• 제목/요약/키워드: Oxygen Flow Rate

검색결과 689건 처리시간 0.027초

A Study on Properties of RF-sputtered Al-doped ZnO Thin Films Prepared with Different Ar Gas Flow Rates

  • Han, Seung Ik;Kim, Hong Bae
    • Applied Science and Convergence Technology
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    • 제25권6호
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    • pp.145-148
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    • 2016
  • This paper, Al-doped ZnO(AZO) thin films for application as transparent conducting oxide films were deposited on the Corning glass substrate by using RF magnetron sputtering system. The effects of various Argon gas flow rates on optical and electrical characteristics of AZO films were investigate sputtering method. The Carrier Concentration is enhanced as Ar gas rate increases, and also the oxygen vacancy concentration. The figure of merit obtained in this study means that AZO films which deposited Ar gas rate of 75 sccm have the highest Carrier concentration and Hall mobility, which have the highest photoelectrical performance that it could be used as transparent electrodes.

기판온도 및 수소 분위기 가스에 따른 IGZO 투명전도성박막의 구조적 및 전기적 특성 (Effect of Substrate Temperature and Hydrogen Ambient Gases on the Structural and Electrical Characteristics of IGZO Thin Films)

  • 배장호;이규만
    • 반도체디스플레이기술학회지
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    • 제21권1호
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    • pp.12-16
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    • 2022
  • We have investigated the effect of the substrate temperature and hydrogen flow rate on the characteristics of IGZO thin films for the TCO (transparent conducting oxide). For this purpose, IGZO thin films were deposited by RF magnetron sputtering at room temperature and 300℃ with various H2 flow rate. Experiments were carried out while varying the hydrogen gas flow rate from 0sccm to 1.0sccm in order to see how the hydrogen gas affects the IGZO thin films. IGZO thin films deposited at room temperature and 300℃ showed amorphous. The lowest resistivity value was 0.379×10-5 Ωcm when the IGZO film was deposited at 300℃ and set up at 1.0sccm. As the oxygen vacancy rate increased, the resistivity intended to decrease. In conclusion, Oxygen vacancy affects the IGZO thin film's electrical characteristic.

Pilot 플라즈마 반응기를 이용한 하수 중 미생물의 불활성화 (Inactivation of Microorganisms in Sewage Using a Pilot Plasma Reactor)

  • 김동석;박영식
    • 한국환경보건학회지
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    • 제39권3호
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    • pp.289-299
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    • 2013
  • Objectives: For the field application of the dielectric barrier discharge plasma reactor, scale-up of the plasma reactor is needed. This study investigated the possibility of inactivation of microorganisms in sewage using pilot multi-plasma reactor. We also considered the possibility of degradation of total organic carbon (TOC) and nonbiodegradable matter ($UV_{254}$) in sewage. Methods: The pilot plasma reactor consists of plasma reactor with three plasma modules (discharge electrode and quartz dielectric tube), liquid-gas mixer, high voltage transformers, gas supply equipment and a liquid circulation system. In order to determine the operating conditions of the pilot plasma reactor, we performed experiments on the operation parameters such as gas and liquid flow rate and electric discharge voltage. Results: The experimental results showed that optimum operation conditions for the pilot plasma reactor in batch experiments were 1 L/min air flow rate), 4 L/min liquid circulation rate, and 13 kV electric discharge voltage, respectively. The main operation factor of the pilot plasma process was the high voltage. In continuous operation of the air plasma process, residual microorganisms, $UV_{254}$ absorbance and TOC removal rate at optimal condition of 13 kV were $10^{2.24}$ CFU/mL, 56.5% and 8.6%, respectively, while in oxygen plasma process at 10 kV, residual microorganisms, $UV_{254}$ absorbance and TOC removal rate at optimal conditions were $10^{1.0}$ CFU/mL, 73.3% and 24.4%, respectively. Electric power was increased exponentially with the increase in high voltage ($R^2$ = 0.9964). Electric power = $0.0492{\times}\exp^{(0.6027{\times}lectric\;discharge\;voltage)}$ Conclusions: Inactivation of microorganisms in sewage effluent using the pilot plasma process was done. The performance of oxygen plasma process was superior to air plasma process. The power consumption of oxygen plasma process was less than that of air plasma process. However, it was considered that the final evaluation of air and oxygen plasma must be evaluated by considering low power consumption, high process performance, operating costs and facility expenses of an oxygen generator.

