• 제목/요약/키워드: Particle beam

검색결과 386건 처리시간 0.024초

다양한 조건의 저압 공정 모니터링을 위한 입자 집속 장치 개발 (Development of particle focusing device to monitor various low pressure processes)

  • 김명준;김동빈;강상우;김태성
    • 한국입자에어로졸학회지
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    • 제13권2호
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    • pp.53-63
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    • 2017
  • As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

Vertical Change in Extinction and Atmospheric Particle Size in the Boundary Layers over Beijing: Balloon-borne Measurement

  • Chen, Bin;Shi, Guang-Yu;Yamada, Maromu;Zhang, Dai-Zhou;Hayashi, Masahiko;Iwasaka, Yasunobu
    • Asian Journal of Atmospheric Environment
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    • 제4권3호
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    • pp.141-149
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    • 2010
  • Aerosol size and number concentration were observed in the atmospheric boundary layer over Beijing (from near the ground to 1,200 m) on March 15 (a clear day) and 16 (a dusty day), 2005. The results were further compared with lidar measurements in order to understand the dependency of extinction on the particle size distribution and their vertical changes. The boundary layer atmosphere was composed of several sub-layers, and a dry air layer appeared between 400 and 1,000 m under the influence of dust event. In this dry air layer, the concentration of the fine-mode particles (diameter smaller than $1.0\;{\mu}m$) was slightly lower than the value on the clear day, while the concentration of coarse-mode particles (diameter larger than $1.0\;{\mu}m$) was remarkably higher than that on the clear day. This situation was attributed to the inflow of an air mass containing large amounts of Asian dust particles and a smaller amount of fine-mode particles. The results strongly suggest that the fine-mode particles affect light extinction even in the dusty atmosphere. However, quantitatively the relation between extinction and particle concentration is not satisfied under the dusty atmospheric conditions since laser beam attenuates in the atmosphere with high concentration of particles. Laser beam attenuation effect becomes larger in the relation between extinction and coarse particle content comparing the relation between extinction and fine particle content. To clarify this problem technically, future in situ measurements such as balloon-borne lidar are suggested. Here extinction was measured at 532 nm wavelength. Measurements of extinction at other wavelengths are desired in the future.

Particle Swarm Optimization을 이용한 비균일 급전, 비균등 간격의 선형 어레이 설계 (Design of a Randomly Excited and Randomly Spaced Linear Array Using the Particle Swarm Optimization)

  • 김철복;장재삼;이호상;김재훈;박승배;이문수
    • 대한전자공학회논문지TC
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    • 제45권11호
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    • pp.45-54
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    • 2008
  • 본 논문에서는 particle swarm optimization (PSO)을 사용하여 가장 낮은 SLL같을 갖거나 가장 좁은 빔폭을 가지는 비균일 급전, 비균등 간격의 선형 어레이를 설계하였다. 어레이 소자의 급전 크기와 급전 소자간의 간격을 조절하기 위해 변수로 지정하였다. 두 가지 변수를 동시에 무작위로 조절하여 빔패턴을 최적화하였다. 빔패턴의 널 포인트를 기준으로 나누어 각각의 사이드로브에 가중치를 부여함으로써 적합도 함수의 성능을 향상시켰고, 이를 이용하여 최적의 빔패턴을 얻을 수 있었다. 이 때, 가중치 값과 빔패턴을 나누는 각은 여러 번의 시도를 통해 얻을 수 있었다. SLL 뿐만 아니라 빔폭까지 고려하기 위해 fitness function에 추가적인 항목 ${\beta}{\times}BW$을 첨가하였다. 이로써, 가장 낮은 SLL값을 갖거나 가장 좁은 빔폭을 갖는 빔패턴을 갖는 어레이를 설계하였다. 10개의 어레이 소자를 이용하여 최적화 하였을 때, 전자는 -43dB의 SLL값과 $32.2^{\circ}$의 빔폭을 가졌고, 후자는 -26dB의 SLL값과 $24.2^{\circ}$의 빔폭을 가졌다.

Vibration Based Structural Damage Detection Technique using Particle Swarm Optimization with Incremental Swarm Size

  • Nanda, Bharadwaj;Maity, Damodar;Maiti, Dipak Kumar
    • International Journal of Aeronautical and Space Sciences
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    • 제13권3호
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    • pp.323-331
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    • 2012
  • A simple and robust methodology is presented to determine the location and amount of crack in beam like structures based on the incremental particle swarm optimization technique. A comparison is made for assessing the performance of standard particle swarm optimization and the incremental particle swarm optimization technique for detecting crack in structural members. The objective function is formulated using the measured natural frequency of the intact structure and the frequency obtained from the finite element simulation. The outcomes of the simulated results demonstrate that the developed method is capable of detecting and estimating the extent of damages with satisfactory precision.

단일 광경로 스캐닝 PIV기법 개발 (Development of the Scanning PIV Method with Single Optical Axis)

  • 김형범
    • 대한기계학회논문집B
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    • 제31권2호
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    • pp.181-187
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    • 2007
  • Conventional PIV method uses two optical axis configuration during the image grabbing process. That is, the illumination plane and the recording plane must be parallel. This configuration is very natural to grab the whole field without the image distortion. In the real problem, it is often to meet the situation when this configuration is hard to be fulfilled. In the present study, the new PIV method which uses only single optical axis to grab the particle images is developed. This new PIV method becomes possible by utilizing the scanning method similar to the echo PIV technique. One particle image of the scanning PIV consists of scanned several line images and by repeating this scanning process, two particle images were grabbed and processed to produce the velocity vectors. An optimization study was performed to find parameters which minimize the measurement errors. The effects of particle diameter, beam overlap ratio and particle number density were investigated.

