출 경우 THUNDER의 작동성능이 향상됨을 확인하였다.

Piezoelectric immunosensor for the detection of Edwardsiellosis

  • Hong, Sung-Rok;Choi, Suk-Jung;Jeong, Hyun-Do;Hong, Su-Hee
    • 한국어병학회지
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    • 제20권3호
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    • pp.307-313
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    • 2007
  • In this study, a QCM biosensor was made to detect Edwardsiella tarda (E. tarda) using a specific antibody. A 9 MHz AT-cut piezoelectric wafer layered with two gold electrodes of 5mm diameter had a reproducibility of 0.1 Hz in frequency response and was used as the transducer of the QCM biosensor. Self assembled layer (SAM) was conformed on a quartz crystal by treating with 3-mer-captopropionic acid (MPA) and activated with N-ethyl-N'-(3-dimethyl-aminopropyl) carbodiimide (EDC) and N-hydroxysuccinimide (NHS). The resulting NHS group was further converted to hydrazide by the reaction with hydrazine. Aldehyde group was introduced into the carbohydrate moiety of anti-E. tarda antibody by the reaction with periodic acid and was used to immobilise the antibody through the reaction with hydrazide group on the electrode surface. A baseline was established in the presence of phosphate-buffered saline (PBS) and a resonant frequency (F1) was measured. Sample was added to the sensor surface and second resonant frequency (F2) was measured after unbound substances were washed out with PBS several times. Finally, the frequency shift (ΔF) representing the mass change was calculated by subtracting F2 from F1. After adding the oxidized anti-E. tarda antibody to the electrode surface containing hydrazide group, frequency shift of 288.811.4 Hz (mean S.E) was observed, thus proving that considerable amount of antibody was immobilized. In the immunoassay test, the frequency shift of 1877.75 Hz, 580.67 Hz, 221.39 Hz, 7.671.83 Hz (mean S.E) were observed at doses of 1000, 500, 100, 50 g of bacterial cells, respectively. It was also demonstrated that the prepared sensor chip was stable enough to withstand repeated surface regeneration with 0.2 M Tris-glycine and 1 % DMSO, pH 2.3 more than ten times.

PVDF 필름 위에 제작된 고전도도 Ag 나노와이어 투명전극 특성 연구 (Characterization of Ag Nanowire Transparent Electrode Fabricated on PVDF Film)

  • 라용호;박혜림;안소연;김진호;전대우;김선욱;이미재;황종희;임태영;이영진
    • 센서학회지
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    • 제28권6호
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    • pp.366-370
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    • 2019
  • In this study, we have successfully fabricated a highly conductive transparent electrode using Ag nanowires, based on piezoelectric polyvinylidene difluoride (PVDF) film, that can be applied as transparent and flexible speakers. The structural morphology of the Ag nanowires was confirmed by a detailed scanning electron microscopy. Ultraviolet-visible spectroscopy demonstrated that the transparent electrode fabricated by the Ag nanowires exhibited a transmittance of above 70%. The transparent electrode also showed very low sheet resistance with high flexibility. We have further developed an anti-oxidation coating layer by using a tetraethyl orthosilicate-poly trimethyloxyphenylsilane (TEOS-PTMS) slurry technique. It was confirmed that the transmittance and sheet resistance of the antioxidant film depends critically on the humidity of the film surface. We believe such Ag nanowire electrodes are a very promising next-generation transparent electrode technology that can be used in future flexible and transparent devices.

수중 SAW Device의 최적 설계법 (Optimal Design of Underwater SAW Devices)

  • 노용래
    • 한국음향학회지
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    • 제9권4호
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    • pp.18-32
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    • 1990
  • 최근 신호 처리 기기와 센서로서 각광을 받고 있는 SAW Device 는 때론 목적에 따라 수중에서 사용해야 할 때가 있다. 그러나 유체내의 고체 표면을 전파하는 표면파의 경우, 유체내로의 에너지 손실로 인해 설계상에 많은 어려움을 주고 있다. 따라서 본 연구에서는 이러한 어려움을 극복할 수 있는 최적 설계법으로서, 컴퓨터 모형해석을 통해 수중에서 압전물질에 의한 표면파의 최대 발진 효율, 최소 전파 감쇄율, 그리고 pure mode 전파를 이룰 수 있는 SAW Device 의 최적 geometry, 즉 초적 압전 결정 평면, 표면과 전파 방향, 그리고 무차원 전파 계수 들을 구하였다. 본 논문에서는 표면파가 전파하는 고체 재료로서 PZT와 PVDF 적층, 그리고 쇠 하부층을 사용하였으나, 이 설계법은 임의의 유체층과 고체층의 조합에도 적용할 수 있다. 동일한 기술은 수중음향 계측기, antifouling, 그리고 산업 및 의료 분야 등에 쓰이는 센서와 발진기의 설계에도 바로 응용할 수 있다.

