• 한국입자에어로졸학회지
• /
• 제9권4호
• /
• pp.261-269
• /
• 2013

The chemical mechanical polishing (CMP) process is widely used in semiconductor manufacturing process for planarization of various materials and structures. Point-of-use (POU) filters are used in most of the CMP processes in order to reduce the unwanted micro-scratches which may result in defects. The performance of the POU filter is depends on type and size of the abrasives used during cleaning process. For this reason, there is a need to evaluate POU filters for their filtration efficiency (FE) with different types of abrasives. In this study, we developed filter test system to evaluate the FE of POU using ceria and silica abrasives (slurry). The POU filter is roll type capsule filter with retention size of 0.2 ${\mu}m$. Two POU filters of different make are evaluated for FE. We observed that both POU filters show similar filtration efficiency for silica and ceria slurry. Results reveal that the ceria slurry and the colloidal silica particle are removed not only by mechanical way but also hydrodynamic and electrostatic interaction way.

• Clinical and Experimental Pediatrics
• /
• 제50권7호
• /
• pp.622-628
• /
• 2007

목 적 : 소아 관찰병실(pediatric observation unit: POU)의 운영내역을 분석하여 국내에서도 그 적용이 가능한지를 평가하기 위함이다. 방 법 : 2006년 3월부터 2007년 2월까지 1년간 가톨릭대학교 성모자애병원 소아과 POU에 입원한 환아들을 대상으로 하여 의무기록을 분석하였고 평균재원일수와 병상회전율을 평가하기 위하여 연구기간 1년 전 자료와 비교하였다. 결 과 : 총 1,076명이 POU에 입원하였으며 환아들의 중앙 연령은 2.4세이었고 중앙 재원시간은 14시간 00분이었다. 질환별로는 장염(42.7%)이 가장 많았고 그 외 급성인후염(19.1%), 모세기관지염(7.8%), 폐렴(5.5%), 열성경련(5.2%) 순이었다. 전체 환아 중 7.5%(81/1,076명)는 일반입원으로 전환되어 입원이 연장되었다. 전환율이 낮은 질환들은 변비와 장염, 중이염과 인후염을 포함한 상기도 감염성 질환, 경련성 질환, 후두염이었고 전환율이 높은 질환들은 폐렴, 발열이 조절되지 않은 열성경련, 천식이었다. POU 시행 1년전 자료와 비교할 때, 전체 입원환자의 평균 재원일수는 4.69일에서 3.75일로 감소하였고 병상회전율은 1병상 당 78.8명에서 98.2명으로 증가하였다. 결 론 : POU는 국내에서도 효율적으로 운영될 수 있음을 확인하였다. 향후 POU는 외래와 응급실 진료의 제한점을 보완하며 불필요한 입원기간을 줄일 수 있는 소아과 영역의 새로운 진료 형태로 자리잡을 수 있을 것이라고 기대한다.

• Journal of Animal Science and Technology
• /
• 제56권7호
• /
• pp.25.1-25.6
• /
• 2014

This study was carried out to investigate the association of POU1F1 (POU domain, class 1, transcription factor 1, Pit1, renamed as POU1F1) gene with backfat thickness (mm), carcass weight (kg), pH, and color values ($L^*$, $a^*$, $b^*$) in crossbred pigs (Landrace ${\times}$ Yorkshire ${\times}$ Duroc). Frequency of the AA genotype indel was at the highest level (66.67%). Frequency of A allele (0.81) was higher than that of b allele (0.19). This population followed Hardy-Weinberg equilibrium. Carcass weights and $a^*$ values of the three genotypes were all significantly different (p < 0.05), respectively. However, backfat thickness, $L^*$, $b^*$, visual color, and pH of the three genotypes were not significantly different (p > 0.05). Visual color was negatively correlated with $L^*$ (r = -0.521) and $b^*$ (r = -0.390) values, $L^*$ value was correlated with $b^*$ (r = 0.419) value, and $a^*$ value was positively correlated with $b^*$ (r = 0.612) value. These results indicate that the POU1F1 gene affected carcass weight and meat redness.

• Asian-Australasian Journal of Animal Sciences
• /
• 제31권5호
• /
• pp.643-649
• /
• 2018

Objective: POU class 1 homeobox 1 (POU1F1) mediates growth hormone expression and activity by altering transcription, eventually resulting in growth rate variations. Therefore, we aimed to identify chicken POU1F1 polymorphisms and evaluate the association between single nucleotide polymorphisms (SNPs) and growth-related traits, and logistic growth curve parameter traits (${\alpha}$, ${\beta}$, and ${\gamma}$). Methods: Three SNPs (M_1 to M_3) were used to genotype 585 $F_1$ and 88 $F_0$ birds from five Korean native chicken lines using a polymerase chain reaction-restriction fragment length polymorphism method. Results: Single marker analyses and traits association analyses showed that M_2 was significantly associated with body weight at two weeks, weight gain from hatch to 2 weeks, and weight gain from 16 to 18 weeks (p<0.05). M_3 was significantly associated with weight gain from 14 to 16 weeks and from 16 to 18 weeks, and asymptotic body weight (${\alpha}$) (p<0.05). No traits were associated with M_1. The POU1F1 haplogroups were significantly associated with weight gain from 14 to 16 weeks (p = 0.020). Linkage disequilibrium test and Haploview analysis shown one main haploblock between M_2 and M_3 SNP. Conclusion: Thus, POU1F1 significantly affects the growth of Korean native chickens and their growth curve traits.

