Evaluation of Point-Of-Use (POU) Filters Performance in Chemical Mechanical Polishing Slurry Supply System |
Jang, Sunjae
(School of Mechanical Engineering, Sungkyunkwan University)
Kim, Hojoong (CMP Technology and Cleaning Team, SAMSUNG Electronics) Jin, Hongi (SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) Nam, Miyeon (R&D institute, Woongjin chemical co., Ltd.) Kulkarni, Atul (School of Mechanical Engineering, Sungkyunkwan University) Kim, Taesung (School of Mechanical Engineering, Sungkyunkwan University) |
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