활성탄소섬유에 도입된 산소작용기가 유독성 화학작용제 감응특성에 미치는 영향 (Effects of Oxygen Functional Groups introduced onto Activated Carbon Fibers on Gas Sensing Property of Chemical Warfare Agent)

  • 김수현;김민지;송은지;이영석
    • 공업화학
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    • 제30권6호
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    • pp.719-725
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    • 2019
  • 본 실험에서는 활성탄소섬유에 산소플라즈마 처리를 실시하여 산소작용기 도입 함량에 따른 유독성 화학작용제의 모사 가스인 dimethyl methylphosphonate (DMMP) 감응특성에 대하여 고찰하였다. 산소플라즈마 처리 유량이 증가할수록 활성탄소섬유 표면에 산소가 6.90%에서 최대 36.6%까지 도입되어 DMMP 가스 감응특성에 영향을 미치는 -OH가 증가하였다. 그러나 유량이 증가할수록 산소플라즈마 처리 시 발생한 산소 활성종으로 인하여 활성탄소섬유 표면에 식각이 발생하여 비표면적은 감소하는 경향을 보였다. DMMP 가스센서의 저항변화율은 산소플라즈마 처리 유량이 증가함에 따라 4.2%에서 최대 25.1%까지 증가하였다. 이는 산소플라즈마 처리로 인하여 활성탄소섬유에 발달된 -OH와 DMMP 가스의 수소결합으로 인한 것이라 여겨진다. 따라서 산소플라즈마 처리는 상온에서 유독성화학작용제 가스를 감지하기 위한 중요한 표면처리 방법 중 하나라고 판단된다.

고압하에서 수소-산소의 정체점 점화에 관한 이론적 해석 (Asymptotic Analysis on the Stagnation-Point Ignition of Hydrogen-Oxygen Mixture at High Pressures)

  • 이수룡
    • 대한기계학회논문집B
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    • 제27권10호
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    • pp.1393-1400
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    • 2003
  • Ignition of hydrogen and oxygen in the "third limit" is theoretically investigated in the stagnation point flow with activation energy asymptotics. With the steady-state approximations of H, OH, O and HO$_2$, a two-step reduced kinetic mechanism is derived for the regime lower than the crossover temperature T$_{c}$ at which the rates of production and consumption of all radicals are equal. Appropriate scaling of Damkohler number successfully provides the explicit relationship between pressure, temperature and strain rate at ignition. It is shown that, compared with those for the counterflow, ignition temperatures for the stagnation point flow are considerably increased with increasing the system pressure. This is because ignition in the "third limit" is characterized by the production of reduction of $H_2O$$_2$, which is reduced by wall effect. Strain rate substantially affects ignition temperature because key reaction rates of $H_2O$$_2$ are comparably with its transport rate, while the mixture temperature and the hydrogen composition do not significantly affect ignition temperature.e.

마이크로컴퓨터를 이용한 고농도 유가배양시스템 (Microcomputer-aided Fermentation System for High Density Fed-Batch Cultivation)

  • 이형준;이계호허윤행
    • KSBB Journal
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    • 제5권3호
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    • pp.307-313
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    • 1990
  • 배양기와 16비트 마이크로컴퓨터를 접속하여 호기성 미생물의 고농도 유가배양시스템을 구성하였다. 기질공급을 위한 제어변수로는 용존산소(DO)를 이용하였다. 용존산소측정기의 출력신호를 컴퓨터에 입력시켜 측정한 DO값에 근거하여 교반모터의 교반속도와 산소유량을 제어함으로써 배양액의 DO를 일정하게 유지하였으며, 연동펌프의 제어에 의해 기질공급을 안정하게 수행하였다. 기질공급의 제어와 DO의 제어를 한가지의 하아드웨어 및 소프트 웨어로 수행할 수 있었다. 제어시스템을 이용하여 메탄올이용균인 Methylobacillus sp. SKI을 유가배양한 결과 배양액의 DO제어와 메탄올 공급의 제어가 무리없이 수행되었으며, 배양 10시간만에 16.53g/l의 균체농도에 도달하였다.