• 한국입자에어로졸학회지
• /
• 제12권4호
• /
• pp.145-150
• /
• 2016

During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

• Journal of Animal Science and Technology
• /
• 제51권4호
• /
• pp.283-288
• /
• 2009

본 연구는 비육돈 268두를 대상으로 13번 염색체 중 POU1F1 intron 3영역의 유전자 Single Nucleotide Polymorphism(SNP)은 Msp I 제한효소에 의해서 구분된다. 직접 제작한 Primer로 POU1F1 유전자 중 intron 3영역을 증폭할 수 있도록 제작하였고, 823bp의 증폭산물을 기대할 수 있었다. 그 SNP 유전자형을 3개 군으로 분류하여 빈도 추정과 함께 육질관련 형질과의 연관성을 분석한 결과는 다음과 같다. POU1F1 SNP의 DD 유전자형은 84.33%로 가장 높은 출현율을 보인 반면에 CC 유전자형은 0.75%로 매우 낮게 나타났다. 대립유전자 D 빈도는 0.918로 매우 높게 출현하였으나, C 빈도는 0.082로 매우 낮게 출현하였다. Hardy-Weinberg 법칙에 따른 적합도 검정에서는 유의성 없이(p>0.05) 유전적 평형을 이루고 있는 집단임을 알 수 있었다. CD와 DD 유전자형 집단에서 등지방두께, 도체중, Hunter a 및 b값, 그리고 pH에서는 모두 유의한 차이를 보이지 않았으나, Hunter $L^*$값은 CD(37.26) 보다 DD(40.15) 유전자형 개체군에서 짙게 나타났고(p<0.05), 육색도판에 의한 육색은 DD(3.91) 보다 CD(5.09) 유전자형 개체에서 짙게 나타났다((p<0.001). 따라서 이러한 POU1F1 유전자의 SNP 유전자형은 돼지의 성장이나 도체관련 형질과의 연관성을 더욱 깊이 있게 탐색하여 명확한 구명으로 우량 돈육 생산을 위한 DNA marker로 활용되어야 할 것으로 사료된다.

• 한국전기전자재료학회논문지
• /
• 제14권9호
• /
• pp.703-703
• /
• 2001

• 공업화학
• /
• 제29권1호
• /
• pp.10-17
• /
• 2018

반도체 및 디스플레이 제조공정 중에 화학기상증착(CVD), 식각(etching), 세정(cleaning) 공정에서 배출되는 과불화합물(PFCs)를 포함한 폐 가스 처리를 위해서 POU (point of use) 가스 스크러버 시스템을 도입하여 사용하고 있다. 과불화합물은 지구온난화 지수(GWP, global warming potential)와 대기 중 자연분해되는 기간(lifetime)이 $CO_2$에 비해 수천 배 높은 온실가스로 분류되어 있으며, 과불화합물의 열분해를 위해서는 3,000 K 이상의 고온이 요구되는 것이 일반적이다. 이러한 특징 때문에 과불화합물을 효과적으로 제어하기 위한 방법으로 열플라즈마 기술을 도입하고자 하는 노력들이 진행되어 왔으며, POU 가스 스크러버 기술을 개발하여 산업적으로 이용하고자 하였다. 열플라즈마 기술은 플라즈마 토치 기술, 전원공급장치 기술 및 플라즈마 토치-전원공급장치 매칭 기술 최적화를 통해 안정적으로 플라즈마 발생원을 유지시키는 것이 중요하다. 또한, 과불화합물 고효율 처리를 위한 고온의 플라즈마와 폐 가스의 효과적인 혼합이 주요 기술요인으로 확인되었다. 본 논문에서는 반도체 및 디스플레이 공정 폐 가스 처리를 위한 후처리 공정에 대한 기술적 정보를 제공함과 동시에 POU 플라즈마 가스 스크러버에 대한 기술개발 동향을 파악함으로써 향후 연구개발이 요구되는 핵심사항에 대해 논의하고자 한다.

• 한국전기전자재료학회논문지
• /
• 제14권9호
• /
• pp.707-713
• /
• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• Asian-Australasian Journal of Animal Sciences
• /
• 제20권9호
• /
• pp.1342-1348
• /
• 2007

POU1F1 is a positive regulator for GH, PRL and TSH${\beta}$ and its mutations associate with production traits in ruminant animals. We described a DdeI PCR-RFLP method for detecting a silent allele in the goat POU1F1 gene: TCT (241Ser)>TCG (241Ser). Frequencies of $D_1$ allele varied from 0.600 to 1.000 in Chinese 801 goats. Significant associations of DdeI polymorphism with production traits were found in milk yield (*p<0.05), litter size (*p<0.05) and one-year-old weight (*p<0.05) between different genotypes. Individuals with genotype $D_1D_1$ had a superior performances when compared to those with genotype $D_1D_2$ (*p<0.05). Hence, the POU1F1 gene was suggested to the potential candidate gene for superior milk performance, reproduction trait and weight trait. Genotype $D_1D_1$, characterized by a DdeI PCR-RFLP detection, was recommended to geneticists and breeders as a molecular marker for better performance in the goat industry.