• 제목/요약/키워드: PVD method

검색결과 164건 처리시간 0.037초

A Study on Corrosion Resistance Characteristics of PVD Cr-N Coated Steels by Electrochemical Method

  • Ahn, SeungHo;Yoo, JiHong;Choi, YoonSeok;Kim, JungGu;Han, JeonGun
    • Corrosion Science and Technology
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    • 제2권6호
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    • pp.289-295
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    • 2003
  • The corrosion behavior of Cr-N coated steels with different phases (${\alpha}-Cr$, CrN and $Cr_2N$) deposited by cathodic arc deposition on Hl3 steel was investigated in 3.5% NaCl solution at ambient temperature. Potentiodynamic polarization test, electrochemical impedance spectroscopy (EIS) and scanning electron microscopy (SEM) were the techniques applied to characterize the corrosion behavior. It was found that the CrN coating had a lower current density from potentiodynamic polarization test than others. The porosity, corresponding to the ratio of the polarization resistance of the uncoated and the coated substrate, was higher in the $Cr_2N$ coating than in the other Cr-N coated steels. EIS measurements showed, for the most of Cr-N coated steels, that the Bode plot presented two time constants. Also, the $Cr_2N$ coating represents the characteristic of Warburg behavior after 72hr of immersion. The coating morphologies were examined in planar view and cross-section by SEM analyses and the results were compared with those of the electrochemical measurement. The CrN coating had a dense, columnar grain-sized microstructure with minor intergranular porosity. From the above results, the CrN coating provided a better corrosion protection than the other Cr-N coated steels.

Linear Ion Source를 이용한 Anode Voltage 변화에 따른 DLC 박막특성 (Effect of Anode Voltage on Diamond-like Carbon Thin Film Using Linear Ion Source)

  • 김왕렬;정우창;조형호;박민석;정원섭
    • 한국표면공학회지
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    • 제42권4호
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    • pp.179-185
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    • 2009
  • Diamond-like carbon(DLC) films were deposited by linear ion source(LIS)-physical vapor deposition method changing the anode voltages from 800 V to 1800 V, and characteristics of the films were investigated using residual stress tester, nano-indentation, micro raman spectroscopy, scratch tester and Field Emission Scanning Electron Microscope(FE-SEM). The results showed that the residual stress and hardness increased with increasing the ion energy up to anode voltage of 1400 V. It was also found that the content of $SP^3$ carbon increased with increasing the anode voltage $SP^3/SP^2$ ratio through investigation of $SP^3/SP^2$ ratio by the micro-raman analysis. From these results, it can be concluded that the physical properties of DLC films such as residual stress and hardness are increased with increasing the anode voltage. These results can be explained that 3-dimensional cross-links between carbon atoms and Dangling bond are enhanced and the internal compressive stress also increased with increasing the anode voltage. The optimal anode voltage is considered to be around 1400 V in these experimental conditions.

PVD법에 의해 제작한 Al-Mg 코팅 강판의 내식성에 미치는 Mg 함량 및 열처리의 영향 (Influence of Heat Treatment and Magnesium Content on Corrosion Resistance of Al-Mg Coated Steel Sheet)

  • 강재욱;박준무;황성화;이승효;문경만;이명훈
    • 한국표면공학회지
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    • 제49권2호
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    • pp.202-210
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    • 2016
  • This study was intended to investigate the effect of the amount of magnesium addition and heat treatment in the Al-Mg coating film in order to improve corrosion resistance of aluminum coating. Al-Mg alloy films were deposited on cold rolled steel by physical vapor deposition sputtering method. Heat treatment was fulfilled in an nitrogen atmosphere at the temperature of $400^{\circ}C$ for 10 min. The morphology was observed by SEM, component and phase of the deposited films were investigated by using GDLS and XRD, respectively. The corrosion behaviors of Al-Mg films were estimated by exposing salt spray test at 5 wt.% NaCl solution and measuring polarization curves in deaerated 3 wt.% NaCl solution. With the increase of magnesium content, the morphology of the deposited Al-Mg films changed from columnar to featureless structure and particle size was became fine. The x-ray diffraction data for deposited Al-Mg films showed only pure Al peaks. However, Al-Mg alloy peaks such as $Al_3Mg_2$ and $Al_{12}Mg_{17}$ were formed after heat treatment. All the sputtered Al-Mg films obviously showed good corrosion resistance compared with aluminum and zinc films. And corrosion resistance of Al-Mg film was increased after heat treatment.

