Effect of Anode Voltage on Diamond-like Carbon Thin Film Using Linear Ion Source
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Kim, Wang-Ryeol
(Department of Materials Science and Engineering, Pusan National University)
Jung, Uoo-Chang (Dongnam Technology Service Division, Korea Institute of Industrial Technology) Jo, Hyung-Ho (Dongnam Technology Service Division, Korea Institute of Industrial Technology) Park, Min-Suk (J&L Tech Co., Ltd.) Chung, Won-Sub (Department of Materials Science and Engineering, Pusan National University) |
1 | J. Robertson, Mater. Sci. Eng., R 37 (2002) 129 |
2 | J. Robertson, Surface and Coating Technology, 50 (1992) 185 DOI ScienceOn |
3 | K.-R. Lee, K. Y. Eun, I. Y. Kim, J. R. Kim, Thin Solid Films, 377-378 (2000) 261 DOI ScienceOn |
4 | H. Tsai, D. B. Bogy, J. Vac. Sci. Technol., A5 (1987) 3287 |
5 | D. Nir, Thin Solid Films, 112 (1984) 41 DOI ScienceOn |
6 | J. W. Zou, K. Schmidt, K. Reichelt, B. Dischler, J. Appl. Phys., 67 (1990) 487 DOI |
7 | J. Robertson, Diamond & Related Materials, 2 (1993) 984 DOI ScienceOn |
8 | D. Sheeja, B. K. Tay, S. M. Krishnan, L. N. Nung, Diamond & Related Materials, 12 (2003) 1389 DOI ScienceOn |
9 | J. C. Angus, P. Koidl, S. Domitz, Plasma Deposited Thin Films, CRC Press, Boca Raton, FL (1986) 89 |
10 | Y. H. Son, W. C. Jung, J. I. Jeong, N. G. Park, I. S. Kim, K. H. Kim, I. H. Bae, J. Kor. Vac. Soc., 9 (2000) 328 |
11 | K. Enke, Thin Solid Films, 80 (1981) 227 DOI ScienceOn |
12 | K.-R. Lee, K. Y. Eun, Bull. of the Korean Inst. of Met. & Mater., 6(4) (1993) 345 |
13 | R. K. Singh, Z. H. Xie, A. Bendavid, P. J. Martin, P. Munroe, M. Hoffman, Diamond & Related Materials, 17 (2008) 975 DOI ScienceOn |
14 | J. Veverkova, S. V. Hainsworth Wear, 264 (2008) 518 DOI ScienceOn |
15 | C. K. Lee, Diamond & Related Materials, 17 (2008) 306 DOI ScienceOn |
16 | C. S. Lee, J.-K. Shin, J. K. Kim, K.-R. Lee, K.-H. Yoon, J. Kor. Vac. Soc., 11 (2002) 8 |
17 | D. Sheeja, B. K. Tay, K. W. Leong, C. H. Lee, Diamond & Related Materials, 11 (2002) 1643 DOI ScienceOn |
18 | M. David, R. Padiyath, S. V. Badu AIChE J., 37 (1991) 367 DOI |
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