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Experiment of an ABS-type control strategy for semi-active friction isolation systems

  • Lu, Lyan-Ywan;Lin, Ging-Long;Lin, Chen-Yu
    • Smart Structures and Systems
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    • 제8권5호
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    • pp.501-524
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    • 2011
  • Recent studies have discovered that a conventional passive isolation system may suffer from an excessive isolator displacement when subjected to a near-fault earthquake that usually has a long-period velocity pulse waveform. Semi-active isolation using variable friction dampers (VFD), which requires a suitable control law, may provide a solution to this problem. To control the VFD in a semi-active isolation system more efficiently, this paper investigates experimentally the possible use of a control law whose control logic is similar to that of the anti-lock braking systems (ABS) widely used in the automobile industry. This ABS-type controller has the advantages of being simple and easily implemented, because it only requires the measurement of the isolation-layer velocity and does not require system modeling for gain design. Most importantly, it does not interfere with the isolation period, which usually decides the isolation efficiency. In order to verify its feasibility and effectiveness, the ABS-type controller was implemented on a variable-friction isolation system whose slip force is regulated by an embedded piezoelectric actuator, and a seismic simulation test was conducted for this isolation system. The experimental results demonstrate that, as compared to a passive isolation system with various levels of added damping, the semi-active isolation system using the ABS-type controller has the better overall performance when both the far-field and the near-fault earthquakes with different PGA levels are considered.

압전박막을 이용한 감압전장효과 트랜지스터(PSFET)의 동작 특성 (The Operational Characteristics of a Pressure Sensitive FET Sensor using Piezoelectric Thin Films)

  • 양규석;조병욱;권대혁;남기홍;손병기
    • 센서학회지
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    • 제4권2호
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    • pp.7-13
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    • 1995
  • MOSFET의 전장효과와 압전물질의 압전효과를 결합한 새로운 FET형 반도체압력소자(PSFET : pressure sensitive field effect transistor)를 제조하고 동작 특성을 조사하였다. PSFET의 압전박막은 RF 마그네트론 스퍼터링으로 ZnO박막을 약 $5000{\AA}$ 게이트 위에 성막하였다. ZnO 압전박막의 최적 c-축 배향분극 구조를 얻기 위한 막 제조조건은 기판온도가 $300^{\circ}C$, RF 전력이 140W, 작업 분위기압은 5mtorr였으며, 플라즈마가스는 아르곤이었다. 제조된 PSFET는 적용된 압력범위($1{\times}10^{5}\;Pa{\sim}4{\times}10^{5}\;Pa$)에서 비록 감도는 낮으나 비교적 안정한 동작특성을 나타내었다.

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Synthesis of High-Aspect-Ratio BaTiO3 Platelets by Topochemical Conversion and Fabrication of Textured Pb(Mg1/3Nb2/3)O3-32.5PbTiO3 Ceramics

  • Zhao, Wei;E, Lei;Ya, Jing;Liu, Zhifeng;Zhou, Heping
    • Bulletin of the Korean Chemical Society
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    • 제33권7호
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    • pp.2305-2308
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    • 2012
  • Perovskite structured barium titanate particles ($BaTiO_3$) platelets were synthesized by molten salt synthesis and topochemical microcrystal conversion. As the precursors of $BaTiO_3$, plate-like $BaBi_4Ti_4O_{15}$ particles were first synthesized by the reaction of $Bi_4Ti_3O_{12}$, $BaCO_3$, and $TiO_2$ at $1080^{\circ}C$ for 3 h in $BaCl_2$-KCl molten salt. After the topochemical reactions, layer-structured $BaBi_4Ti_4O_{15}$ particles transformed to the perovskite $BaTiO_3$ platelets. $BaTiO_3$ particles with thickness of approximately $0.5{\mu}m$ and a length of $10-15{\mu}m$ retained the morphology feature of the $BaBi_4Ti_4O_{15}$ precursor. For <001> $Pb(Mg_{1/3}Nb_{2/3})O_3-32.5PbTiO_3$ (PMNT)-5 wt % PbO piezoelectric ceramics textured with 5 vol % of $BaTiO_3$ templates, the Lotgering factor reached 0.82, and $d_{33}$ was 870 pC/N.