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RF 스퍼터링을 이용하여 저온에서 SiO2/Si 기판 위에 증착된 La0.7Sr0.3MnO3 박막의 구조 및 전기적 특성 (Structural and Electrical Properties of SiO2/Si Film on La0.7Sr0.3MnO3Substrate by RF Magnetron Sputtering at Low Temperature)

  • 최선규;;하태정;유병곤;박영호
    • 한국세라믹학회지
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    • 제44권11호
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    • pp.645-649
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    • 2007
  • The $La_{0.7}Sr_{0.3}MnO_3$ was deposited on $SiO_2/Si$ substrate by RF magnetron sputtering. The oxygen gas flow rate was changed from 0 to 80 sccm and the substrate temperature was $350^{\circ}C$. The oxygen gas flow rate was changed to control the growth orientation and crystalline state of the film. Relatively high TCR (temperature coefficient of resistance) value (-2.33%/K) was obtained when comparing with the reported values of the films prepared by using high substrate anneal temperature. The decrease in the sheet resistance and TCR value were observed when grain size of the film increased with the increase of oxygen gas flow rate.

The Reactions of O(3P) Atom with Halomethanes: Discharge Flow-Chemiluminescence Imaging Method

  • Lee, Jee-Yon;Yoo, Hee-Soo
    • Bulletin of the Korean Chemical Society
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    • 제23권2호
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    • pp.291-294
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    • 2002
  • The reactions of triplet oxygen atom with halomethanes as a potential fire extinguisher were studied by a discharge flow-chemiluminescence imaging method. The experiments were carried out under second order conditions. The bimolecular atom-molecule reaction rate constants were determined in terms of the initial rate method. The initial concentration of oxygen atom was also determined under second order rate law instead of the pseudo-first order conditions with $[O(^3P)]_0{\ll}[sample]_0$. The second order conditions were more reliable than pseudo-first order conditions for the determinations of rate constants. The rate constants of the reactions $CF_3I\;+\;O(^3P)$, $CH_3PI\;+\'O(^3P)$, and $CHBrCl_2\;+\;O(^3P)$ were determined to be $5.0\;{\times}\;10^{-12}$ , $1.1\;×\;0^{-11}$ , and $1.9\;{\times}\;10^{-14}cm^3molecule^{-1}s^{-1}$, respectively.

Oxygen Transfer Rate Coefficient of Membrane Aeration Bioreactor for Vero Cell Culture

  • 전주미;정연호;김익환;이상종;장용근;전계택
    • 한국생물공학회:학술대회논문집
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    • 한국생물공학회 2002년도 생물공학의 동향 (X)
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    • pp.269-270
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    • 2002
  • Oxygen is a key substrate in animal cell metabolism and its consumption is thus a parameter of great interest for monitoring and control in animal cell culture bioreactor. The use of a gas-permeable membrane offered the possibility to provide the required quantity of oxygen into the culture. while avoiding problems of foaming or shear damage generally linked to sparging. For determining the optimum DO control strategy of this gas-permeable membrane aeration bioreactor, the oxygen transfer rate coefficient was measured with varying $N_2$ ratio in inlet air. The results showed that an increasing mass flow rate of nitrogen reduced the $K_La$ value. and 5% nitrogen in air did not result in any oxygen limitation.

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극저온 자연순환회로의 가속 및 저중력 구간 유량 분석 (Analysis of the Flow Rate for a Natural Cryogenic Circulation Loop during Acceleration and Low-gravity Section)

  • 백승환;정영석;조기주
    • 한국추진공학회지
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    • 제23권5호
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    • pp.43-52
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    • 2019
  • 극저온 유체를 사용하는 발사체는 극저온 유체의 자연순환회로를 이용하여 발사체의 엔진 입구를 냉각한다. 자연순환회로의 질량유량은 순환시스템을 구성하는 배관의 길이 및 직경과 시스템으로 들어오는 열유입에 의하여 결정된다. 극저온 유체의 자연순환회로의 순환 검증 및 질량유량 측정을 위하여 실험을 진행하였으며, 이론적 계산 결과와 비교하였다. 비교 결과 12%의 오차가 있음을 확인하였다. 이 결과를 바탕으로 발사체 상단에서 저중력 구간 및 가속 구간에서의 자연순환 질량유량을 예측한 내용을 포함한다. 가속구간에서는 산화제탱크가 100 kPa 내외로 유지하는 것이 자연순환유량 증가에 이로웠으며, 저중력구간에서는 중력가속도의 크기에 따른 최적 압력으로 조절해야 자연순환유량의 최고값을 유지할 수 있었다.