Design and fabrication of beam dumps at the µSR facility of RAON for high-energy proton absorption

  • Jae Chang Kim;Jae Young Jeong;Kihong Pak;Yong Hyun Kim;Junesic Park;Ju Hahn Lee;Yong Kyun Kim
    • Nuclear Engineering and Technology
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    • 제55권10호
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    • pp.3692-3699
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    • 2023
  • The Rare isotope Accelerator complex for ON-line experiments in Korea houses several accelerator complexes. Among them, the µSR facility will be initially equipped with a 600 MeV and 100 kW proton beam to generate surface muons, and will be upgraded to 400 kW with the same energy. Accelerated proton beams lose approximately 20% of the power at the target, and the remaining power is concentrated in the beam direction. Therefore, to ensure safe operation of the facility, concentrated protons must be distributed and absorbed at the beam dump. Additionally, effective dose levels must be lower than the legal standard, and the beam dumps used at 100 kW should be reused at 400 kW to minimize the generation of radioactive waste. In this study, we introduce a tailored method for designing beam dumps based on the characteristics of the µSR facility. To optimize the geometry, the absorbed power and effective dose were calculated using the MCNP6 code. The temperature and stress were determined using the ANSYS Mechanical code. Thus, the beam dump design consists of six structures when operated at 100 kW, and a 400 kW beam dump consisting of 24 structures was developed by reusing the 100 kW beam dump.

Harmony search based, improved Particle Swarm Optimizer for minimum cost design of semi-rigid steel frames

  • Hadidi, Ali;Rafiee, Amin
    • Structural Engineering and Mechanics
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    • 제50권3호
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    • pp.323-347
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    • 2014
  • This paper proposes a Particle Swarm Optimization (PSO) algorithm, which is improved by making use of the Harmony Search (HS) approach and called HS-PSO algorithm. A computer code is developed for optimal sizing design of non-linear steel frames with various semi-rigid and rigid beam-to-column connections based on the HS-PSO algorithm. The developed code selects suitable sections for beams and columns, from a standard set of steel sections such as American Institute of Steel Construction (AISC) wide-flange W-shapes, such that the minimum total cost, which comprises total member plus connection costs, is obtained. Stress and displacement constraints of AISC-LRFD code together with the size constraints are imposed on the frame in the optimal design procedure. The nonlinear moment-rotation behavior of connections is modeled using the Frye-Morris polynomial model. Moreover, the P-${\Delta}$ effects of beam-column members are taken into account in the non-linear structural analysis. Three benchmark design examples with several types of connections are presented and the results are compared with those of standard PSO and of other researches as well. The comparison shows that the proposed HS-PSO algorithm performs better both than the PSO and the Big Bang-Big Crunch (BB-BC) methods.

Exact poisson distribution in the use of NPB with aiming errors

  • Kim, Joo-Hwan
    • 한국경영과학회:학술대회논문집
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    • 대한산업공학회/한국경영과학회 1995년도 춘계공동학술대회논문집; 전남대학교; 28-29 Apr. 1995
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    • pp.967-973
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    • 1995
  • A neutral particle beam(NPB) aimed at the object and receive a small number of neutron signals at the detector to estimate the mass of an object Since there is uncertainty about the location of the axis of the beam relative to the object, we could have aiming errors which may lead to incorrect information about the object. Under the two assumptions that neutral particle scattering distribution and aiming errors have a circular normal distribution respectively, we have derived an exact probability distribution of neutral particles. It becomes a Poison-power function distribution., We proved monotone likelihood ratio property of tlis distribution. This property can be used to find a criteria for the hypothesis testing problem.

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Precise Measurement of Beam Energy and Range with TOF and Counter Telescope System

  • Nanbu, Shuya;Kanai, Tatsuaki;Kohno, Toshiyuki;Ohno, Yumiko
    • 한국의학물리학회:학술대회논문집
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    • 한국의학물리학회 2002년도 Proceedings
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    • pp.225-227
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    • 2002
  • In order to improve the accuracy of charged-particle radiation therapy, the beam energy was measured precisely using a TOF-system, and the range using a counter telescope system. A Si detector and a Ge detector were used to estimate the range straggling as a $\Delta$E and an E detector, respectively, because they have good energy resolution and the output pulse heights don't depend on the atomic number of detected particles. The results were compared with the theoretical values by a calculation code.

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매연입자의 LII 신호를 이용한 충류확산화염 유동속도 측정 (Flow Velocity Measurement for Laminar Diffusion Flames Utilizing LII Signal from Soot Particles)

  • 이정수;남연우;이원남
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2006년도 제32회 KOSCO SYMPOSIUM 논문집
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    • pp.157-163
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    • 2006
  • A new technique utilizing LII signal for the measurement of flow velocities of laminar diffusion flames has been investigated. Soot particles in ethylene diffusion flames are heated by a modulated Ar-ion laser beam. LII signals and their phase angles are measured using a lock-in amplifier at the different flame heights and the axial flow velocity are obtained from the measured phase angle delay. The measured velocities are similar to those from LDV measurements under the same operating conditions. The effects of laser power, LII signal wavelength, and modulation frequency are not sensitive to the velocity measurement. However, the choice of an optical chopper blade type could affect the measurement result. The use of a 6/5 chopper blade showed the better result that is possibly due to the square shape of modulated laser beam. This study successfully demonstrated that axial flow velocities of laminar diffusion flames can be measured by a new technique utilizing LII signal, which does not need particle seeding unlikely to LDV or PIV techniques.

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