• Title/Summary/Keyword: Photolithography Process

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Advanced Process Control of the Critical Dimension in Photolithography

  • Wu, Chien-Feng;Hung, Chih-Ming;Chen, Juhn-Horng;Lee, An-Chen
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.1
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    • pp.12-18
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    • 2008
  • This paper describes two run-to-run controllers, a nonlinear multiple exponential-weight moving-average (NMEWMA) controller and a dynamic model-tuning minimum-variance (DMTMV) controller, for photolithography processes. The relationships between the input recipes (exposure dose and focus) and output variables (critical dimensions) were formed using an experimental design method, and the photolithography process model was built using a multiple regression analysis. Both the NMEWMA and DMTMV controllers could update the process model and obtain the optimal recipes for the next run. Quantified improvements were obtained from simulations and real photolithography processes.

Neural network simulator for semiconductor manufacturing : Case study - photolithography process overlay parameters (신경망을 이용한 반도체 공정 시뮬레이터 : 포토공정 오버레이 사례연구)

  • Park Sanghoon;Seo Sanghyok;Kim Jihyun;Kim Sung-Shick
    • Journal of the Korea Society for Simulation
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    • v.14 no.4
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    • pp.55-68
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    • 2005
  • The advancement in semiconductor technology is leading toward smaller critical dimension designs and larger wafer manufactures. Due to such phenomena, semiconductor industry is in need of an accurate control of the process. Photolithography is one of the key processes where the pattern of each layer is formed. In this process, precise superposition of the current layer to the previous layer is critical. Therefore overlay parameters of the semiconductor photolithography process is targeted for this research. The complex relationship among the input parameters and the output metrologies is difficult to understand and harder yet to model. Because of the superiority in modeling multi-nonlinear relationships, neural networks is used for the simulator modeling. For training the neural networks, conjugate gradient method is employed. An experiment is performed to evaluate the performance among the proposed neural network simulator, stepwise regression model, and the currently practiced prediction model from the test site.

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Photolithography process investment of water soluble photoresist and Organic thin film by using it. (수용성 포토레지스트와 이를 이용한 유기 박막의 photolithography 공정 연구)

  • Kim, Kwang-Hyun;Kim, Gun-Ju;Ryu, Ki.-Sung;Kim, Tae-Ho;Song, Jung-Kun
    • Proceedings of the IEEK Conference
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    • 2004.06b
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    • pp.497-500
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    • 2004
  • In this paper, we developed a new photolithography process which used a water-soluble photoresist instead of organic solvent soluble photoresist, defined pentacene thin film. And pentacene OTFTs were fabricated with the water- soluble photolithography process.

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Selective surface modification for biochip with micromirror array (마이크로미러를 사용한 바이오칩의 선택적 표면 개질을 위한 광변조 실험)

  • Lee, Kook-Nyung;Sin, Dong-Sik;Lee, Yoon-Sik;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.2257-2259
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    • 2000
  • This paper reports on the design, fabrication and driving experiment of micro mirror array(MMA) for lithography process to apply to biochip fabrication Photolithography technology is applied to activate specific area on the surface of modified glass surface, DNA monomers are bound on the activated area of the glass surface. After repeat of DNA monomer synthesizing process, DNA single strand probes could be solid-synthesized on the glass substrate. Without using photomask, photolithography process is tried using micro mirror array(MMA). Photomask or mask alignment is not required in maskless photolithography process using micro mirror array.

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Continuous Photolithography by Roll-Type Mask and Applications (롤타입 마스크를 이용한 연속 포토리소그래피 기술과 그 응용)

  • Kwak, Moon-Kyu
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.10
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    • pp.1011-1017
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    • 2012
  • We report the development of an optical micro-nanolithography method by using a roll-type mask. It includes phase-shift lithography and photolithography for realizing various target dimensions. For sub-wavelength resolution, a structure is achieved using the near-field exposure of a photoresist through a cylindrical phase-mask, allowing high-throughput continuous patterning. By using a film-type metal mask, continuous photolithography was achieved, and this method could be used to control the period of resultant patterns in real time by changing the rotating speed of the cylinder mask. As an application, we present the fabrication of a transparent electrode in the form of a metallic mesh by using the developed roll-type photolithography process. As a result, a transparent conductor with good properties was achieved by using a recently built cylindrical phase-shift lithography prototype, which was designed for patterning on 100-mm2 substrates.

A Study on the 3-D Airflow and Dynamic Cross Contamination in the Photolithography Process Cleanroom (광식각공정이 있는 클린룸에서의 3차원 기류 및 동적교차오염에 관한 연구)

  • Noh, Kwang-Chul;Oh, Myung-Do;Lee, Seung-Chul
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.28 no.5
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    • pp.560-568
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    • 2004
  • We performed the numerical study on the characteristics of the 3-D airflow and dynamic cross contamination in the photolithography process cleanroom. The nonunifurmity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. From the numerical results, we knew that the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the adjustment of dampers and the global cross contamination varies with the location of source and the passage of time through the concentration ratio.

A Numerical Study on the Characteristics of Airflow and Cross Contamination in the Photolithography Process Cleanroom (광식각공정 클린룸에서의 기류 및 교차오염에 대한 수치적 연구)

  • Noh, Kwang-Chul;Lee, Seung-Chul;Oh, Myung-Do
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.151-156
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    • 2003
  • We performed the numerical study on the characteristics of the airflow and cross contamination in the photolithography process cleanroom. The nonuniformity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. We knew that the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the adjustment of dampers. And the numerical result showed that the global cross contamination varies with the location of source and the passage of time.

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A study on Photolithography of band pass filter for communication devices (통신기기용 대역통과필터의 공정에 관한 연구)

  • Lee, Dong-Yoon;Shin, Yong-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.247-250
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    • 2002
  • SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

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Simulation Software for Semiconductor Photolithography Equipment: TrackSim (반도체 포토 장비의 시뮬레이션 소프트웨어: TrackSim)

  • Yoon, Hyun-Joong;Kim, Jin-Gon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.8
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    • pp.3319-3325
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    • 2012
  • This paper describes the development of the TrackSim, which is a discrete event simulation tool for photolithography equipment of semiconductor industry. The TrackSim is focused on the accurate simulation model of the photolithography equipment and easy-to-use user interfaces. TrackSim provides 3D simulation environment for evaluating, validating, and scheduling the photolithography process. One of the major characteristics of TrackSim is in that it is developed based on Applied Materials' AutoMod, a discrete event simulation software broadly used in semiconductor industry. Accordingly, the photolithography model of TrackSim can be used to perform simulation connected with other simulation models built with AutoMod.