• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.15 no.1
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• pp.98-103
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• 2001

In this parer, the removal rate of NO in a reactor is rreasured first using nonthermal plasma generated from a wire-cylinder type reactor, then the discharge image and horizontal signal strength and vertical signal strength of NO particles is observed using ICCD(Intensified Charged Coupled Device) carrera It was fOlmd that NO rerroval rate was iflLTeased with NO concentration c1ecreasing, and that honzontal signal strength and vertical signal strength were also increased with NO concentration decreasing. Especially, this research is a1!Tffl at clarifying the discharge mechanism of NO particles by observing the images of AC discharge wnen the nonthermal plasma generated by an discharge was used.

• Korean Journal of Materials Research
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• v.17 no.8
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• pp.397-401
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• 2007

Fe based SOFC(Solid Oxide Fuel Cell) interconnector was fabricated by using the spark plasma sintering process and its microstructure and mechanical properties were investigated in this study. To fabricate the interconnector, the Fe-26Cr powder was mixed with the Ag (5, 10, 20wt.%) particles. In the Fe-26Cr-Ag sintered bodies, the Ag particles were almost dispersed at the grain boundary of the Fe-26Cr. The sintered bodies have the density of 87.2-97.5%, the density increases with increasing Ag content at sintering temperature of $850^{\circ}C$. Also, the compressive yield strength increases with increasing Ag content at the same sintering temperature.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.192-194
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• 2003

In this paper, we present a 2-Dimensional simulation model of the discharge in an ac plasma display panel cell. Therefore, we study a ramp reset waveform in an ac plasma display panel discharge cell using 2-Dimensional simulation. Finally We research a connection between priming particles' density and stability.

• Journal of the Korean Ceramic Society
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• v.53 no.6
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• pp.641-646
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• 2016

The effects of water addition on $Y_2O_3$ coatings or thick films prepared by plasma suspension spray (SPS) have been investigated. Water addition in suspension media was found to be effective to control the color of a $Y_2O_3$ coating prepared by SPS. The color changed with water addition at the shortest stand-off distance of 50 mm even if samples had the same crystalline phase. Change was not correlated with fragmentation behavior of liquid suspension inside the plasma jet. Water content over 50 vol% was found to produce unmelted particles, indicating that water suppressed heat transfer to the particles. However, plasma jet temperature was not affected. Instead, the coating fabricated with water addition has higher oxygen and lower carbon content compared to these characteristics of the coating without water addition. This was attributed to the retarded complete evaporation of liquid media from the suspension droplet, resulting in inhibition of excessive heating and evaporation of the molten $Y_2O_3$ droplet. In this regard, crystalline phase development with respect to stand-off distance and water addition was discussed.

• Journal of The Korean Astronomical Society
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• v.34 no.4
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• pp.225-230
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• 2001

Rarefied cosmic plasmas generally do not achieve thermodynamic equilibria, and a natural consequence of this is the presence of a significant population of charged particles with energies well above those of the bulk population. These are exemplified by the galactic cosmic rays, but the importance of these high energy populations extends well beyond that context. I review here some of the basic issues associated with the propagation and acceleration of cosmic rays, especially in the context of collisionless plasma shocks.

• 전기의세계
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• v.16 no.4
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• pp.6-10
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• 1967

The deionization behavior in plasma during arc discharge of mercury arc rectifier depends on ambipolar diffusion. It is shown here in the quantitative analysis that a diameter of arc path which affects the mercury arc rectifier characteristics is related with the density of charged particles in plasma, the particle number of extruguish ion, the deionizing time and the recovering time of grid controlled ability. The conclusion would he useful for designing a diameter of arc path of mercury arc rectifier by quantitative method. And it could be applied to the designing of electrical apparatus using arc discharge phenomena.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.323-324
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• 2006

The nanostructure control of $Si_3N_4$ ceramics can be achieved by using fine starting powder and retardation of grain growth. The spark plasma sintering technique is useful to retard the grain growth by rapid heating. In the present work, the change of microstructure was investigated with emphasis on the particle size of starting powder, the amount of sintering additive and the heating schedule. The rapid heating by spark plasma sintering gave the fine microstructure consisting of equiaxed grains with the same size as starting particles. The spark plasma sintering of $Si_3N_4$ fine powder was effective to control the microstrucutre on nano-meter level.

• Advances in aircraft and spacecraft science
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• v.1 no.1
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• pp.1-14
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• 2014

Physico-chemical changes of the plasma modified titanium alloy [Ti-6Al-4V] surface were studied with respect to their crystallographic changes by X-Ray Diffraction (XRD) and Scanning Electron Microscope (SEM).The plasma-treatment of surface was carried out to enhance adhesion of high performance nano reinforced epoxy adhesive, a phenomenon that was manifested in subsequent experimental results. The enhancement of adhesion as a consequence of improved spreading and wetting on metal surface was studied by contact angle (sessile drop method) and surface energy determination, which shows a distinct increase in polar component of surface energy. The synergism in bond strength was established by analyzing the lap-shear strength of titanium laminate. The extent of enhancement in thermal stability of the dispersed nanosilica particles reinforced epoxy adhesive was studied by Thermo Gravimetric Analysis (TGA), which shows an increase in onset of degradation and high amount of residuals at the high temperature range under study. The fractured surfaces of the joint were examined by Scanning electron microscope (SEM).

• Korean Chemical Engineering Research
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• v.53 no.5
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• pp.614-619
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• 2015

A plasma surface modification of powders has been carried out in a circulating fluidized bed reactor under reduced pressure. Polystyrene (PS) particles treated by plasma are grafted with polyethylene glycol (PEG) on the surface. The virgin, plasma-treated and grafted powders were characterized by DPPH method, FTIR, SEM and contact angle meter. The plasma-treated PS powders have well formed peroxide on the surface, By PEG grafting polymerization, PEG is well grafted and dispersed on the surface of the plasma-treated PS powders. The PEG-g-PS particle was successfully synthesized using the plasma circulating fluidized bed reactor under reduced pressure.