배수재 시공의 최적화를 위한 신뢰성 해석 (Reliability Analysis for Optimization of Construction Method of Drain Material)

  • 안현민;김문채;김대현
    • 한국지반신소재학회논문집
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    • 제13권4호
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    • pp.87-96
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    • 2014
  • 연약지반 개량공법을 적용한 내부가호안의 압밀침하 특성을 신뢰성 해석을 이용하여 분석하였으며, 이를 통해 PVD 최적 타설 간격을 설정하였고 외곽호안은 압밀기간 변화에 따른 잔류침하에 대해 안정성을 확보하는지를 검토 하였다. 연약지반 압밀침하 특성에 대한 신뢰성 해석 결과에서 지반정수의 불확실성을 고려해 과다 적용된 배수재 타설 간격을 각 구견별로 구분하여 적용함으로써 지반정수의 불확실성과 안정성을 모두 확보하는 동시에 공사비 측면에서도 경제적인 연약지반 개량공법의 형식으로 검토되었다. 또한 허용잔류 침하량을 초과할 확률이 10%이내에 해당하는 압밀기간을 적용하여 잔류침하에 대한 안정성을 확보하였으며, 각각의 분할된 영역에서 목표 압밀도에 도달할 확률이 95%를 만족하는 배수재 간격으로 시공하고 잔류침하량의 발생량이 10cm를 초과하지 않은 범위일 때는 허용부등침하경사 이상의 부등침하가 발생할 가능성은 거의 없는 것으로 나타났다.

용융Al-Si도금 강재에 형성한 Cr 막의 고온 환경 중 내식특성 (Corrosion resistance at high temperature condition of Cr Films Formed on hot-dip Al-Si plated steel sheet)

  • 강민주;이승효;이명훈
    • 한국표면공학회지
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    • 제55권6호
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    • pp.448-459
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    • 2022
  • Generally, steel is the most commonly used in the industry because of good strength, processability and cost-effectiveness. Steel can be surface-treated such as coating or used as an alloy by adding elements such as Cr, Ni, Zr, and Al to increase corrosion resistance. However, even if steel is used in same environment corrosion resistance is sharply lowered when it is exposed to a high temperature for a fixed or extended period of time due to an overload or other factors. In particular, the use of hot-dip aluminized plated steel, which is used in high-temperature atmospheres, is increasing due to the surface Al2O3 oxide film. This steel necessitates an urgent solution as issues of corrosion resistance limitations often appear. It is an important issue that not only cause analysis but also the research for the surface treatment method that can be solved. Thus, in this study, Cr in which it is expected to be effective in corrosion resistance and heat resistance attempted to deposit on hot dip aluminized plated steel with PVD sputtering. And it was possible to present the surface treatment application of various types of industrial equipment exposed to high temperature and basic design guidelines for use by confirming the corrosion resistance of hot dip Al-Si plated steel with Cr film deposited at high temperature.

A STUDY ON MECHANICAL PROPERTIES OF TiN, ZrN AND WC COATED FILM ON THE TITANIUM ALLOY SURFACE

  • Oh, Dong-Joon;Kim, Hee-Jung;Chung, Chae-Heon
    • 대한치과보철학회지
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    • 제44권6호
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    • pp.740-750
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    • 2006
  • Statement of problems. In an attempt to reduce screw loosening, dry lubricant coatings such as pure gold or tefron have been applied to the abutment screw. However, under repeated tightening and loosening procedures, low wear resistance and adhesion strength of coating material produced free particles on the surface of abutment screw and increased frictional resistance resulting in screw tightening problems. Purpose. The aim of this study was to compare friction coefficient, adhesion strength, vickers hardness and evaluate coating surface of titanium alloy specimens coated with TiN(titanium nitride), ZrN(zirconium nitride) and WC(tungsten carbide). Material and method. Titanium alloy(Ti-6Al-4V) discs of 12mm in diameter and 1mm in thickness divided into 4 groups. TiN, ZrN and WC was coated for the specimens of 3 groups respectively, and those of 1 group were not coated. Each group was made up of 4 specimens. In this study, sputtering method was used among the PVD(Physical Vapor Deposition) techniques available for TiN, ZrN and WC coatings. Friction coefficient, adhesion strength, vickers hardness and coating surface of 4 groups were measured. Results. 1. For all three coating conditions, friction coefficient was significantly decreased. Especially, ZrN coated surface showed the lowest value. $TiN(0.39{\pm}0.02)$, $ZrN(0.24{\pm}0.01)$, $WC(0.31{\pm}0.03)$. 2. TiN coating showed the highest adhesion strength, however ZrN coating had the lowest value. $TiN(25.3N{\pm}1.6)$, $ZrN(14.8N{\pm}0.6)$, $ WC(18.4N{\pm}0.7)$. 3. Vickers hardness of all three coatings was remarkably increased as compared with that of none coated specimen. TiN coating had the highest Vickers hardness, however WC coating showed the lowest value. $TiN(1865.2{\pm}33.8)$, $ZrN(1814.4{\pm}18.6)$, $WC(1008.5{\pm}35.9)$. 4. The ZrN or WC coated specimen showed a homogeneous and smooth surface, however the rough surface with defects was observed for TiN coating. Conclusions. When TiN, ZrN and WC coating applied to the abutment screw, frictional resistance would be reduced, as a result, the greater preload and prevention of the screw loosening could be expected.

HIGH HEAT FLUX TEST WITH HIP BONDED 35X35X3 BE/CU MOCKUPS FOR THE ITER BLANKET FIRST WALL

  • Lee, Dong-Won;Bae, Young-Dug;Kim, Suk-Kwon;Jung, Hyun-Kyu;Park, Jeong-Yong;Jeong, Yong-Hwan;Choi, Byung-Kwon;Kim, Byoung-Yoon
    • Nuclear Engineering and Technology
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    • 제42권6호
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    • pp.662-669
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    • 2010
  • To develop the manufacturing methods for the blanket first wall (FW) of the International Thermonuclear Experimental Reactor (ITER) and to verify the integrity of the joint, Be/Cu mockups were fabricated and tested at the KoHLT-1 (Korea Heat Load Test facility), a graphite heater facility located at the Korea Atomic Energy Research Institute (KAERI). Since Be and Cu joining is the focus of the present study, the fabricated mockups had a CuCrZr heat sink joined with three Be tiles as an armor material, unlike the original ITER blanket FW, which has a stainless steel structure and coolant tubes. Hot isostatic pressing (HIP) was carried out at $580^{\circ}C$ and 100 MPa for 2 hours as the method for Be/Cu joining. Three interlayers, namely, $1{\mu}mCr/10{\mu}mCu$, $1{\mu}mTi/0.5{\mu}mCr/10{\mu}mCu$, and $5{\mu}mTi/10{\mu}mCu$ were applied as a coating to the Be tiles by a physical vapor deposition (PVD) method. A shear test was performed with the specimens, which were fabricated by the same methods as those used to fabricate the mockups. The average values were 125 MPa to 180 MPa, and the samples with the $1{\mu}mCr/10{\mu}mCu$ interlayer showed the lowest value. No defect or delamination was found in the joints of the mockups by the developed ultrasonic test using a flat-type probe with a 10 MHz frequency and a 0.25 inch diameter. High heat flux (HHF) tests were performed at $1.0\;MW/m^2$ heat flux for each mockup using the given conditions, and the results were analyzed by ANSYS-CFX code. For the test criteria, an expected fatigue lifetime about 1,000 cycles was obtained by analysis with ANSYS-mechanical code. Mockups using the interlayers of $1{\mu}mTi/0.5{\mu}mCr/10{\mu}mCu$ and $5{\mu}mTi/10{\mu}mCu$ survived up to 1,100 cycles over the required number of cycles. However, one of the Be tiles in the other two mockups using the $1{\mu}mCr/10{\mu}mCu$ interlayer was detached during the screening test, and others were detached by discharge after 862 cycles. The integrity of the joints using the proposed interlayers was proven by the HHF test, but the other interlayer requires more study before it can be used for the joining of Be to Cu. Moreover, it was confirmed that the measured temperatures agreed well with the analysis temperatures, which were used to estimate the lifetime and that the developed facility showed its capability of the long time operation.

증착 기법을 이용한 리튬이차전지용 초박막 세라믹 코팅 분리막 기술 (A Review on Ultrathin Ceramic-Coated Separators for Lithium Secondary Batteries using Deposition Processes)

  • 김우철;노영준;최승엽;;이용민
    • 전기화학회지
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    • 제25권4호
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    • pp.134-153
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    • 2022
  • 리튬이온전지의 에너지밀도가 지속적으로 높아지고 사용환경이 가혹해지고 있지만, 전지의 안전성은 타협할 수 있는 특성이 아니다. 특히, 더 높은 에너지밀도 확보를 위해 고용량 전극 소재 개발과 함께 분리막 원단 뿐만 아니라 세라믹 코팅층의 두께 및 무게의 박막화와 경량화가 동시에 요구되고 있다. 그 중, 기존 슬러리 코팅 방식을 증착 방식으로 대체하는 기술이 주목받고 있으며, 분리막의 내열성 확보를 위해 도입된 수 ㎛ 수준의 세라믹 코팅층을 nm 수준으로 박막/경량화 하면서도 동등의 내열성을 확보하는 시도가 진행되고 있다. 증착법으로 제조된 세라믹 코팅 분리막은 리튬이온전지 에너지밀도를 크게 증가시킬 수 있는 효율적인 방법이지만, 균일한 물성의 세라믹 코팅 분리막을 제작하기 위해서는 증착 공정 중 온도를 제어해야 하며, 생산속도와 공정비용을 기존 슬러리 코팅 수준으로 떨어뜨려야 하는 현실적 문제가 존재한다. 그럼에도 불구하고, 분리막 원단 대비 두께 및 무게 증가가 거의 없다는 점에서는 전지의 고에너지밀도 달성에 필요한 매력적인 접근법임은 분명하다. 본 총설에서는 세라믹 증착 코팅에 사용되고 있는 세 가지 방법인 1) 화학적 기상 증착법, 2) 원자층 증착법, 그리고 3) 물리적 기상 증착법으로 제조된 세라믹 코팅 분리막을 소개하고자 한다. 각 증착법의 원리와 장/단점을 설명하고, 제조된 세라믹 코팅 분리막의 물리적, 전기화학적 특성 및 전지의 성능 변화를 비교 분석하였다. 또한, 소재 관점에서 금속 또는 유기물질이 코팅된 초박막 코팅 분리막의 기술 동향도 소개하였다.

Morphology of RF-sputtered Mn-Coatings for Ti-29Nb-xHf Alloys after Micro-Pore Form by PEO

  • Park, Min-Gyu;Park, Seon-Yeong;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.197-197
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    • 2016
  • Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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PEMOCVD of Ti(C,N) Thin Films on D2 Steel and Si(100) Substrates at Low Growth Temperatures

  • Kim, Myung-Chan;Heo, Cheol-Ho;Boo, Jin-Hyo;Cho,Yong-Ki;Han, Jeon-Geon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.211-211
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    • 1999
  • Titanium nitride (TiN) thin films have useful properties including high hardness, good electrical conductivity, high melting point, and chemical inertness. The applications have included wear-resistant hard coatings on machine tools and bearings, decorative coating making use of the golden color, thermal control coatings for widows, and erosion resistant coatings for spacecraft plasma probes. For all these applications as feature sizes shrink and aspect ratios grow, the issue of good step coverage becomes increasingly important. It is therefore essential to manufacture conformal coatings of TiN. The growth of TiN thin films by chemical vapor deposition (CVD) is of great interest for achieving conformal deposition. The most widely used precursor for TiN is TiCl4 and NH3. However, chlorine impurity in the as-grown films and relatively high deposition temperature (>$600^{\circ}C$) are considered major drawbacks from actual device fabrication. To overcome these problems, recently, MOCVD processes including plasma assisted have been suggested. In this study, therefore, we have doposited Ti(C, N) thin films on Si(100) and D2 steel substrates in the temperature range of 150-30$0^{\circ}C$ using tetrakis diethylamido titanium (TDEAT) and titanium isopropoxide (TIP) by pulsed DC plamsa enhanced metal-organic chemical vapor deposition (PEMOCVD) method. Polycrystalline Ti(C, N) thin films were successfully grown on either D2 steel or Si(100) surfaces at temperature as low as 15$0^{\circ}C$. Compositions of the as-grown films were determined with XPS and RBS. From XPS analysis, thin films of Ti(C, N) with low oxygen concentration were obtained. RBS data were also confirmed the changes of stoichiometry and microhardness of our films. Radical formation and ionization behaviors in plasma are analyzed by optical emission spectroscopy (OES) at various pulsed bias and gases conditions. H2 and He+H2 gases are used as carrier gases to compare plasma parameter and the effect of N2 and NH3 gases as reactive gas is also evaluated in reduction of C content of the films. In this study, we fond that He and H2 mixture gas is very effective in enhancing ionization of radicals, especially N resulting is high hardness. The higher hardness of film is obtained to be ca. 1700 HK 0.01 but it depends on gas species and bias voltage. The proper process is evident for H and N2 gas atmosphere and bias voltage of 600V. However, NH3 gas highly reduces formation of CN radical, thereby decreasing C content of Ti(C, N) thin films in a great deal. Compared to PVD TiN films, the Ti(C, N) film grown by PEMOCVD has very good conformability; the step coverage exceeds 85% with an aspect ratio of more than 3.

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